DE4423289-C1  D. Leinen, A. Fernandez, J. P. Espinos, T. R. Belderrain and A. R. Gonzalez-Elipe, "Ion beam induced chemical vapor deposition for the preparation of thin film oxides", Thin Solid Films, 241 (1994) 198;  H. V. Shurmer, J. W. Gardner und P. Corcoran, Sensors and Actuators B1, (1990) 256-260;  M. S. Nayak, R. Dwivedi und S. K. Srivastava in Sensors and Actuators B, 12 (1993) 103-110;  P. Althainz, A. Dahlke, M. Frietsch-Klarhof, J. Goschnick and H. J. Ache, "Organically modified SiO2- and Al2O3-Films as Selective Components for Gassensors", Physica Status Solidi, to be published;  P. Althainz, A. Dahlke, M. Frietsch-Klarhof, J. Goschnick und H. J. Ache, Physica Status Solidi (a) 145, 611 (1994);  X. Wang, S. Yee und P. Carey, Sensors and Actuators B, 13-14 (1993) 458-461;  Physica Status Solidi (a), Bd. 145 (1994) S.611ff;  Sensors and Actuators B, Bd. 12 (1993) S. 103-110;  Sensors and Actuators B, Bd. 13-14 (1993) S. 458-461;  Thin Solid Films, Bd. 241 (1994) S. 198 ffWO9601419-A1  SENSORS AND ACTUATORS, vol.12, pages 103 - 110 M. S. NAYAK ET AL. "Transformed cluster analysis: an approach to the identification of gasesodours using an integrated gas-sensor array.";  SENSORS AND ACTUATORS, vol.13-14, pages 458 - 461 XIADONG WANG ET AL. "An integrated array of multiple thin film metal oxide sensors for quatification of individual components in organic vapor mixtures";  SENSORS AND ACTUATORS, Bd.12, Seiten 103 - 110 M. S. NAYAK ET AL. 'Transformed cluster analysis: an approach to the identification of gases/odours using an integrated gas-sensor array.' in der Anmeldung erwaehnt;  SENSORS AND ACTUATORS, Bd.13-14, Seiten 458 - 461 XIADONG WANG ET AL. 'An integrated array of multiple thin film metal oxide sensors for quatification of individual components in organic vapor mixtures' in der Anmeldung erwaehntEP769141-A1  See references of WO 9601419A1;  See references of WOA 9601419US5783154-A  Althainz, et al., Gas sensor micro system for simultaneous defection of gases in the atmosphere. KFK-Nachr. (1994), 26(1) 42-51.;  M.S. Nayak, et al., "Transformed Cluster Analysis: An Approach to the Identification of Gases-Odor Using an Integrated Gas-Sensor Array", Sensors and Actuators, 1993, Bd. 12, pp. 103-110.