EP536160-A  See references of WOA 9119316WO9119316-A  1987 Proceedings Fourth International IEEE BLSI Multilevel Interconnection Conference, Santa Clara, CA, US, 15-16 June 1987, IEEE, C. Chiang et al.: &quot;Defects study on spin on glass planarization technology&quot;, pages 404-412;  J. Electrochem. Soc., vol. 137, nop. 1, January 1990, The Electrochemical Society, Inc., G. Smolinsky et al.: &quot;Material properties of spin-on silicon oxide (SOX) for fully recessed NMOS field isolation&quot;, pages 229-234;  Journal of the Electrochemical Society, vol. 135, no. 5, May 1988, (Manchester, NH, US), P.E. Riley et al.: &quot;Characterization of a spin-applied dielectric for use in multilevel metallization&quot;, pages 1207-1210;  1987 Proceedings Fourth International IEEE BLSI Multilevel Interconnection Conference, Santa Clara, CA, US, 15-16 June 1987, IEEE, C. Chiang et al.: "Defects study on spin on glass planarization technology", pages 404-412;  J. Electrochem. Soc., vol. 137, nop. 1, January 1990, The Electrochemical Society, Inc., G. Smolinsky et al.: "Material properties of spin-on silicon oxide (SOX) for fully recessed NMOS field isolation", pages 229-234;  Journal of the Electrochemical Society, vol. 135, no. 5, May 1988, (Manchester, NH, US), P.E. Riley et al.: "Characterization of a spin-applied dielectric for use in multilevel metallization", pages 1207-1210EP536160-B1  1987 Proceedings Fourth International IEEE BLSI Multilevel Interconnection Conference, Santa Clara, CA, US, 15-16 June 1987, IEEE, C. Chiang et al.: "Defects study on spin on glass planarization technology", pages 404-412;  J. Electrochem. Soc., vol. 137, nop. 1, January 1990, The Electrochemical Society, Inc., G. Smolinsky et al.: "Material properties of spin-on silicon oxide (SOX) for fully recessed NMOS field isolation", pages 229-234;  Journal of the Electrochemical Society, vol. 135, no. 5, May 1988, (Manchester, NH, US), P.E. Riley et al.: "Characterization of a spin-applied dielectric for use in multilevel metallization", pages 1207-1210