TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Materials: The catalyst material is metals or metallic compounds. Several targets (5) are attached to cathode (4) and metals or metallic compounds are discharged simultaneously and coated to support surface. Then, some of the coated metals or metallic compounds are removed using acid and/or alkali. The operating efficiency of target material is 80% or more. The metals are sodium, magnesium, aluminum, silicon, potassium, calcium, strontium, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, germanium, rubidium, strontium, yttrium, zirconium, niobium, molybdenum, ruthenium, rhodium, silver, cadmium, indium, tin, antimony, cesium, barium, lanthanum, hafnium, tantalum, tungsten, rhenium, osmium, iridium, thallium, lead, bismuth, cerium, praseodymium, neodymium, europium and/or samarium. Alternately, the metals are noble metals chosen from gold, platinum and/or silver. The metallic compound is oxide, nitride, oxynitride or carbide of aluminum, silicon, titanium, iron, cobalt, nickel, copper, zinc, niobium, molybdenum, lanthanum, tantalum, tungsten and/or lead. The support is carbon fiber aggregate, preferably carbon paper or fibril-like carbon fiber aggregate having diameter of 1 nm-1 microns. The support is alternately composite material formed by arranging fibril-like carbon fiber aggregate on carbon paper. Alternately, the support is three-dimensional continuous form carbon fiber obtained by baking fibril-like polymer in non-oxidizing atmosphere, formed by oxidation polymerization compound having aromatic ring. Preferred Arrangement: When the number of target material is two, target material is arranged opposing or when the number is three or more, the target materials are arranged in the shape of polyhedron.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Compound: Compound having aromatic ring is preferably aniline, pyrrole, thiophene and/or their derivatives. EXAMPLE - Fibril-like polyaniline was electrodeposited on platinum board. The fibril was heated to 95degreesC in argon atmosphere and baked at 95degreesC for 1 hour to form carbon fiber having three-dimensional continuous form on a carbon paper. Titanium oxynitride thin film was formed on carbon paper by gas flow sputtering method. The obtained catalyst structure was used for forming hydrogen by reaction with cyclohexane. The hydrogen generation rate and cyclohexane conversion rate after 30 minutes were 12 l/hour and 20%, respectively.