TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Component: The non-thermal equilibrium plasma is an atmospheric plasma glow discharge. It is preferably a continuous low-pressure glow discharge plasma, low-pressure pulse plasma, or dielectric barrier discharge.    TECHNOLOGY FOCUS - MECHANICAL ENGINEERING - Preferred Component: The apparatus is an atmospheric pressure glow discharge assembly, where the atmospheric plasma is generated between spaced apart parallel electrodes (2) that are either flat, parallel or concentric parallel electrodes. Each electrode is in the form of a watertight box having a side formed by a dielectric plate having, bonded on the interior of the box, a planar electrode together with a liquid inlet adapted to spray water or an aqueous solution onto the face of the planar electrode.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Component: The liquid precursor is an organometallic compound of titanium, zirconium, iron, aluminum, indium and/or tin; or an organometalloid compound of germanium or silicon. The organometalloid compound is an organopolysiloxane having a viscosity of 0.65-1000 mPa-s. The silicon organometalloid compound is an organopolysiloxane having a viscosity of 100-1000000 mPa-s dissolved in an organic and/or organosilicone solvent.    TECHNOLOGY FOCUS - POLYMERS - Preferred Component: The organometalloid resin is in the form of an organosilicone resin having the following empirical formula: (R'3SiO1/2) w(R'2SiO 2/2) x(R'SiO3/2) p(SiO4/2) z.R'=alkyl, alkenyl, aryl, H, or OH;w+x+p+z=1;w, x=less than 0.9; andp+z=greater than 0.1.Preferred Method: The liquid precursor is transported through an atmospheric plasma discharge and/or an ionized gas stream, by being dropped under gravity or entrained in a carrier gas. It is treated with the non-thermal equilibrium plasma discharge and/or an ionized gas stream in a container. It is introduced into the non-thermal equilibrium plasma in the form of an atomized liquid. The atomized liquid is introduced into the non-thermal equilibrium plasma by direct injection. Preferred Property: The metallic oxide, metalloid oxide, mixed oxide and/or organometallic and/or organometalloid resin have a particle size of 10-250 microns.