EP1176226-A1 -- EP926715-A2   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  EP926724-A2   ;  US5953627-A   INT BUSINESS MACHINES CORP (IBMC)   HARBISON M A,  HAWKER C J,  COOK R F,  KIM S,  LINIGER E G,  MILLER R D,  VOLKSEN W,  YOON D Y,  CARTER K R,  HEDRICK J L;  WO2000019498-A1   ;  WO2000019508-A1   ;  US6764958-B1 -- EP771886-A1   ;  EP1116054-A1   UNIV SYDNEY (UNSY)   MINASIAN R,  YOU N;  EP926715-A2   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  EP926724-A2   ;  JP10223758-A   SONY CORP (SONY)   YAMAGISHI N;  JP61257475-A   ;  US3960619-A   CONSORTIUM ELEKTROCHEM IND (CONE);  US4262631-A   KUBACKI R M (KUBA-Individual)   KUBACKI R M;  US4532150-A   SHINETSU CHEM IND CO LTD (SHIE);  US4634601-A   ;  US4759947-A   ;  US4822697-A   DOW CORNING CORP (DOWO);  US4885220-A   ;  US4894352-A   TEXAS INSTR INC (TEXI)   LANE A P,  WEBB D A,  FREDERICK G R;  US5082695-A   ;  US5103285-A   FUJITSU LTD (FUIT)   FURUNIURA Y,  MIENO F,  ESHITA T,  ITOH K,  DOKI M;  US5238866-A   ;  US5300951-A   TOSHIBA KK (TOKE)   YAMAZAKI M;  US5465680-A   DOW CORNING CORP (DOWO)   LOBODA M J;  US5591566-A   SONY CORP (SONY)   OGAWA T,  GOCHO T;  US5597566-A   ;  US5711987-A   DOW CORNING CORP (DOWO)   MICHAEL K W,  HALUSKA L A,  BEARINGER C R,  CAMILLETTI R C;  US5818071-A   DOW CORNING CORP (DOWO)   LOBODA M J,  MICHAEL K W;  US5926740-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   AHN K Y,  FORBES L;  US5953627-A   INT BUSINESS MACHINES CORP (IBMC)   HARBISON M A,  HAWKER C J,  COOK R F,  KIM S,  LINIGER E G,  MILLER R D,  VOLKSEN W,  YOON D Y,  CARTER K R,  HEDRICK J L;  US5989998-A   MATSUSHITA ELECTRIC IND CO LTD (MATU)   SUGAHARA G,  AOI N,  ARAI K,  SAWADA K;  US6046758-A   DIAMONEX INC (MONS)   BROWN D W,  BAYLOG M,  KIMOCK F M,  KNAPP B J,  PETRMICHL R H,  THEAR E G;  US6051321-A   QUESTER TECHNOLOGY INC (QUES-Non-standard)   LEE C J,  FOGGIATO G A,  WANG H;  US6054379-A   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  YAU W,  MANDAL R P,  JENG S,  LIU K,  LU Y,  BARNES M,  WILLECKE R B,  MOGHADAM F,  ISHIKAWA T,  POON T;  US6060132-A   SIEMENS AG (SIEI)   LEE G Y;  US6068884-A   SILICON VALLEY GROUP THERMAL SYSTEMS LLC (SILI-Non-standard)   ROSE P,  LOPATA E,  FELTS J;  US6140226-A   INT BUSINESS MACHINES CORP (IBMC)   JAHNES C V,  PATEL V V,  SAENGER K L,  GRILL A,  HUMMEL J P;  US6147009-A   GRILL A (GRIL-Individual);  JAHNES C V (JAHN-Individual);  PATEL V V (PATE-Individual);  PERRAUD L C (PERR-Individual)   GRILL A,  JAHNES C V,  PATEL V V,  PERRAUD L C;  US6159871-A   DOW CORNING CORP (DOWO)   LOBODA M J,  SEIFFERLY J A;  US6287990-B1   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  YAU W,  MANDAL R P,  JENG S,  LIU K,  LU Y,  BARNES M,  WILLECKE R B,  MOGHADAM F,  ISHIKAWA T,  POON T;  US6312793-B1   INT BUSINESS MACHINES CORP (IBMC)   GRILL A,  PATEL V V,  GATES S M;  US6316167-B1   INT BUSINESS MACHINES CORP (IBMC)   ANGELOPOULOS M,  BABICH K,  GRILL A,  HALLE S D,  MAHOROWALA A P,  PATEL V V;  US6340628-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   VAN CLEEMPUT P A,  LAXMAN R K,  SHU J,  SCHULBERG M T,  NIE B;  US6410437-B1   LAM RES CORP (LRES)   FLANNER J M,  MOREY I;  US6417092-B1   ;  US6436824-B1   CHARTERED SEMICONDUCTOR MFG LTD PTE (CSEM)   CHOOI S,  ZHOU M S,  XU Y;  US6444568-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   SUNDARARAJAN S,  TRIVEDI M;  WO2000019498-A1   ;  WO2000019508-A1   ;  US7001850-B2 -- EP771886-A1   ;  EP1116054-A1   UNIV SYDNEY (UNSY)   MINASIAN R,  YOU N;  EP926715-A2   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  EP926724-A2   ;  JP10223758-A   SONY CORP (SONY)   YAMAGISHI N;  JP61257475-A   ;  US3960619-A   CONSORTIUM ELEKTROCHEM IND (CONE);  US4262631-A   KUBACKI R M (KUBA-Individual)   KUBACKI R M;  US4532150-A   SHINETSU CHEM IND CO LTD (SHIE);  US4634601-A   ;  US4759947-A   ;  US4822697-A   DOW CORNING CORP (DOWO);  US4885220-A   ;  US4894352-A   TEXAS INSTR INC (TEXI)   LANE A P,  WEBB D A,  FREDERICK G R;  US5082695-A   ;  US5103285-A   FUJITSU LTD (FUIT)   FURUNIURA Y,  MIENO F,  ESHITA T,  ITOH K,  DOKI M;  US5238866-A   ;  US5300951-A   TOSHIBA KK (TOKE)   YAMAZAKI M;  US5465680-A   DOW CORNING CORP (DOWO)   LOBODA M J;  US5508067-A   APPLIED MATERIALS INC (MATE-Non-standard)   SATO T,  TABATA A;  US5591494-A   APPLIED MATERIALS INC (MATE-Non-standard)   SATO T,  TABATA A;  US5591566-A   SONY CORP (SONY)   OGAWA T,  GOCHO T;  US5597566-A   ;  US5711987-A   DOW CORNING CORP (DOWO)   MICHAEL K W,  HALUSKA L A,  BEARINGER C R,  CAMILLETTI R C;  US5818071-A   DOW CORNING CORP (DOWO)   LOBODA M J,  MICHAEL K W;  US5926740-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   AHN K Y,  FORBES L;  US5953627-A   INT BUSINESS MACHINES CORP (IBMC)   HARBISON M A,  HAWKER C J,  COOK R F,  KIM S,  LINIGER E G,  MILLER R D,  VOLKSEN W,  YOON D Y,  CARTER K R,  HEDRICK J L;  US5989998-A   MATSUSHITA ELECTRIC IND CO LTD (MATU)   SUGAHARA G,  AOI N,  ARAI K,  SAWADA K;  US5998100-A   IBM CORP (IBMC);  TOSHIBA KK (TOKE)   AZUMA T,  OIWA N,  MATSUDA T,  DAVID,  OKUMURA K;  US6041734-A   APPLIED MATERIALS INC (MATE-Non-standard)   RAOUX S,  MUDHOLKAR M;  US6046758-A   DIAMONEX INC (MONS)   BROWN D W,  BAYLOG M,  KIMOCK F M,  KNAPP B J,  PETRMICHL R H,  THEAR E G;  US6051321-A   QUESTER TECHNOLOGY INC (QUES-Non-standard)   LEE C J,  FOGGIATO G A,  WANG H;  US6054379-A   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  YAU W,  MANDAL R P,  JENG S,  LIU K,  LU Y,  BARNES M,  WILLECKE R B,  MOGHADAM F,  ISHIKAWA T,  POON T;  US6060132-A   SIEMENS AG (SIEI)   LEE G Y;  US6068884-A   SILICON VALLEY GROUP THERMAL SYSTEMS LLC (SILI-Non-standard)   ROSE P,  LOPATA E,  FELTS J;  US6140226-A   INT BUSINESS MACHINES CORP (IBMC)   JAHNES C V,  PATEL V V,  SAENGER K L,  GRILL A,  HUMMEL J P;  US6147009-A   GRILL A (GRIL-Individual);  JAHNES C V (JAHN-Individual);  PATEL V V (PATE-Individual);  PERRAUD L C (PERR-Individual)   GRILL A,  JAHNES C V,  PATEL V V,  PERRAUD L C;  US6159871-A   DOW CORNING CORP (DOWO)   LOBODA M J,  SEIFFERLY J A;  US20020164872-A1   ;  US20020182894-A1   ;  US20030020108-A1   ;  US20030045125-A1   ;  US6287990-B1   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  YAU W,  MANDAL R P,  JENG S,  LIU K,  LU Y,  BARNES M,  WILLECKE R B,  MOGHADAM F,  ISHIKAWA T,  POON T;  US6312793-B1   INT BUSINESS MACHINES CORP (IBMC)   GRILL A,  PATEL V V,  GATES S M;  US6316167-B1   INT BUSINESS MACHINES CORP (IBMC)   ANGELOPOULOS M,  BABICH K,  GRILL A,  HALLE S D,  MAHOROWALA A P,  PATEL V V;  US6340628-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   VAN CLEEMPUT P A,  LAXMAN R K,  SHU J,  SCHULBERG M T,  NIE B;  US6410437-B1   LAM RES CORP (LRES)   FLANNER J M,  MOREY I;  US6417092-B1   ;  US6436824-B1   CHARTERED SEMICONDUCTOR MFG LTD PTE (CSEM)   CHOOI S,  ZHOU M S,  XU Y;  US6444568-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   SUNDARARAJAN S,  TRIVEDI M;  US6462371-B1   MICRON TECHNOLOGY INC (MICR-Non-standard)   WEIMER R A,  MOORE J T;  US6465366-B1   APPLIED MATERIALS INC (MATE-Non-standard)   NEMANI S D,  XIA L,  YIEH E;  US6528423-B1   LSI LOGIC CORP (LSIL)   CATABAY W G,  HSIA W;  US6534397-B1   ADVANCED MICRO DEVICES INC (ADMI)   OKADA L A,  WANG F,  GABRIEL C T;  US6555476-B1   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  US6627532-B1   APPLIED MATERIALS INC (MATE-Non-standard)   GAILLARD F,  LIM T,  YIEH E,  LU Y,  YAU W,  LIU K,  JENG S,  XIA L;  US6764958-B1   APPLIED MATERIALS INC (MATE-Non-standard)   NEMANI S D,  XIA L,  SUGIARTO D,  YIEH E,  XU P,  CAMPANA-SCHMITT F,  LEE J;  US6364954-B2   APPLIED MATERIALS INC (MATE-Non-standard)   UMOTOY S P,  CHIAO S H,  NGUYEN A N,  VO B V,  HUSTON J,  CHEN J J,  LEI L C;  US6537733-B2   APPLIED MATERIALS INC (MATE-Non-standard)   CAMPANA F,  NEMANI S,  CHAPIN M,  VENKATARAMAN S;  US6593653-B2   SUNDARARAJAN S (SUND-Individual);  TRIVEDI M (TRIV-Individual)   SUNDARARAJAN S,  TRIVEDI M;  US6630412-B2   ;  US6645883-B2   ;  US6794311-B2   HUANG K (HUAN-Individual);  HUANG J H (HUAN-Individual);  XU P (XUPP-Individual)   HUANG K,  HUANG J H,  XU P;  WO2000019498-A1   ;  WO2000019508-A1   ;  US7117064-B2 -- EP771886-A1   ;  EP1116054-A1   UNIV SYDNEY (UNSY)   MINASIAN R,  YOU N;  EP926715-A2   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  EP926724-A2   ;  JP10223758-A   SONY CORP (SONY)   YAMAGISHI N;  JP61257475-A   ;  US3960619-A   CONSORTIUM ELEKTROCHEM IND (CONE);  US4262631-A   KUBACKI R M (KUBA-Individual)   KUBACKI R M;  US4532150-A   SHINETSU CHEM IND CO LTD (SHIE);  US4634601-A   ;  US4759947-A   ;  US4822697-A   DOW CORNING CORP (DOWO);  US4885220-A   ;  US4894352-A   TEXAS INSTR INC (TEXI)   LANE A P,  WEBB D A,  FREDERICK G R;  US5082695-A   ;  US5103285-A   FUJITSU LTD (FUIT)   FURUNIURA Y,  MIENO F,  ESHITA T,  ITOH K,  DOKI M;  US5238866-A   ;  US5300951-A   TOSHIBA KK (TOKE)   YAMAZAKI M;  US5465680-A   DOW CORNING CORP (DOWO)   LOBODA M J;  US5508067-A   APPLIED MATERIALS INC (MATE-Non-standard)   SATO T,  TABATA A;  US5591494-A   APPLIED MATERIALS INC (MATE-Non-standard)   SATO T,  TABATA A;  US5591566-A   SONY CORP (SONY)   OGAWA T,  GOCHO T;  US5597566-A   ;  US5711987-A   DOW CORNING CORP (DOWO)   MICHAEL K W,  HALUSKA L A,  BEARINGER C R,  CAMILLETTI R C;  US5818071-A   DOW CORNING CORP (DOWO)   LOBODA M J,  MICHAEL K W;  US5926740-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   AHN K Y,  FORBES L;  US5953627-A   INT BUSINESS MACHINES CORP (IBMC)   HARBISON M A,  HAWKER C J,  COOK R F,  KIM S,  LINIGER E G,  MILLER R D,  VOLKSEN W,  YOON D Y,  CARTER K R,  HEDRICK J L;  US5989998-A   MATSUSHITA ELECTRIC IND CO LTD (MATU)   SUGAHARA G,  AOI N,  ARAI K,  SAWADA K;  US5998100-A   IBM CORP (IBMC);  TOSHIBA KK (TOKE)   AZUMA T,  OIWA N,  MATSUDA T,  DAVID,  OKUMURA K;  US6041734-A   APPLIED MATERIALS INC (MATE-Non-standard)   RAOUX S,  MUDHOLKAR M;  US6046758-A   DIAMONEX INC (MONS)   BROWN D W,  BAYLOG M,  KIMOCK F M,  KNAPP B J,  PETRMICHL R H,  THEAR E G;  US6051321-A   QUESTER TECHNOLOGY INC (QUES-Non-standard)   LEE C J,  FOGGIATO G A,  WANG H;  US6054379-A   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  YAU W,  MANDAL R P,  JENG S,  LIU K,  LU Y,  BARNES M,  WILLECKE R B,  MOGHADAM F,  ISHIKAWA T,  POON T;  US6060132-A   SIEMENS AG (SIEI)   LEE G Y;  US6068884-A   SILICON VALLEY GROUP THERMAL SYSTEMS LLC (SILI-Non-standard)   ROSE P,  LOPATA E,  FELTS J;  US6140226-A   INT BUSINESS MACHINES CORP (IBMC)   JAHNES C V,  PATEL V V,  SAENGER K L,  GRILL A,  HUMMEL J P;  US6147009-A   GRILL A (GRIL-Individual);  JAHNES C V (JAHN-Individual);  PATEL V V (PATE-Individual);  PERRAUD L C (PERR-Individual)   GRILL A,  JAHNES C V,  PATEL V V,  PERRAUD L C;  US6159871-A   DOW CORNING CORP (DOWO)   LOBODA M J,  SEIFFERLY J A;  US20020164872-A1   ;  US20020182894-A1   ;  US20030020108-A1   ;  US20030045125-A1   ;  US6287990-B1   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  YAU W,  MANDAL R P,  JENG S,  LIU K,  LU Y,  BARNES M,  WILLECKE R B,  MOGHADAM F,  ISHIKAWA T,  POON T;  US6312793-B1   INT BUSINESS MACHINES CORP (IBMC)   GRILL A,  PATEL V V,  GATES S M;  US6316167-B1   INT BUSINESS MACHINES CORP (IBMC)   ANGELOPOULOS M,  BABICH K,  GRILL A,  HALLE S D,  MAHOROWALA A P,  PATEL V V;  US6340628-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   VAN CLEEMPUT P A,  LAXMAN R K,  SHU J,  SCHULBERG M T,  NIE B;  US6410437-B1   LAM RES CORP (LRES)   FLANNER J M,  MOREY I;  US6417092-B1   ;  US6436824-B1   CHARTERED SEMICONDUCTOR MFG LTD PTE (CSEM)   CHOOI S,  ZHOU M S,  XU Y;  US6444568-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   SUNDARARAJAN S,  TRIVEDI M;  US6462371-B1   MICRON TECHNOLOGY INC (MICR-Non-standard)   WEIMER R A,  MOORE J T;  US6465366-B1   APPLIED MATERIALS INC (MATE-Non-standard)   NEMANI S D,  XIA L,  YIEH E;  US6528423-B1   LSI LOGIC CORP (LSIL)   CATABAY W G,  HSIA W;  US6534397-B1   ADVANCED MICRO DEVICES INC (ADMI)   OKADA L A,  WANG F,  GABRIEL C T;  US6555476-B1   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  US6627532-B1   APPLIED MATERIALS INC (MATE-Non-standard)   GAILLARD F,  LIM T,  YIEH E,  LU Y,  YAU W,  LIU K,  JENG S,  XIA L;  US6764958-B1   APPLIED MATERIALS INC (MATE-Non-standard)   NEMANI S D,  XIA L,  SUGIARTO D,  YIEH E,  XU P,  CAMPANA-SCHMITT F,  LEE J;  US6364954-B2   APPLIED MATERIALS INC (MATE-Non-standard)   UMOTOY S P,  CHIAO S H,  NGUYEN A N,  VO B V,  HUSTON J,  CHEN J J,  LEI L C;  US6537733-B2   APPLIED MATERIALS INC (MATE-Non-standard)   CAMPANA F,  NEMANI S,  CHAPIN M,  VENKATARAMAN S;  US6593653-B2   SUNDARARAJAN S (SUND-Individual);  TRIVEDI M (TRIV-Individual)   SUNDARARAJAN S,  TRIVEDI M;  US6630412-B2   ;  US6645883-B2   ;  US6794311-B2   HUANG K (HUAN-Individual);  HUANG J H (HUAN-Individual);  XU P (XUPP-Individual)   HUANG K,  HUANG J H,  XU P;  US6849562-B2   ;  WO2000019498-A1   ;  WO2000019508-A1   ;  KR801369-B1 -- WO2000019508-A1   ;  EP1176226-B1 -- EP926715-A2   TEXAS INSTR INC (TEXI)   OLSEN L C,  SWANSON L S,  EDWARDS H L;  EP926724-A2   ;  US5953627-A   INT BUSINESS MACHINES CORP (IBMC)   HARBISON M A,  HAWKER C J,  COOK R F,  KIM S,  LINIGER E G,  MILLER R D,  VOLKSEN W,  YOON D Y,  CARTER K R,  HEDRICK J L;  WO2000019498-A1   ;  WO2000019508-A1