EP924282-A1 -- EP227839-A   SEMICONDUCTOR ENERGY LAB (SEME);  YAMAZAKI S (YAMA-Individual)   YAMAZAKI S,  URATA K,  TASHIRO M,  TANAMURA Y,  IMATO S;  EP343038-A   SPS-SOC PRESTATIONS (SPSP-Non-standard);  SOC PRESTATIONS SER (PRES-Non-standard)   DESSAUX O,  MUTEL B,  SZUMINSKI D;  EP348980-A   ;  JP07169756-A   ;  JP08291299-A   ;  JP57049234-A   ;  US3917688-A   ;  US5176790-A   APPLIED MATERIALS INC (MATE-Non-standard)   ARLEO P,  HENRI J,  HILLS G,  WONG J,  WU R;  JP3014368-B2 -- JP01317146-A   ;  US6673262-B1 -- JP08291299-A   ;  US3415865-A   ;  US5356478-A   LAM RES CORP (LRES)   CHEN C,  ARNETT D,  LIU D;  US5817578-A   NEC YAMAGATA LTD (NIDE)   OGAWA H;  US5824604-A   MATTSON TECHNOLOGY INC (MATT-Non-standard)   BAR-GADDA R;  EP343038-A   SPS-SOC PRESTATIONS (SPSP-Non-standard);  SOC PRESTATIONS SER (PRES-Non-standard)   DESSAUX O,  MUTEL B,  SZUMINSKI D;  EP348980-A   ;  EP227839-B   SEMICONDUCTOR ENERGY LAB (SEME);  YAMAZAKI S (YAMA-Individual)   YAMAZAKI S,  URATA K,  TASHIRO M,  TANAMURA Y,  IMATO S;  US3917688-A   ;  US5176790-A   APPLIED MATERIALS INC (MATE-Non-standard)   ARLEO P,  HENRI J,  HILLS G,  WONG J,  WU R;  JP3611729-B2 -- JP06085190-A   ;  JP06132259-A   ;  JP07169743-A   ;  JP08274072-A   ;  JP08291299-A   ;  JP09022881-A   ;  JP09074087-A   ;  JP10067554-A   ;  JP10317146-A   ;  JP11236561-A   CENTRAL GLASS CO LTD (CENG)   MORI I,  TAMURA T,  OHASHI M;  JP62238382-A   ;  EP924282-B1 -- EP227839-A   SEMICONDUCTOR ENERGY LAB (SEME);  YAMAZAKI S (YAMA-Individual)   YAMAZAKI S,  URATA K,  TASHIRO M,  TANAMURA Y,  IMATO S;  EP343038-A   SPS-SOC PRESTATIONS (SPSP-Non-standard);  SOC PRESTATIONS SER (PRES-Non-standard)   DESSAUX O,  MUTEL B,  SZUMINSKI D;  EP348980-A   ;  JP07169756-A   ;  JP08291299-A   ;  JP57049234-A   ;  US3917688-A   ;  US5176790-A   APPLIED MATERIALS INC (MATE-Non-standard)   ARLEO P,  HENRI J,  HILLS G,  WONG J,  WU R;  US7168436-B2 -- EP227839-A   SEMICONDUCTOR ENERGY LAB (SEME);  YAMAZAKI S (YAMA-Individual)   YAMAZAKI S,  URATA K,  TASHIRO M,  TANAMURA Y,  IMATO S;  EP343038-A   SPS-SOC PRESTATIONS (SPSP-Non-standard);  SOC PRESTATIONS SER (PRES-Non-standard)   DESSAUX O,  MUTEL B,  SZUMINSKI D;  EP348980-A   ;  JP07169756-A   ;  JP08291299-A   ;  JP57049234-A   ;  US3415865-A   ;  US3917688-A   ;  US4036864-A   ;  US4568478-A   ;  US5176790-A   APPLIED MATERIALS INC (MATE-Non-standard)   ARLEO P,  HENRI J,  HILLS G,  WONG J,  WU R;  US5356478-A   LAM RES CORP (LRES)   CHEN C,  ARNETT D,  LIU D;  US5817578-A   NEC YAMAGATA LTD (NIDE)   OGAWA H;  US5824604-A   MATTSON TECHNOLOGY INC (MATT-Non-standard)   BAR-GADDA R;  US7744769-B2 -- EP227839-A   SEMICONDUCTOR ENERGY LAB (SEME);  YAMAZAKI S (YAMA-Individual)   YAMAZAKI S,  URATA K,  TASHIRO M,  TANAMURA Y,  IMATO S;  EP343038-A   SPS-SOC PRESTATIONS (SPSP-Non-standard);  SOC PRESTATIONS SER (PRES-Non-standard)   DESSAUX O,  MUTEL B,  SZUMINSKI D;  EP348980-A   ;  JP08291299-A   ;  US3415865-A   ;  US3917688-A   ;  US4036864-A   ;  US4568478-A   ;  US5176790-A   APPLIED MATERIALS INC (MATE-Non-standard)   ARLEO P,  HENRI J,  HILLS G,  WONG J,  WU R;  US5318666-A   ;  US5356478-A   LAM RES CORP (LRES)   CHEN C,  ARNETT D,  LIU D;  US5468686-A   ;  US5817578-A   NEC YAMAGATA LTD (NIDE)   OGAWA H;  US5824604-A   MATTSON TECHNOLOGY INC (MATT-Non-standard)   BAR-GADDA R;  US6242359-B1   AIR LIQUIDE ELECTRONICS CHEM & SERVICES (AIRL)   MISRA A