TECHNOLOGY FOCUS - ELECTRONICS - Preferred Properties: The pores have a density of 1x1010/cm2. Preferred Dimensions: An average pore diameter of pores is 50 nm, and an average interpore center-to-center distance between at least two of the pores is 100 nm. Preferred Method: A protective layer is arranged on a barrier layer. Annealing is performed under helium or argon atmosphere at 500?OC for 3 hours. Electropolishing is conducted by contacting the annealed aluminum material with an acid bath solution of pechoric acid/ethanol in a ratio of 1:3. The second anodizing step includes anodizing the electropolished annealed aluminum material in 0.3 M oxalic acid solution at a voltage of 40 (direct current) to form a nanoporous anodized aluminum oxide layer. Electrodeposition is a computer-controlled pulse-reverse electrodeposition with simultaneous current and voltage control. An average diameter of pores is controlled to 50 nm by widening the entire pore in 0.3 M oxalic acid solution. The pores are formed in Y-type shape. Growth of carbon nanotubes step within the pores includes applying a first gas for first time to grow a first portion of a first set of carbon nanotubes having a first composition, and applying a second gas for second time less than the first time to grow a second portion of the first set of carbon nanotubes having a second composition. The aluminum material may be doped by implantation of chromium, nickel, copper, manganese, iron, magnesium, and/or silicon.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Materials: The catalyst particles comprise cobalt deposited with pulse-reverse electrodeposition. The catalyst particles may comprise cobalt, nickel, iron, and/or transitional metals. The carbon nanotubes have a first portion of first composition and a second portion of second composition different from the first composition. The second composition comprises graphitized carbon nanotubes. The first composition comprises carbon nanotubes having a graphitization less than the second composition.    TECHNOLOGY FOCUS - METALLURGY - Preferred Materials: The substrate is formed of aluminum alloy. The metal material comprises transition metals, e.g. nickel, platinum, and/or chromium.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Materials: The catalyst particles comprise cobalt deposited with pulse-reverse electrodeposition. The catalyst particles may comprise cobalt, nickel, iron, and/or transitional metals. The carbon nanotubes have a first portion of first composition and a second portion of second composition different from the first composition. The second composition comprises graphitized carbon nanotubes. The first composition comprises carbon nanotubes having a graphitization less than the second composition.