TECHNOLOGY FOCUS - ELECTRONICS - Preferred Condition: Both ends of the opening of the discharge container are set so as to have a curve satisfying a mathematical expression of x = F1(y) and a curve satisfying a mathematical expression of x = F2(y), respectively, to adjust the opening of the discharge container, limiting a deposition region of the belt-like structure.A distance of a discharge space in a conveying direction is represented by xn; a distance of the discharge space in a direction perpendicular to the conveying direction is represented by yn; a deposition rate at an optional point (xn, yn) in the discharge space is represented by d(xn, yn), a deposited film thickness at y = yn; xPn at most Xn at most xQn in the discharge space is represented by delta(x, yn); and n = 3, 4, 5, 6,....When a substrate conveying rate is represented by v and an ideal thickness of the deposited film is represented by a mathematical equation of dn(x, yn) = dn(vt, yn) = ant2 + bnt + cn (therefore x = vt),where delta(vt, yn) is the integral of dn as a function of vt and yn, with respect to t, from Pn to Qn = delta (formula 1), and, a point An (v-Pn, yn) and a point Bn (v-Qn, yn) which satisfy the formula (1) are obtained, and a quadratic curve passing the point An is represented by the mathematical expression of x = F1(y), and a quadratic curve passing the point B is represented by the mathematical expression of x = F2(y), and on the basis of the mathematical expressions x = F1(y) and x = F2(y), mathematical expressionsx = 1.1F1(y) - 0.1F2(y) to 0.9F1(y) + 0.1F2(y);andx = 0.9F2(y) + 0.1F1(y) to 1.1F2(y) - 0.1F1(y),respectively, are formulated for inequality.The shape of the opening adjusting plate is set to be within +/-10% of an opening shape determined from a deposition rate distribution in a width direction of the belt-like substrate.Preferred Method: The deposited film is formed by microwave plasma chemical vapor deposition. The belt-like substrate is continuously moved from a roll-like wound substrate through discharge containers by a roll-to-roll system.