TECHNOLOGY FOCUS - ELECTRICAL POWER AND ENERGY - Preferred Component: The fuel cell also includes:(a) a fuel cell source (86) disposed relative to apertures of channels on the lower surface of the dielectric material;(b) moisture cap (88);(c) catalyst disposed on solid electrolyte; and(d) a micro-switching device for interconnecting the electrodes; and(e) cooling mechanism fro reducing the fuel cell temperature.The porous film is etch-processed and comprised of solid electrolyte. It comprises silicon-based thin film membrane (84), preferably low stress, pre-tensioned members. The conductive layer comprises catalyst(s) to comprise a porous catalyst. The electrode has anode and cathode array (82). The dielectric material comprises a dielectric barrier. The lower surface of the substrate material comprises an ohmic contact coating.Preferred Method: The solid electrolyte is disposed on the substrate by spin coating, lamination, or spraying. The silicon-based thin film is formed through low pressure chemical vapor deposition. It is provided with pores formed by reactive ion etching, and a mask for anodization etching process. The conductive layer and the catalyst are disposed by chemical vapor deposition, physical deposition, evaporation, or ink deposition. The channels are formed by joining at least two micromachined wafers. The fuel cell is formed using semiconductor manufacturing.Preferred Condition: The fuel cell has an operating temperature of approximately 100-1000 degrees C.Preferred Property: The silicon-based thin film membrane has a thickness of approximately 0.1-20, more preferably approximately 1 micrometer. It comprises a patterned and etched geometric array comprising an approximately 1 micrometer diameter, and an approximately 2 micrometer pitch. The surface area of the anode is approximately 2-10, preferably approximately 4 times less than that of the cathode. The anode has a width of approximately 40 micrometer, and a length of 1 cm. The cathode has a width of approximately 160 micrometer and a length of approximately 1 cm. The anode and cathode are arranged in parallel and/or series, or serpentine or spiral patterns. The dielectric barrier is approximately 10-50, preferably 25 micrometer wide. The pore have diameter of approximately 5-1000 nm. The fuel cell has surface geometries consisting of planes, curved surfaces, flexible surfaces, or cylinders. The apertures of the cylinders have geometric figures of triangles, rectangles, circles, polygons, or ellipse.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Component: The fuel source includes a member consisting of hydrogen gas, alcohols, oxygen, or other compounds containing redox pairs. The oxygen source is air. The solid electrolyte may comprise an oxide conductive electrolyte, preferably zirconia-based electrolyte.    TECHNOLOGY FOCUS - METALLURGY - Preferred Material: The catalyst comprises refractory material consisting of platinum, ruthenium, or platinum-ruthenium alloy. It may comprise a catalyst for high temperature operation comprising alloys of noble metals, non-noble metals, metal oxides, or oxide compositions.The noble metal includes platinum, gold, silver, palladium, or silver/palladium alloys.The non-noble metal includes nickel, cobalt, copper, or iron. The metal oxides include praseodymium oxide, cerium oxide, or indium oxide. The oxide compounds include manganites or cobaltites. The dielectric substrate comprises silicon nitride. The coating comprises aluminum, gold, silver, other metals, or metal alloys. The thin film comprises a member consisting of silicon nitride or silicon carbide. The porous film comprises conductive layer consisting of gold, aluminum, platinum, other metals, metal alloys, or conductive organic materials.    TECHNOLOGY FOCUS - POLYMERS - Preferred Component: The solid electrolyte is proton exchange polymer, preferably Nafion (RTM; porous plastic material).