TECHNOLOGY FOCUS - CERAMICS AND GLASS - Preferred Material: The substrate layer can be glass substrate or silica substrate.    TECHNOLOGY FOCUS - ELECTRONICS - Preferred Material: The substrate layer can be integrated circuit.    TECHNOLOGY FOCUS - ELECTRICAL POWER AND ENERGY - Preferred Method: The cathode and anode current collectors are deposited concurrently. The vapor-depositing step includes positioning the aperture mask proximate to the substrate. Each deposition step involves vapor deposition. The method includes the steps of aligning the substrate with the current collector mask, vapor depositing a current collector layer onto the substrate, aligning the substrate with an electrolyte mask, depositing the electrolyte layer, aligning the substrate with an anode mask, depositing the anode layer, and optionally depositing the encapsulant layer, in which this steps are repeated until desired number of battery cells has been deposited to produce a multicell battery. The cells are connected in series and/or parallel to produce a planar array or stacked column of thin film batteries on the substrate. The vapor depositing steps are sputtering, thermal evaporation, electron beam evaporation, chemical vapor depositing, metal organic chemical vapor depositing, combustion chemical vapor depositing and plasma enhanced chemical vapor, or pulsed laser deposition steps. The aperture mask is formed with a number of deposition mask patterns, which are formed with greater than or equal to2 different mask patterns. It is flexible so that it can be wound to form a roll.Preferred Component: The substrate layer is battery. The aperture mask comprises an elongated web of flexible film where a deposition mask pattern is formed. The deposition mask pattern defines deposition apertures that extend through the film that define a portion of the battery cell. The current collector layer of the battery is shared with the source, drain, or gate electrode of the integrated circuit.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Material: The substrate layer can be silicon substrate. The cathode is a lithium transition metal oxide, preferably amorphous vanadium oxide (V2O5), crystalline titanium sulfide (TiS2), lithium manganese oxide-containing compound (LiMn2O2, LiMnO2, LiMnO4, or LixMn2-yO4), lithium cobalt and nickel oxide-containing compound (LiCo0.2Ni0.8O2), lithium cobalt oxide-containing compound (LiCoO2), lithium vanadium oxide-containing compound (LiV3O8 or LiV2O5, or LiV3O13), or V2O5. The electrolyte is lithium phosphorus oxynitride. The anode layer is lithium metal, lithium intercalation compounds, silicon-tin oxynitride, tin, or gold.    TECHNOLOGY FOCUS - MECHANICAL ENGINEERING - Preferred Component: A drive mechanism is provided to move first and/or second webs relative to the other web. A deposition unit is provided to deposits onto the substrate through the deposition mask pattern defined by the polymeric aperture mask. An alignment mechanism aligns the deposition mask pattern of the polymeric aperture mask with the substrate prior to deposition. It is a stretching apparatus for stretching the polymeric aperture mask or substrate film to align the deposition mask pattern relative to the substrate or to the polymeric aperture mask, respectively.    TECHNOLOGY FOCUS - METALLURGY - Preferred Material: The anode layer can be tin/lead alloys.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Material: The substrate layer can be silicon substrate. The cathode is a lithium transition metal oxide, preferably amorphous vanadium oxide (V2O5), crystalline titanium sulfide (TiS2), lithium manganese oxide-containing compound (LiMn2O2, LiMnO2, LiMnO4, or LixMn2-yO4), lithium cobalt and nickel oxide-containing compound (LiCo0.2Ni0.8O2), lithium cobalt oxide-containing compound (LiCoO2), lithium vanadium oxide-containing compound (LiV3O8 or LiV2O5, or LiV3O13), or V2O5. The electrolyte is lithium phosphorus oxynitride. The anode layer is lithium metal, lithium intercalation compounds, silicon-tin oxynitride, tin, or gold.    TECHNOLOGY FOCUS - POLYMERS - Preferred Material: The substrate layer can be rigid orflexible polymeric substrate. The polymeric aperture mask comprises polyimide, polyester, polystyrene, polymethyl methacrylate, or polycarbonate polymers. The aperture mask comprises an elongated web of flexible film. the film is sufficiently flexible to be wound into a roll.    TECHNOLOGY FOCUS - TEXTILES AND PAPER - Preferred Material: The substrate layer can be paper substrate, woven substrate, or nonwoven substrate.