TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: As a layer among the several layers, a silver layer made of silver or its alloy including silver is formed. The layer-forming step involves forming an adhesive layer on the substrate, forming the silver layer in contact with a surface of the adhesive layer and forming a barrier layer for protecting the silver layer in contact with a surface of the silver layer.Preferred Components: At least either the adhesive layer or the barrier layer is made of a metal compound or a conductive oxide selected from indium, tin and zinc; or indium, tin, and oxygen, a compound including indium, zinc and oxygen, and indium oxide, tin oxide and zinc oxide; or a common element selected from indium, tin and zinc; or both the adhesive and the barrier layer are at least indium or a compound including indium, tin and oxygen; or the adhesive layer is made of a compound selected from indium, tin and oxygen, and the barrier layer is made of a compound selected from indium, zinc and oxygen; or the adhesive layer and the barrier layer are made of a compound selected from indium, zinc and oxygen. In the etching step, dry etching is performed by using an etching gas including a component capable of forming a volatile compound with all the layers. The method further includes removing the mask with a remover.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: The etching gas is methane. The remover includes an organic amino compound selected from diethylenetriamine, 2-(2-aminoethylamino)ethanol, 2-(2-aminoethylamino)-2-propanol, N-(3-aminopropyl)-N-(2-hydroxyethyl)-2-aminoethanol, 2-(2-aminoethoxy)ethanol, dipropylenetriamine, triethylenetetramine and formalin; and a polar organic solvent. The remover is non aqueous. The remover further includes an anti-corrosive. The polar organic solvent is 1,3-dimethyl-2-imidazolidinone or N-methyl-2-pyrzolidinone.Preferred Composition: The total content of the organic amino compound in the remover is 20 - 50 mass.%.    TECHNOLOGY FOCUS - ELECTRONICS - Preferred Device: The display device is an organic light emitting device in which the organic layer includes a light emitting layer and an electrode are laminated in order on the laminated structure. The light generated in the light-emitting layer is extracted from the electrode side of the organic light-emitting device. The device is a liquid crystal display device in which a pixel electrode and a drive device and wiring electrically connected to the pixel electrode are disposed on the substrate and the laminated structure is disposed between the substrate and the drive device and the wiring. The laminated structure acts as a reflective electrode, which is disposed on to the substrate.