US6329296-B1  J. I. Gittleman, E. K. Sichel, H. W. Lehmann and R. Widmer, Textured silicon: A selective absorber for solar themal conversion, 1979 American Institute of Physics, Appl. Phys. Lett. 35(10), Nov. 15, 1979, accepted for publication Sep. 4, 1979, pp. 742-744.;  Saleem H. Zaidi, James M. Gee, Douglas S. Ruby, and S. R. J. Brueck, Characterization of Si Nanostructured Surfaces, SPIE, Jul. 1999.WO200213279-A2  CRAIGHEAD H G ET AL: "TEXTURED THIN-FILM SI SOLAR SELECTIVE ABSORBERS USING REACTIVE ION ETCHING" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 37, no. 7, October 1980 (1980-10), pages 653-655, XP000816486 ISSN: 0003-6951;  D.S. RUBY, S.H. ZAIDI, S. NARAYANAN: "Plasma-texturization for multicrystalline silicon solar cells" CONFERENCE RECORD OF THE TWENTY-EIGHT IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE-2000, 15 - 22 September 2000, pages 75-78, XP002221694 Anchorage (US);  ZAIDI S H ET AL: "CHARACTERIZATION OF RANDOM REACTIVE ION ETCHED-TEXTURED SILICON SOLAR CELLS" IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE INC. NEW YORK, US, vol. 48, no. 6, June 2001 (2001-06), pages 1200-1206, XP001082180 ISSN: 0018-9383;  See also references of EP 1316115A2EP1316115-B1  CRAIGHEAD H G ET AL: "TEXTURED THIN-FILM SI SOLAR SELECTIVE ABSORBERS USING REACTIVE ION ETCHING" APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS. NEW YORK, US, vol. 37, no. 7, October 1980 (1980-10), pages 653-655, XP000816486 ISSN: 0003-6951;  D.S. RUBY, S.H. ZAIDI, S. NARAYANAN: "Plasma-texturization for multicrystalline silicon solar cells" CONFERENCE RECORD OF THE TWENTY-EIGHT IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE-2000, 15 - 22 September 2000, pages 75-78, XP002221694 Anchorage (US);  H. JANSEN ET AL.: "RIE lag in high aspect ratio trench etching of silicon" MICROELECTRONIC ENGINEERING, vol. 35, February 1997 (1997-02), pages 45-50, Amsterdam, NL;  ZAIDI S H ET AL: "CHARACTERIZATION OF RANDOM REACTIVE ION ETCHED-TEXTURED SILICON SOLAR CELLS" IEEE TRANSACTIONS ON ELECTRON DEVICES, IEEE INC. NEW YORK, US, vol. 48, no. 6, June 2001 (2001-06), pages 1200-1206, XP001082180 ISSN: 0018-9383