EP1617457-A2 -- JP62095828-A   ;  JP62299031-A   ;  US4367114-A   PERKIN-ELMER CORP (PEKE)   STEINBERG G N,  REINBERG A R,  AYE J D;  US20030196760-A1   ;  US7845309-B2 -- JP62095828-A   ;  JP62299031-A   ;  US4367114-A   PERKIN-ELMER CORP (PEKE)   STEINBERG G N,  REINBERG A R,  AYE J D;  US4381965-A   DRYTEK INC (DRYT-Non-standard)   MAHER J A,  ZAFIROPOU A W;  US4786359-A   TEGAL CORP (TEGA-Non-standard)   STARK M M,  NAKAJIMA S,  LACHENBRUC R B;  US5534751-A   LAM RES CORP (LRES)   LENZ E H,  DIBLE R D;  US5605637-A   APPLIED MATERIALS INC (MATE-Non-standard)   SHAN H,  LEE E,  WU R;  US5711811-A   MIKROKEMIA OY (MIKR-Non-standard)   SUNTOLA T,  LINDFORS S,  SOININEN P;  US5891350-A   APPLIED MATERIALS INC (MATE-Non-standard)   SHAN H,  LEE E Y,  WELCH M D,  WU R W,  PU B,  LUSCHER P E,  CARDUCCI J D,  BLUME R;  US6051100-A   INT BUSINESS MACHINES CORP (IBMC)   WALKO J P;  US6091045-A   SUMITOMO METAL IND LTD (SUMQ)   MABUCHI H,  TSUYUGUCHI J,  KATAYAMA K,  HAYAMI T,  IDA H,  MURAKAMI T,  TAKEDA N;  US20020127853-A1   ;  US20040118344-A1   ;  US6178919-B1   LAM RES CORP (LRES)   LI L,  MUELLER G;  US6251216-B1   MATSUSHITA ELECTRONICS CORP (MATE)   OKAMURA H,  IMAI S,  JIWARI N,  HIGASHIMORI Y;  US6403491-B1   APPLIED MATERIALS INC (MATE-Non-standard)   CARDUCCI J D,  NOORBAKHSH H,  LEE E Y,  PU B Y,  SHAN H,  BJORKMAN C,  SALIMIAN S,  LUSCHER P E,  WELCH M D,  LIU J,  KOMATSU T,  DOAN K L,  CHANG M,  WANG Z,  KIM Y,  WANG R;  US6700089-B1   TOKYO ELECTRON LTD (TKEL)   HIROOKA T;  US6744212-B2   LAM RES CORP (LRES)   FISCHER A,  TRUSSELL D,  KENNEDY B,  LOEWENHARDT P;  CN1728916-B -- CN2360422-Y   ;  JP62299031-A   ;  JP63166235-A   ;  US4367114-A   PERKIN-ELMER CORP (PEKE)   STEINBERG G N,  REINBERG A R,  AYE J D;  US5891350-A   APPLIED MATERIALS INC (MATE-Non-standard)   SHAN H,  LEE E Y,  WELCH M D,  WU R W,  PU B,  LUSCHER P E,  CARDUCCI J D,  BLUME R;  EP1617457-B1 -- US4367114-A   PERKIN-ELMER CORP (PEKE)   STEINBERG G N,  REINBERG A R,  AYE J D;  US20030196760-A1   ;  JP5054901-B2 -- JP01073619-A   ;  JP02294029-A   ;  JP05190500-A   ;  JP05315295-A   ;  JP08250439-A   ;  JP08260158-A   ;  JP08279399-A   ;  JP10070109-A   APPLIED MATERIALS INC (MATE-Non-standard)   SHAN H,  LEE E Y,  WELCH M D,  WU R W,  PU B,  LUSCHER P E,  CARDUCCI J D,  BLUME R;  JP11288890-A   FUJI DENKI SOGO KENKYUSHO KK (FUEL)   FUJIKAKE S;  JP2000030898-A   ;  JP2000091245-A   ;  JP2000215835-A   ;  JP2002064064-A   KOKUSAI DENKI KK (KOKZ)   UEDA T,  ASAI M;  JP2002126675-A   ;  JP2002151471-A   TOKYO ELECTRON LTD (TKEL)   OGASAWARA M,  KATO K;  JP2004508706-A   WAFERMASTERS INC (WAFE-Non-standard)   YOO W S;  JP2790878-B2   KOKUSAI ELECTRIC CO LTD (KOKZ)   KINOSHITA H,  MATSUMOTO O,  SAKUMA H