(EP978883-A1)   NOVELTY - In the production of a solar cell device, the surface of the insulating substrate (10) and the surface of a transparent oxide electrode (12) are cleaned with a halogen gas having a saturated vapor pressure higher than that of the etching gas used for forming the transparent oxide electrode (12). Thus transparency and light transmittance are improved.    USE - Solar cell production.    ADVANTAGE - Because of the cleaning step, the surfaces of the insulating substrate and the transparent oxide electrode are so clean that transparency is high and the desired light transmittance is achieved.    (JP11539154-X)   NOVELTY - In the production of a solar cell device, the surface of the insulating substrate (10) and the surface of a transparent oxide electrode (12) are cleaned with a halogen gas having a saturated vapor pressure higher than that of the etching gas used for forming the transparent oxide electrode (12). Thus transparency and light transmittance are improved.    USE - Solar cell production.    ADVANTAGE - Because of the cleaning step, the surfaces of the insulating substrate and the transparent oxide electrode are so clean that transparency is high and the desired light transmittance is achieved.    (CN1256010-A)   NOVELTY - In the production of a solar cell device, the surface of the insulating substrate (10) and the surface of a transparent oxide electrode (12) are cleaned with a halogen gas having a saturated vapor pressure higher than that of the etching gas used for forming the transparent oxide electrode (12). Thus transparency and light transmittance are improved.    USE - Solar cell production.    ADVANTAGE - Because of the cleaning step, the surfaces of the insulating substrate and the transparent oxide electrode are so clean that transparency is high and the desired light transmittance is achieved.    (US6207471-B1)   NOVELTY - In the production of a solar cell device, the surface of the insulating substrate (10) and the surface of a transparent oxide electrode (12) are cleaned with a halogen gas having a saturated vapor pressure higher than that of the etching gas used for forming the transparent oxide electrode (12). Thus transparency and light transmittance are improved.    USE - Solar cell production.    ADVANTAGE - Because of the cleaning step, the surfaces of the insulating substrate and the transparent oxide electrode are so clean that transparency is high and the desired light transmittance is achieved.