TECHNOLOGY FOCUS - CERAMICS AND GLASS - Preferred Component: The ceramic monolithic device package is built up from ceramic tape layers. The resulting monolithic ceramic structure comprises a low temperature cofired ceramic.    TECHNOLOGY FOCUS - INSTRUMENTATION AND TESTING - Preferred Component: The first and second openings comprise the same opening, and the pump actuator comprises the cover. The first and second valves comprise a passive valve, a check valve, a passive check valve, a duck-bill valve, and/or a flapper valve. The pump actuator comprises a piezoelectric membrane (630) component, or piezoelectric actuator, which comprises a unimorphic piezoelectric membrane component and/or a bimorphic piezoelectric membrane component. The retaining mechanism comprises an annular retaining ring, a valve anchor, and/or a seal. The pump actuator and/or the cover are soldered to the first surface of the substrate. Preferred Method: The method comprises providing retaining mechanism for retaining the first and/or second valves, within a microfluidic channel. It comprises disposing the sensing area near the pump chamber, such that mechanical deformation of the sensing area at least partially corresponds to fluid pressure in the region of the pump chamber; disposing the sensing piezoresistor(s) near the sensing area of the sensing cavity, such that mechanical deformation of the sensing area actuates the resistance of the sensing piezoresistor; and disposing a reference piezoresistor(s) removed from the sensing area of the sensing cavity, such that mechanical deformation of the sensing area does not actuate the resistance of the reference piezoresistor. It comprises aligning the piezoresistors as orthogonal pairs; sealing the sensing cavity to provide a hermetic seal; disposing the contact pads on an exterior surface of the monolithic device package; enclosing the sensing cavity with a layer of ceramic tape; and providing a wheatstone bridge configuration of conductive connection between the piezoresistors and the contact pads.    TECHNOLOGY FOCUS - POLYMERS - Preferred Component: The first and second valves comprise silicone, silicone-based rubber, rubber, metal, metal alloy, and/or polymer. The device package is of ceramic, glass, polymer, metal and/or metal alloy.