EP1204149-A2  SZCZYRBOWSKI, J., BR UER, G., RUSKE, M. , BARTELLA, J. , SCHROEDER, J., ZMELTY, A.: &quot;Some properties of TiO2 layers prepared by medium frequency reactive sputtering&quot; SURFACE AND COATINGS TECHNOLOGY, Bd. 112, Nr. 1-3, Februar 1999 (1999-02), Seiten 261-266, XP008038014 ELSEVIER, SWITZERLAND;  SZCZYRBOWSKI, J., BRAeUER, G., RUSKE, M. , BARTELLA, J. , SCHROEDER, J., ZMELTY, A.: "Some properties of TiO2 layers prepared by medium frequency reactive sputtering" SURFACE AND COATINGS TECHNOLOGY, Bd. 112, Nr. 1-3, Februar 1999 (1999-02), Seiten 261-266, XP008038014 ELSEVIER, SWITZERLAND;  SZCZYRBOWSKI, J., BRUER, G., RUSKE, M. , BARTELLA, J. , SCHROEDER, J., ZMELTY, A.: &quot;Some properties of TiO2 layers prepared by medium frequency reactive sputtering&quot; SURFACE AND COATINGS TECHNOLOGY, Bd. 112, Nr. 1-3, Februar 1999 (1999-02), Seiten 261-266, XP008038014 ELSEVIER, SWITZERLAND;  YANG T L ET AL: &quot;Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering&quot; THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 326, Nr. 1-2, 4. August 1998 (1998-08-04), Seiten 60-62, XP004141461 ISSN: 0040-6090;  YANG T L ET AL: "Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 326, Nr. 1-2, 4. August 1998 (1998-08-04), Seiten 60-62, XP004141461 ISSN: 0040-6090;  ELLMER K ET AL: &quot;INFLUENCE OF DISCHARGE PARAMETERS ON THE LAYER PROPERTIES OF REACTIVE MAGNETRON SPUTTERED ZNO:AL FILMS&quot; THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 247, Nr. 1, 1. Juli 1994 (1994-07-01), Seiten 15-23, XP000454896 ISSN: 0040-6090;  ELLMER K ET AL: "INFLUENCE OF DISCHARGE PARAMETERS ON THE LAYER PROPERTIES OF REACTIVE MAGNETRON SPUTTERED ZNO:AL FILMS" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 247, Nr. 1, 1. Juli 1994 (1994-07-01), Seiten 15-23, XP000454896 ISSN: 0040-6090;  LIPPENS, P., VERHEYEN, P.: "Electrochromic Half-Cells on Organic Substrate Produced by Subsequent Deposition of ITO and WO3 in a Roll Coater Using Optical Plasma Emision Monitoring" PROC. 37TH ANN. TECH. CONF. SOC. VACUUM COATERS, Mai 1994 (1994-05), Seiten 254-260, XP008038063 BOSTON, USA;  LIPPENS, P., VERHEYEN, P.: &quot;Electrochromic Half-Cells on Organic Substrate Produced by Subsequent Deposition of ITO and WO3 in a Roll Coater Using Optical Plasma Emision Monitoring&quot; PROC. 37TH ANN. TECH. CONF. SOC. VACUUM COATERS, Mai 1994 (1994-05), Seiten 254-260, XP008038063 BOSTON, USA;  SZYSZKA B: &quot;Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering&quot; THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 351, Nr. 1-2, 30. August 1999 (1999-08-30), Seiten 164-169, XP004183086 ISSN: 0040-6090;  SZYSZKA B: "Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 351, Nr. 1-2, 30. August 1999 (1999-08-30), Seiten 164-169, XP004183086 ISSN: 0040-6090EP1204149-B1  ELLMER K ET AL: "INFLUENCE OF DISCHARGE PARAMETERS ON THE LAYER PROPERTIES OF REACTIVE MAGNETRON SPUTTERED ZNO:AL FILMS" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 247, Nr. 1, 1. Juli 1994 (1994-07-01), Seiten 15-23, XP000454896 ISSN: 0040-6090;  LIPPENS, P., VERHEYEN, P.: "Electrochromic Half-Cells on Organic Substrate Produced by Subsequent Deposition of ITO and WO3 in a Roll Coater Using Optical Plasma Emision Monitoring" PROC. 37TH ANN. TECH. CONF. SOC. VACUUM COATERS, Mai 1994 (1994-05), Seiten 254-260, XP008038063 BOSTON, USA;  SZCZYRBOWSKI, J., BRAeUER, G., RUSKE, M. , BARTELLA, J. , SCHROEDER, J., ZMELTY, A.: "Some properties of TiO2 layers prepared by medium frequency reactive sputtering" SURFACE AND COATINGS TECHNOLOGY, Bd. 112, Nr. 1-3, Februar 1999 (1999-02), Seiten 261-266, XP008038014 ELSEVIER, SWITZERLAND;  SZYSZKA B: "Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 351, Nr. 1-2, 30. August 1999 (1999-08-30), Seiten 164-169, XP004183086 ISSN: 0040-6090;  YANG T L ET AL: "Transparent conducting ZnO:Al films deposited on organic substrates deposited by r.f. magnetron-sputtering" THIN SOLID FILMS, ELSEVIER-SEQUOIA S.A. LAUSANNE, CH, Bd. 326, Nr. 1-2, 4. August 1998 (1998-08-04), Seiten 60-62, XP004141461 ISSN: 0040-6090