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A29, no. 2, November 1991 (1991-11-01), pages 151 - 158, XP000241462, ISSN: 0924-4247,relevantClaims[1-31],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;|&lt;pp&gt;152&lt;/pp&gt;&lt;column&gt;1&lt;/column&gt;&lt;para&gt;4&lt;/para&gt;&lt;ppl&gt;153&lt;/ppl&gt;&lt;coll&gt;1&lt;/coll&gt;&lt;paral&gt;1&lt;/paral&gt;|&lt;pp&gt;156&lt;/pp&gt;&lt;column&gt;2&lt;/column&gt;&lt;para&gt;2&lt;/para&gt;|&lt;figure&gt;1&lt;/figure&gt;];  TAYEBATI P ET AL: "Microelectromechanical tunable filter with stable half symmetric cavity", ELECTRONICS LETTERS, IEE STEVENAGE, GB, vol. 34, no. 20, 1 October 1998 (1998-10-01), pages 1967 - 1968, XP006010390, ISSN: 0013-5194,relevantClaims[1-28|32-38],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;|&lt;pp&gt;W&lt;/pp&gt;];  CHUNG S-W ET AL: "Design and fabrication of 10x10 micro-spatial light modulator array for phase and amplitude modulation", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 78, no. 1, January 1999 (1999-01-01), pages 63 - 70, XP004244582, ISSN: 0924-4247,relevantClaims[32-38],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;|&lt;pp&gt;66&lt;/pp&gt;&lt;column&gt;2&lt;/column&gt;&lt;para&gt;2&lt;/para&gt;&lt;ppl&gt;68&lt;/ppl&gt;&lt;coll&gt;1&lt;/coll&gt;&lt;paral&gt;1&lt;/paral&gt;|&lt;figure&gt;6&lt;/figure&gt;];  CHITICA N ET AL: "MONOLITHIC INP-BASED TUNABLE FILTER WITH 10-NM BANDWIDTH FOR OPTICAL DATA INTERCONNECTS IN THE 1500-NM BAND", IEEE PHOTONICS TECHNOLOGY LETTERS, IEEE INC. NEW YORK, US, vol. 11, no. 5, May 1999 (1999-05-01), pages 584 - 586, XP000830421, ISSN: 1041-1135,relevantClaims[1,12,23],relevantPassages[&lt;pp&gt;A&lt;/pp&gt;|&lt;pp&gt;584&lt;/pp&gt;&lt;column&gt;2&lt;/column&gt;&lt;para&gt;3&lt;/para&gt;&lt;ppl&gt;585&lt;/ppl&gt;&lt;coll&gt;2&lt;/coll&gt;&lt;paral&gt;1&lt;/paral&gt;|&lt;figure&gt;1&lt;/figure&gt;];  TAYEBATI P ET AL: "Widely tunable Fabry-Perot filters using high-index-contrast DBRs", DESIGN AND MANUFACTURING OF WDM DEVICES, DALLAS, TX, USA, 4-5 NOV. 1997, vol. 3234, Proceedings of the SPIE - The International Society for Optical Engineering, 1998, SPIE-Int. Soc. Opt. Eng, USA, pages 206 - 218, XP009014426, ISSN: 0277-786X,relevantClaims[40,41],relevantPassages[&lt;pp&gt;208&lt;/pp&gt;&lt;para&gt;1&lt;/para&gt;|&lt;figure&gt;1&lt;/figure&gt;]