EP693677-A1  SENSORS AND ACTUATORS A, Bd. 42, Nr. 13, 15.April 1994 LAUSANNE CH, Seiten 493-496, XP 000449968 T. ELBEL E.A. 'THERMOELECTRIC RADIATION MICROSENSORS';  SENSORS AND ACTUATORS A, Bd. 42, Nr. 13, 15.April 1994 LAUSANNE CH, Seiten 666-671, XP 000449995 P.M. SARRO E.A. 'A SILICON-SILICON NITRIDE MEMBRANE FABRICATION PROCESS FOR SMART THERMAL SENSORS';  SENSORS AND ACTUATORS A, Bd. 42, Nr. 13, 15041994 LAUSANNE CH, Seiten 493-496, XP 000449968 T. ELBEL E.A. "THERMOELECTRIC RADIATION MICROSENSORS";  SENSORS AND ACTUATORS A, Bd. 42, Nr. 13, 15041994 LAUSANNE CH, Seiten 666-671, XP 000449995 P.M. SARRO E.A. "A SILICON-SILICON NITRIDE MEMBRANE FABRICATION PROCESS FOR SMART THERMAL SENSORS";  SENSORS AND ACTUATORS A, Bd. 43, Nr. 13, Mai 1994 LAUSANNE CH, Seiten 276-288, XP 000454123 J.J. JUIJSING E.A. 'DEVELOPMENTS IN INTEGRATED SMART SENSORS';  SENSORS AND ACTUATORS A, Bd. 43, Nr. 13, Mai 1994 LAUSANNE CH, Seiten 276-288, XP 000454123 J.J. JUIJSING E.A. "DEVELOPMENTS IN INTEGRATED SMART SENSORS";  SENSORS AND ACTUATORS A, Bd. 3738, Juni 1993 - August 1993 LAUSANNE CH, Seiten 77-81, XP 000411378 CARLOS AZEREDO LEME E.A. 'MULTI-PURPOSE INTERFACE FOR SENSOR SYSTEMS FABRICATED BY CMOS TECHNOLOGY WITH POST-PROCESSING';  SENSORS AND ACTUATORS A, Bd. 3738, Juni 1993 - August 1993 LAUSANNE CH, Seiten 77-81, XP 000411378 CARLOS AZEREDO LEME E.A. "MULTI-PURPOSE INTERFACE FOR SENSOR SYSTEMS FABRICATED BY CMOS TECHNOLOGY WITH POST-PROCESSING";  SENSORS AND ACTUATORS A, Bd. 37/38, Juni 1993 - August 1993 LAUSANNE CH, Seiten 77-81, XP 000411378 CARLOS AZEREDO LEME E.A. 'MULTI-PURPOSE INTERFACE FOR SENSOR SYSTEMS FABRICATED BY CMOS TECHNOLOGY WITH POST-PROCESSING';  SENSORS AND ACTUATORS A, Bd. 42, Nr. 1/3, 15.April 1994 LAUSANNE CH, Seiten 493-496, XP 000449968 T. ELBEL E.A. 'THERMOELECTRIC RADIATION MICROSENSORS';  SENSORS AND ACTUATORS A, Bd. 42, Nr. 1/3, 15.April 1994 LAUSANNE CH, Seiten 666-671, XP 000449995 P.M. SARRO E.A. 'A SILICON-SILICON NITRIDE MEMBRANE FABRICATION PROCESS FOR SMART THERMAL SENSORS';  SENSORS AND ACTUATORS A, Bd. 43, Nr. 1/3, Mai 1994 LAUSANNE CH, Seiten 276-288, XP 000454123 J.J. JUIJSING E.A. 'DEVELOPMENTS IN INTEGRATED SMART SENSORS'EP693677-B1  SENSORS AND ACTUATORS A, Bd. 3738, Juni 1993 - August 1993 LAUSANNE CH, Seiten 77-81, XP 000411378 CARLOS AZEREDO LEME E.A. 'MULTI-PURPOSE INTERFACE FOR SENSOR SYSTEMS FABRICATED BY CMOS TECHNOLOGY WITH POST-PROCESSING';  SENSORS AND ACTUATORS A, Bd. 42, Nr. 13, 15.April 1994 LAUSANNE CH, Seiten 493-496, XP 000449968 T. ELBEL E.A. 'THERMOELECTRIC RADIATION MICROSENSORS';  SENSORS AND ACTUATORS A, Bd. 42, Nr. 13, 15.April 1994 LAUSANNE CH, Seiten 666-671, XP 000449995 P.M. SARRO E.A. 'A SILICON-SILICON NITRIDE MEMBRANE FABRICATION PROCESS FOR SMART THERMAL SENSORS';  SENSORS AND ACTUATORS A, Bd. 43, Nr. 13, Mai 1994 LAUSANNE CH, Seiten 276-288, XP 000454123 J.J. JUIJSING E.A. 'DEVELOPMENTS IN INTEGRATED SMART SENSORS'