EP406690-A  PATENT ABSTRACTS OF JAPAN vol. 005, no. 011 (E-042) 23 January 1981 & JP-A-55 141 729 (NIPPON TELEGR & TELEPH CORP ) 5 November 1980;  PATENT ABSTRACTS OF JAPAN vol. 006, no. 230 (E-142) 16 November 1982 & JP-A-57 133 636 (NIPPON DENSHIN DENWA KOSHA) 18 August 1982;  PATENT ABSTRACTS OF JAPAN vol. 011, no. 159 (C-423) 22 May 1987 & JP-A-61 288 074 (CANON INC) 18 December 1986;  PATENT ABSTRACTS OF JAPAN vol. 011, no. 159 (C - 423) 22 May 1987 (1987-05-22),relevantClaims[1],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;];  PATENT ABSTRACTS OF JAPAN vol. 006, no. 230 (E - 142) 16 November 1982 (1982-11-16),relevantClaims[1],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;];  PATENT ABSTRACTS OF JAPAN vol. 005, no. 011 (E - 042) 23 January 1981 (1981-01-23),relevantClaims[1],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;]EP406690-A3  PATENT ABSTRACTS OF JAPAN vol. 011, no. 159 (C-423) 22/05/1987 & JP61 288 074 (CANON INC) 18/12/1986;  PATENT ABSTRACTS OF JAPAN vol. 005, no. 011 (E-042) 23/01/1981 & JP55 141 729 (NIPPON TELEGR & TELEPH CORP ) 05/11/1980;  PATENT ABSTRACTS OF JAPAN vol. 006, no. 230 (E-142) 16/11/1982 & JP57 133 636 (NIPPON DENSHIN DENWA KOSHA) 18/08/1982US5510151-A  "Low temperature oxidation of silicon using a microwave plasma disk source," T. Roppel et al., J. Vac. Sci. Technol. B4(1), Jan.Feb. 1986, pp. 295-298;  "The performance of a microwave ion source immersed in a multicusp static magnetic field," M. Dahimene et al., J. Vac. Sci, Technol. B4(1), Jan.Feb. 1986, pp. 126-130EP406690-B1  PATENT ABSTRACTS OF JAPAN vol. 005, no. 011 (E-042) 23 January 1981 and JP-A-55 141 729;  PATENT ABSTRACTS OF JAPAN vol. 006, no. 230 (E-142) 16 November 1982 and JP-A-57 133 636;  PATENT ABSTRACTS OF JAPAN vol. 011, no. 159 (C-423) 22 May 1987 and JP-A-61 288 074US5714010-A  "Low temperature oxidation of silicon using a microwave plasma disk source," T. Roppel et al., J. Vac. Sci. Technol. B4(1), Jan./Feb. 1986, pp. 295-298.;  "The performance of a microwave ion source immersed in a multicusp static magnetic field," M. Dahimene et al., J. Vac. Sci, Technol. B4(1), Jan./Feb. 1986, pp. 126-130.