DE19932880-A1  BHATTACHARYA,S.R., et.al.: Surface topography OF AR+.&+. BOMBARDED GAAS (100) AT VARIOUS TEMPERATURES. IN: J. VAC. SCI. TECHNOL. A5 (2), MAR/APR 1987, S.179-183;  CHINI,T.K., et.al.: Monocrystalline InP surface normally sputtered with Ar+.&+.: SEM and TEM observations. In: Nuclear Instruments and Methods in Physics Research B 95, 1995, S.313-S.318;  DEMANET,C.M., et.al.: Atomic Force Microscopy Investigation of Ion-bombarded InP: Effect of Angle of Ion Bombardment. In: Surface And Interface Analysis, Vol.24, 1996, S.503-510;  JP PATENT ABSTRACTS OF JAPAN: 0060002166 AA;  MAC LAREN,S.W., et.al.: Surface roughness development during sputtering of GaAs and InP: Evidence for the role of surface diffusion in ripple formation and sputter cone development. In: J. Vac. Sci. Technol. A 10 (3), May/Jun 1992, S.468-476;  MALHERBE,J.B., et.al.: Composition and Structure of Ion-bombardment-induced Growth Cones on InP. In: Surface And Interface Analysis, Vol.17, 1991, S.719-725;  OKUYAMA,F., FUJIMOTO,Y.: EVIDENCE FOR ATOMIC RECONDENSATION ON ION-BOMBARDED SOLID SURFACES. IN: SURFACE SCIENCE 210, 1989, S.L223 - L228;  SOPANEN,M., ET.AL.: FABRICATION OF GALNAS QUANTUM DISKS USING SELF-ORGANIZED INP ISLANDS AS A MASK IN WET CHEMICAL ETCHING. IN: APPL. PHYS. LETT. 69 (26), 23. DEC. 1996, S.4029-4031WO200017094-A1  OKUYAMA F ET AL: "Unusual texturing of Ar-sputtered InP surfaces associated with Ni-seeding" NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS,NL,NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, Bd. 101, Nr. 3, 1. Juli 1995 (1995-07-01), Seiten 306-310, XP004004209 ISSN: 0168-583X;  WADA: "Ar ion-beam etching characteristics and damage production in InP" JOURNAL OF PHYSICS D. APPLIED PHYSICS., Bd. 17, Nr. 12, Dezember 1984 (1984-12), Seiten 2429-2437, XP002130247 IOP PUBLISHING, BRISTOL., GB ISSN: 0022-3727;  WILLIAMS ET AL.: "Depth resolution degradation of sputter-profiled InP/InxGa1-xAsyP1-y interfaces caused by cone formation" APPLIED PHYSICS LETTERS, Bd. 36, Nr. 10, 15. Mai 1980 (1980-05-15), Seiten 827-829, XP000861762 NEW YORK US;  OKUYAMA F ET AL: "Unusual texturing of Ar-sputtered InP surfaces associated with Ni-seeding" NUCLEAR INSTRUMENTS&METHODS IN PHYSICS RESEARCH, SECTION - B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS,NL,NORTH-HOLLAND PUBLISHING COMPANY. AMSTERDAM, Bd. 101, Nr. 3, 1. Juli 1995 (1995-07-01), Seiten 306-310, XP004004209 ISSN: 0168-583X