WO9960611-A1 -- US5110249-A   INNOTECH GRP INC (INNT-Non-standard);  US5609689-A   TOKYO ELECTRON LTD (TKEL);  TEL VARIAN KK (TKEL);  TEL ENG KK (TKEL)   YAMAGUCHI H,  KATO S;  US6176668-B1 -- DE2114470-A   FLACHGLAS AG DELOG-DETAG (DETA);  EP359525-A   FUJITSU LTD (FUIT)   KIRISEKO T,  TANI H,  SOMA N,  SHIGEMI N,  TOYODA T;  EP756316-A1   HITACHI LTD (HITA)   SORAOKA M,  YOSHIOKA K,  KAWASAKI Y;  EP608633-A2   APPLIED MATERIALS INC (MATE-Non-standard)   LAW K S,  ROBERTSON R,  LOU P,  KOLLRACK M M,  LEE A,  MAYDAN D;  EP684630-A2   ;  JP03136345-A   ;  JP63141342-A   ;  US3973665-A   GCA CORP (GCAG-Non-standard)   GIAMMANCO R P;  US3976330-A   INT BUSINESS MACHINES CORP (IBMC)   BABINSKI J P,  BERTELSEN B I,  RAACKE K H,  SIRGO V H,  TOWNSEND C J;  US4047624-A   AIRCO INC (AIRR)   DORENBOS F W;  US4449885-A   VARIAN ASSOC INC (VARI)   HERTEL R J,  MACINTOSH E D;  US4492301-A   FANUC LTD (FUFA)   INABA H,  TORII N;  US4558984-A   VARIAN ASSOC INC (VARI)   GARRETT C B;  US4775281-A   TERADYNE INC (TRDN)   PRENTAKIS A E;  US4856641-A   DAINIPPON SCREEN SEIZO KK (DNIS)   MATSUMURA Y,  MATSUI H;  US4951601-A   APPLIED MATERIALS INC (MATE-Non-standard)   MAYDAN D,  SOMEKH S,  WANG D N K,  CHENG D,  TOSHIMA M,  HARARI I,  HOPPE P D;  US4985722-A   TOKYO ELECTRON LTD (TKEL);  TEL KYUSHU KK (TKEL)   TATEYAMA K,  AKIMOTO M,  USHIJIMA M,  AKUMOTO M,  HIRAKAWA O,  KIMURA Y;  US5001327-A   HITACHI LTD (HITA)   HIRASAWA S,  TORLI T,  WATANABE T,  KOMATSU T,  HONMA K,  SAKAI A,  TAKAGAKI T,  UCHINO T,  NAGATOMO H;  US5060354-A   ;  US5086729-A   ASAHI GLASS CO LTD (ASAG)   KATAGIRI Y;  US5110249-A   INNOTECH GRP INC (INNT-Non-standard);  US5187115-A   PLASMA PHYSICS CORP (PLAS-Non-standard)   COLEMAN J H;  US5215420-A   INTEVAC INC (ITVC)   LAWSON E C,  HUGHES J L;  US5227708-A   APPL MATERIALS INC (MATE-Non-standard)   LOWRANCE R B;  US5252807-A   CHIZINSKY G (CHIZ-Individual)   CHIZINSKY G;  US5259883-A   ;  US5288379-A   NICHIDEN ANELVA LTD (NICV)   TAKAHASHI N,  NAMIKI M;  US5330301-A   ;  US5355066-A   APPL MATERIALS INC (MATE-Non-standard)   LOWRANCE R B;  US5417537-A   MILLER K C (MILL-Individual)   MILLER K C;  US5447409-A   APPLIED MATERIALS INC (MATE-Non-standard)   GRUNES H;  US5469035-A   APPL MATERIALS INC (MATE-Non-standard)   LOWRANCE R B;  US5470784-A   PLASMA PHYSICS CORP (PLAS-Non-standard)   COLEMAN J H;  US5512320-A   APPLIED MATERIALS INC (MATE-Non-standard)   TURNER N L,  WHITE J M;  US5535306-A   APPLIED MATERIALS INC (MATE-Non-standard)   STEVENS C L;  US5536128-A   HITACHI LTD (HITA)   NAGATOMO H,  KIKUCHI H,  SHIMOYASHIRO S,  HAMADA T,  KAWAJI H,  IWASAKI T,  IKEDA M;  US5537311-A   APPLIED MATERIALS INC (MATE-Non-standard)   STEVENS C L;  US5607009-A   APPLIED MATERIALS INC (MATE-Non-standard)   BERKSTRESSER D,  TURNER N L,  WHITE J M;  US5609689-A   TOKYO ELECTRON LTD (TKEL);  TEL VARIAN KK (TKEL);  TEL ENG KK (TKEL)   YAMAGUCHI H,  KATO S;  US5658114-A   LEYBOLD AG (LEYB);  US5674786-A   APPLIED MATERIALS INC (MATE-Non-standard)   BERKSTRESSER D,  TURNER N L,  WHITE J M;  US5701627-A   DAINIPPON SCREEN SEIZO KK (DNIS)   MATSUMURA Y,  SHIMAJI K;  US5823736-A   DAINIPPON SCREEN SEIZO KK (DNIS)   MATSUMURA Y