(JP2000192244-A)   NOVELTY - A deposited film forming system has at least a vacuum vessel (108), means for feeding a film-forming material gas into the vacuum vessel, a discharge electrode (102) provided inside the vacuum vessel, and a power supply conductor (103) for applying a high-frequency power to the discharge electrode, the system also comprises an earth shield (105) surrounding the power supply conductor inside the vacuum vessel, and dielectric materials (104) at least part of which is disposed between the power supply conductor and the earth shield.    USE - System and process for forming deposited films, for forming semiconductor thin films for photovoltaic devices such as solar cells.    ADVANTAGE - The system makes applied-power loss less occur, keeps the power feeding course from its temperature rise, makes discharge readily take place even after use for a long time and also maintains uniform discharge for a long time. Deposited films having a high quality and superior uniformity can be formed over a large area on a beltlike substrate that moves continuously.    (CN1255554-A)   NOVELTY - A deposited film forming system has at least a vacuum vessel (108), means for feeding a film-forming material gas into the vacuum vessel, a discharge electrode (102) provided inside the vacuum vessel, and a power supply conductor (103) for applying a high-frequency power to the discharge electrode, the system also comprises an earth shield (105) surrounding the power supply conductor inside the vacuum vessel, and dielectric materials (104) at least part of which is disposed between the power supply conductor and the earth shield.    USE - System and process for forming deposited films, for forming semiconductor thin films for photovoltaic devices such as solar cells.    ADVANTAGE - The system makes applied-power loss less occur, keeps the power feeding course from its temperature rise, makes discharge readily take place even after use for a long time and also maintains uniform discharge for a long time. Deposited films having a high quality and superior uniformity can be formed over a large area on a beltlike substrate that moves continuously.