EP867702-A  GERWEN VAN P ET AL: "THIN-FILM BORON-DOPED POLYCRYSTALLINE SILICON 70%-GERMANIUM 30% FOR THERMOPILES" SENSORS AND ACTUATORS A, vol. A53, no. 1/03, May 1996, pages 325-328, XP000620316;  SEDKY S ET AL: "Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys" TRANDUCERS 97. 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS. DIGEST OF TECHNICAL PAPERS (CAT. NO.97TH8267), PROCEEDINGS OF INTERNATIONAL SOLID STATE SENSORS AND ACTUATORS CONFERENCE (TRANSDUCERS '97), CHICAGO, IL, USA, 16-19 JUN, pages 237-240 vol.1, XP002075222 ISBN 0-7803-3829-4, 1997, New York, NY, USA, IEEE, USA;  STEINER P ET AL: "MICROMACHINING APPLICATIONS OF POROUS SILICON" THIN SOLID FILMS, vol. 255, no. 1/02, 15 January 1995, pages 52-58, XP000607762;  SYUN-MING JANG ET AL: "THERMAL STABILITY OF SI/SI1-XGEX/SI HETEROSTRUCTURES DEPOSITED BY VERY LOW PRESSURE CHEMICAL VAPOR DEPOSITION" APPLIED PHYSICS LETTERS, vol. 61, no. 3, 20 July 1992, pages 315-317, XP000287677;  TSU-JAE KING ET AL: "DEPOSITION AND PROPERTIES OF LOW-PRESSURE CHEMICAL-VAPOR DEPOSITED POLYCRYSTALLINE SILICON-GERMANIUM FILMS" JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 141, no. 8, August 1994, pages 2235-2241, XP000471081;  UNEWISSE M H ET AL: "The growth and properties of semiconductor bolometers for infrared detection" GROWTH AND CHARACTERIZATION OF MATERIALS FOR INFRARED DETECTORS II, SAN DIEGO, CA, USA, 13-14 JULY 1995, vol. 2554, pages 43-54, XP002039425 ISSN 0277-786X, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 1995, SPIE-INT. SOC. OPT. ENG, USAEP867702-A2  STEINER P ET AL: &quot;MICROMACHINING APPLICATIONS OF POROUS SILICON&quot; THIN SOLID FILMS, vol. 255, no. 1/02, 15 January 1995, pages 52-58, XP000607762;  STEINER P ET AL: &quot;MICROMACHINING APPLICATIONS OF POROUS SILICON&quot; THIN SOLID FILMS, vol. 255, no. 102, 15 January 1995, pages 52-58, XP000607762;  GERWEN VAN P ET AL: &quot;THIN-FILM BORON-DOPED POLYCRYSTALLINE SILICON 70%-GERMANIUM 30% FOR THERMOPILES&quot; SENSORS AND ACTUATORS A, vol. A53, no. 1/03, May 1996, pages 325-328, XP000620316;  GERWEN VAN P ET AL: &quot;THIN-FILM BORON-DOPED POLYCRYSTALLINE SILICON 70%-GERMANIUM 30% FOR THERMOPILES&quot; SENSORS AND ACTUATORS A, vol. A53, no. 103, May 1996, pages 325-328, XP000620316;  UNEWISSE M H ET AL: &quot;The growth and properties of semiconductor bolometers for infrared detection&quot; GROWTH AND CHARACTERIZATION OF MATERIALS FOR INFRARED DETECTORS II, SAN DIEGO, CA, USA, 13-14 JULY 1995, vol. 2554, pages 43-54, XP002039425 ISSN 0277-786X, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 1995, SPIE-INT. SOC. OPT. ENG, USA;  SEDKY S ET AL: &quot;Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys&quot; TRANDUCERS 97. 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS. DIGEST OF TECHNICAL PAPERS (CAT. NO.97TH8267), PROCEEDINGS OF INTERNATIONAL SOLID STATE SENSORS AND ACTUATORS CONFERENCE (TRANSDUCERS &apos;97), CHICAGO, IL, USA, 16-19 JUN, pages 237-240 vol.1, XP002075222 ISBN 0-7803-3829-4, 1997, New York, NY, USA, IEEE, USA;  TSU-JAE KING ET AL: &quot;DEPOSITION AND PROPERTIES OF LOW-PRESSURE CHEMICAL-VAPOR DEPOSITED POLYCRYSTALLINE SILICON-GERMANIUM FILMS&quot; JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 141, no. 8, August 1994, pages 2235-2241, XP000471081;  SYUN-MING JANG ET AL: &quot;THERMAL STABILITY OF SI/SI1-XGEX/SI HETEROSTRUCTURES DEPOSITED BY VERY LOW PRESSURE CHEMICAL VAPOR DEPOSITION&quot; APPLIED PHYSICS LETTERS, vol. 61, no. 3, 20 July 1992, pages 315-317, XP000287677;  SYUN-MING JANG ET AL: &quot;THERMAL STABILITY OF SISI1-XGEXSI HETEROSTRUCTURES DEPOSITED BY VERY LOW PRESSURE CHEMICAL VAPOR DEPOSITION&quot; APPLIED PHYSICS LETTERS, vol. 61, no. 3, 20 July 1992, pages 315-317, XP000287677EP867702-B1  GERWEN VAN P ET AL: "THIN-FILM BORON-DOPED POLYCRYSTALLINE SILICON 70%-GERMANIUM 30% FOR THERMOPILES" SENSORS AND ACTUATORS A, vol. A53, no. 103, May 1996, pages 325-328, XP000620316;  SEDKY S ET AL: "Thermally insulated structures for IR bolometers, made of polycrystalline silicon germanium alloys" TRANDUCERS 97. 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS. DIGEST OF TECHNICAL PAPERS (CAT. NO.97TH8267), PROCEEDINGS OF INTERNATIONAL SOLID STATE SENSORS AND ACTUATORS CONFERENCE (TRANSDUCERS '97), CHICAGO, IL, USA, 16-19 JUN, pages 237-240 vol.1, XP002075222 ISBN 0-7803-3829-4, 1997, New York, NY, USA, IEEE, USA;  STEINER P ET AL: "MICROMACHINING APPLICATIONS OF POROUS SILICON" THIN SOLID FILMS, vol. 255, no. 102, 15 January 1995, pages 52-58, XP000607762;  SYUN-MING JANG ET AL: "THERMAL STABILITY OF SISI1-XGEXSI HETEROSTRUCTURES DEPOSITED BY VERY LOW PRESSURE CHEMICAL VAPOR DEPOSITION" APPLIED PHYSICS LETTERS, vol. 61, no. 3, 20 July 1992, pages 315-317, XP000287677;  TSU-JAE KING ET AL: "DEPOSITION AND PROPERTIES OF LOW-PRESSURE CHEMICAL-VAPOR DEPOSITED POLYCRYSTALLINE SILICON-GERMANIUM FILMS" JOURNAL OF THE ELECTROCHEMICAL SOCIETY, vol. 141, no. 8, August 1994, pages 2235-2241, XP000471081;  UNEWISSE M H ET AL: "The growth and properties of semiconductor bolometers for infrared detection" GROWTH AND CHARACTERIZATION OF MATERIALS FOR INFRARED DETECTORS II, SAN DIEGO, CA, USA, 13-14 JULY 1995, vol. 2554, pages 43-54, XP002039425 ISSN 0277-786X, PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING, 1995, SPIE-INT. SOC. OPT. ENG, USA