TECHNOLOGY FOCUS - MECHANICAL ENGINEERING - Preferred Property: The carbon sorbent materials has a Sorbent Working Capacity of at least 260 g AsH3/L of bed of the sorbent material, measured for gaseous AsH3 at 20 degrees C and 650-20 Torr; Sorbent Working Capacity of at least 50 g AsH3/L of bed of the sorbent material, measured for gaseous BF3 at 20 degrees C and 650-20 Torr; Sorbent Working Capacity of at least 350 g GeF4/L of bed of the sorbent material, measured for gaseous GeF4 at 20 degrees C and 650-20 Torr; Sorbent Working Capacity of at least 150 g AsF5/L of bed of the sorbent material, measured for gaseous AsF5 at 20 degrees C and 650-20 Torr; or Sorbent Working Capacity of at least 70 g 3MS/L of bed of the sorbent material, measured for 3MS at 20 degrees C and 650-20 Torr.It is characterized by an isotherm curve measured for germanium tetrafluoride at 21 degrees C or for trimethyl silane at 20 degrees C. It has a sorption waste rate of at most 20% or at most 12%, measured for AsH3 at 20 degrees C and 650-20 Torr; a sorption rate of at most 38%, measured for BF3 at 20 degrees C and 650-20 Torr; a sorption rate of at most 40 or at most 30%, measured for GeF4 at 20 degrees C and 650-20 Torr; a sorption rate of at most 75 or at most 70%, measured for AsF5 at 20 degrees C and 650-20 Torr; or a sorption rate of at most 60% or at most 45%, measured for 3MS at 11 degrees C and 650-20 Torr.It has an apparent density of less than 0.5 g/cc, an ash content of 0%, or a moisture content of at most 0.04% or 0%.Preferred Component: The carbon sorbent material is in a form of beads (preferably), granules, pellets, tablets, powders, particulates, extrudates, cloth or web form materials, honeycomb matrix monolith, composites of the sorbent with other components, comminuted forms of the foregoing, or crushed forms of the foregoing. It has been treated by application of a sorption-enhancing material to lower the Heel and to increase the Sorbent Working capacity. It has also been fluorinated.