TECHNOLOGY FOCUS - ELECTRONICS - Preferred Method: Metals or metallic compounds are sputtered simultaneously, and catalyst material is coated on the support surface to obtain the catalyst structure. Multiple targets (2A,2B) are attached to one cathode (1A,1B) when sputtering the metal or metallic compound. At least one of the metal or metallic compound in the catalyst material is removed with an acid and/or alkali. Light-emission quantity during discharge is monitored. According to the light-emission quantity, reactive gas is supplied to the cathode or support vicinity. Impedance of power supply during discharge is monitored. According to the value of impedance, reactive gas is supplied to the cathode or support vicinity. Reactive sputtering is performed according to reactive gas volume, electric current, voltage and electric power. Alternately voltage is applied between cathode and anode. The waveform of the alternating voltage is sine wave or square wave. The square wave is pulse-light wave. The operating efficiency of target material used by reactive sputtering is 80% or more.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Metal: The metal is chosen from sodium, magnesium, aluminum, silicon, potassium, calcium, scandium, titanium, vanadium, chromium, manganese, iron, cobalt, nickel, copper, zinc, gallium, germanium, rubidium, strontium, yttrium, zirconium, niobium, molybdenum, ruthenium, rhodium, silver, cadmium, indium, tin, antimony, cesium, barium, lanthanum, hafnium, tantalum, tungsten, rhenium, osmium, iridium, lead, bismuth, cerium, praseodymium, neodymium, samarium and/or europium. The metals are preferably noble metals chosen from silver, platinum and/or gold.Preferred Compound: The metallic compound is a metal oxide, metal nitride, metal carbide or metal oxynitride of aluminum, silicon, titanium, iron, cobalt, nickel, copper, zinc, niobium, molybdenum, lanthanum, tantalum, tungsten and/or lead.    TECHNOLOGY FOCUS - TEXTILES AND PAPER - Preferred Support: The support is carbon fiber aggregate which is a carbon paper. The carbon fiber aggregate is alternately a fibril-like carbon fiber aggregate having diameter of 1 nm-1 microns.