WO200166815-A  MARAKHONOV V ET AL: "Electrical and optical properties of a-Si:H, a-SiGe:H and a-SiSn:H deposited by magnetron assisted silane decomposition" 14TH INTERNATIONAL CONFERENCE ON AMORPHOUS SEMICONDUCTORS - SCIENCE AND TECHNOLOGY. ICAS 14, GARMISCH-PARTENKIRCHEN, GERMANY, 19-23 AUG. 1991, Bd. 137-138, pt.2, Seiten 817-820, XP002174715 Journal of Non-Crystalline Solids, Dec. 1991, Netherlands ISSN: 0022-3093;  PATENT ABSTRACTS OF JAPAN vol. 012, no. 438 (C-544), 17. November 1988 (1988-11-17) & JP 63 162875 A (TDK CORP), 6. Juli 1988 (1988-07-06)EP1264000-A  See references of WO 0166815A1WO200166815-A1  MARAKHONOV V ET AL: &quot;Electrical and optical properties of a-Si:H, a-SiGe:H and a-SiSn:H deposited by magnetron assisted silane decomposition&quot; 14TH INTERNATIONAL CONFERENCE ON AMORPHOUS SEMICONDUCTORS - SCIENCE AND TECHNOLOGY. ICAS 14, GARMISCH-PARTENKIRCHEN, GERMANY, 19-23 AUG. 1991, Bd. 137-138, pt.2, Seiten 817-820, XP002174715 Journal of Non-Crystalline Solids, Dec. 1991, Netherlands ISSN: 0022-3093;  MARAKHONOV V ET AL: "Electrical and optical properties of a-Si:H, a-SiGe:H and a-SiSn:H deposited by magnetron assisted silane decomposition" 14TH INTERNATIONAL CONFERENCE ON AMORPHOUS SEMICONDUCTORS - SCIENCE AND TECHNOLOGY. ICAS 14, GARMISCH-PARTENKIRCHEN, GERMANY, 19-23 AUG. 1991, Bd. 137-138, pt.2, Seiten 817-820, XP002174715 Journal of Non-Crystalline Solids, Dec. 1991, Netherlands ISSN: 0022-3093;  PATENT ABSTRACTS OF JAPAN vol. 012, no. 438 (C-544), 17. November 1988 (1988-11-17) & JP 63 162875 A (TDK CORP), 6. Juli 1988 (1988-07-06);  PATENT ABSTRACTS OF JAPAN vol. 012, no. 438 (C-544), 17. November 1988 (1988-11-17) &amp; JP 63 162875 A (TDK CORP), 6. Juli 1988 (1988-07-06)EP1264000-B1  MARAKHONOV V ET AL: &quot;Electrical and optical properties of a-Si:H, a-SiGe:H and a-SiSn:H deposited by magnetron assisted silane decomposition&quot; 14TH INTERNATIONAL CONFERENCE ON AMORPHOUS SEMICONDUCTORS - SCIENCE AND TECHNOLOGY. ICAS 14, GARMISCH-PARTENKIRCHEN, GERMANY, 19-23 AUG. 1991, Bd. 137-138, pt.2, Seiten 817-820, XP002174715 Journal of Non-Crystalline Solids, Dec. 1991, Netherlands ISSN: 0022-3093;  PATENT ABSTRACTS OF JAPAN vol. 012, no. 438 (C-544), 17. November 1988 (1988-11-17) &amp; JP 63 162875 A (TDK CORP), 6. Juli 1988 (1988-07-06)