EP949688-A1  MIDDYA A R ET AL: "FAST DEPOSITION OF POLYCRYSTALLINE SILICON FILMS BY HOT-WIRE CVD" AMORPHOUS SILICON TECHNOLOGY 1995, SAN FRANCISCO, APRIL 18 - 21, 1995, Nr. VOL. 377, 18.April 1995, HACK M ET AL (ED ), Seiten 119-124, XP000656328;  BAUER S ET AL: "A-Si:H solar cells using the hot-wire technique-how to exceed efficiencies of 10%" CONFERENCE RECORD OF THE TWENTY SIXTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1997 (CAT. NO.97CB36026), CONFERENCE RECORD OF THE TWENTY SIXTH IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE - 1997, ANAHEIM, CA, USA, 29 SEPT.-3 OCT. 1997, ISBN 0-7803-3767-0, 1997, NEW YORK, NY, USA, IEEE, USA, Seiten 719-722, XP002074369;  BAUER S ET AL: "P-I INTERFACE ENGINEERING AND I-LAYER CONTROL OF HOT-WIRE A-SI:H BASED P-I-N SOLAR CELLS USING IN-SITU ELLIPSOMETRY" SOLAR ENERGY MATERIALS AND SOLAR CELLS, Bd. 43, Nr. 4, 15.Oktober 1996, Seiten 413-424, XP000628309US6124545-A  A.R. Middya, et al Fast Deposition of Polycrystalline Silicon Films by Hot-Wire CVD, Amorphous Silicon Technology, San Francisco, Apr., 1995 (pp. 119-124).;  E. Molenbroek, et al "Mechanisms Influencing 'hot-wire' Deposition of Hydrogenated Amorphous Silicon", Journal of Applied Physics, Aug. 15, 1997 (pp. 1909-1917).;  H. Gnaser, "Improved Quantification in Secondary-ion Mass Spectrometry Detecting MC+ Molecular Ions", Journal Vac. Sci. Technol., Mar./Apr., 1994 (pp. 452-456).;  MV Systems Inc., "Hot Wire CVD System", 1997 (2 pages).;  R.R. Arya, et al, "Status, Progress and Challenges in High Performance, Stable Amorphous Silicon Alloy Based Triple Junction Modules", Presented at 23rd IEEE Photovoltaic Specialists Conference, 1993 (pp. 790-794).;  R.W. Collins, "Ellipsometric Study of a-SI:H Nucleation, Growth, and Interfaces", World Scientific, 1988 (pp. 1003-1044).;  S. Bauer, et al "A-SI:H Solar Cells Using the Hot-Wire Technique-How To Exceed Efficiencies of 10%", Presented at 26th IEEE Photovoltaic Specialists Conference, Sep. 29, 1997 (4 pages).;  S. Bauer, et al "An Approach Towards High Efficiency Hot-Wire CVD Based A-SI:H PIN Solar Cells", PVSEC, Jun. 30, 1997 (4 pages).;  S. Bauer, et al "p-i interface engineering and i-layer control of hot-wire a-Si:H based p-i-n solar cells using in-situ ellipsometry", Presented at 26th IEEE Photovoltaic Specialists Conference, Oct., 1997 (pp. 414-424).