NOVELTY - Providing harm-removing apparatus capable of decomposing PFC components at a high removal ratio at a temperature as low as possible with thermal energy consumed at an amount as small as possible.    USE - For removing harmful components of a perfluorocarbon gas or a perfluorocompound in exhaust gas derived during manufacture of electronic circuit element such as semiconductor device or liquid crystal device, particularly during cleaning or etching process and during smelting aluminum process.    ADVANTAGE - The harmful components of perfluorocarbon gas or perfluorocompound in processed gas are removed with improved removal ratio. The flammable components, such as excess of hydrocarbon gas and soot are removed favorably. The harm-removing apparatus decomposes and removes perfluorocarbon components at improved removal ratio and at reduced temperature, with reduced consumption of heat energy and cost effectively.    DETAILED DESCRIPTION - A hydrocarbon gas and/or ammonia gas is mixed with an exhaust gas containing a perfluorocarbon or a perfluorocompound discharged from a manufacturing equipment. The resulting mixed gas is thermally decomposed in a non-oxidizing atmosphere, to remove harmful components of a perfluorocarbon gas or a perfluorocompound.    An INDEPENDENT CLAIM is included for apparatus for removing harmful components of a perfluorocarbon gas or a perfluorocompound. The apparatus comprises a gas decomposer-burner tower (11), a heater (16) disposed in a gas decomposer room (12) and burner room (14), a pipe (17) for supplying a reducing atmosphere forming agent to the gas decomposer room, an air-feeding pipe (18) for supplying air to the burner room, and a water scrubber (1) disposed downstream of the gas decomposer-burner tower. The gas decomposer-burner tower comprises a gas decomposer room for mixing and thermally decomposing a mixed gas, and a burner room for burning flammable components of the mixed gas thermally decomposed in the gas decomposer room. The gas decomposer room and the burner room are formed integrally with each other and situated across an intervening heat-resistant partition wall (13) having an opening (11b) at an upper end portion for providing communication between the gas decomposer room and the burner room.    DESCRIPTION OF DRAWING(S) - The figure shows a front elevational view of a harm-removing apparatus.    Water scrubber (1)    Gas decomposer-burner tower (11)    Opening (11b)    Gas decomposer room (12)    Heat-resistant partition wall (13)    Burner room (14)    Heater (16)    Pipe (17)    Air-feeding pipe (18)