(US6176668-B1)   NOVELTY - A solar panel transfer shuttle (70) movable along a shuttle path, transfer the solar panel between load lock chamber and processing chamber. The shuttle has several panel supports to support during transfer of panel. The panel supports are arranged so as to pass through the slots in platen (120) along vertical direction.    USE - In modular assembly line system for sequential deposition of layers on solar panels.    ADVANTAGE - As unnecessary movement of substrate in semiconductor processing system is eliminated, the processing time is reduced. Eliminates more expensive and cumbersome vacuum robots and transfer chamber systems. Allows storage of shuttle beneath the platen during processing. When the shuttle is maintained in the processing chamber, the formation of assemblies of devices such as solar panels on large glass or metal substrates can be effectively performed.    (EP1086486-A1)   NOVELTY - A solar panel transfer shuttle (70) movable along a shuttle path, transfer the solar panel between load lock chamber and processing chamber. The shuttle has several panel supports to support during transfer of panel. The panel supports are arranged so as to pass through the slots in platen (120) along vertical direction.    USE - In modular assembly line system for sequential deposition of layers on solar panels.    ADVANTAGE - As unnecessary movement of substrate in semiconductor processing system is eliminated, the processing time is reduced. Eliminates more expensive and cumbersome vacuum robots and transfer chamber systems. Allows storage of shuttle beneath the platen during processing. When the shuttle is maintained in the processing chamber, the formation of assemblies of devices such as solar panels on large glass or metal substrates can be effectively performed.    (TW412781-A)   NOVELTY - A solar panel transfer shuttle (70) movable along a shuttle path, transfer the solar panel between load lock chamber and processing chamber. The shuttle has several panel supports to support during transfer of panel. The panel supports are arranged so as to pass through the slots in platen (120) along vertical direction.    USE - In modular assembly line system for sequential deposition of layers on solar panels.    ADVANTAGE - As unnecessary movement of substrate in semiconductor processing system is eliminated, the processing time is reduced. Eliminates more expensive and cumbersome vacuum robots and transfer chamber systems. Allows storage of shuttle beneath the platen during processing. When the shuttle is maintained in the processing chamber, the formation of assemblies of devices such as solar panels on large glass or metal substrates can be effectively performed.