TECHNOLOGY FOCUS - MECHANICAL ENGINEERING - Preferred Components: At least a substrate in which the flow path is formed is a silicon substrate. A box covers all the outermost surfaces of the substrates including the heat radiation-preventing film. A space is formed in at least a portion between an inner surface of the box and the outermost surfaces of the substrates including the heat radiation-preventing film. At least one part of the inner surface of the box is covered with a radiation-preventing film. At least one part of an outer surface of the box is covered with a radiation-preventing film. The space is in a vacuum state or a gas having thermal conductivity lower than that of components of the box is sealed in the space. A pressure in the space is at most100 Pa. The heater comprises a thin film heater and the flow path has a zig-zag shape. The heater has a zig-zag shape corresponding to the zig-zag shape of the flow path or a rectangular shape covering the whole of the flow path. The substrates include at least a first substrate in one surface of which the flow path is formed, and a second substrate bonded to the one surface of the first substrate. The heat radiation-preventing film is a first heat radiation-preventing film covering at least a portion of the other surface of the first substrate away from the one surface; a second heat radiation-preventing film covering at least a portion of the other surface of the second substrate away from one surface opposing the first substrate; a third heat radiation-preventing film covering at least a portion of those side surfaces of the first substrate perpendicular to the other surface; and/or a fourth heat radiation-preventing film covering at least a portion of those side surfaces of the second surface perpendicular to the other surface. The thin film heater is formed on that one surface of the second substrate opposing the first substrate; the other surface of the second substrate away from the one surface; and/or the other surface of the first substrate away from the one surface. The heater comprises a combustion flow path having a combustion catalyst layer; a supplying unit which supplies a combustion fluid to the combustion flow path; and a thermal energy generating unit which generates thermal energy in the combustion flow path by a combustion reaction on the combustion catalyst layer. A vaporizing unit vaporizes the fluid in the flow path by heating the flow path. A reforming unit reforms the fluid in the flow path by heating the flow path to produce hydrogen. The fluid is a gas mixture of vaporized methanol and water. A removing unit removes carbon dioxide from the fluid in the flow path by heating the flow path.    TECHNOLOGY FOCUS - METALLURGY - Preferred Materials: The heat radiation-preventing film is a metal film made of gold (Au), aluminum (Al) or silver (Ag), or a metal oxide film made of tin oxide (SnO2), indium oxide (InO3) or zinc oxide (ZnO).