NOVELTY - A single source precursor is new.    USE - For the deposition of ternary chalcopyrite materials which are useful as quantum dots (claimed) and also as semiconductors (e.g. in solar collection cells)    ADVANTAGE - The single source precursor is a liquid at room temperature and is effective to yield a ternary chalcopyrite material upon heating or pyrolysis. The single source precursors effectively degrade to yield the ternary chalcopyrite at low temperature, e.g. below 500degreesC, and are useful to deposit thin film ternary chalcopyrite layers via a spray CVD technique.    DETAILED DESCRIPTION - A single source precursor of an empirical formula ((L)nM'(ER)x(X)y(R)zMa) (I) (excluding ((P(C6H5)3)2Cu(S-C2H5)2In(S-C2H5)2), ((P(C6H5)3)2Cu(Se-C2H5)2In(Se-C2H5)2), ((P(C6H5)3)2Cu(S(i-C4H9)2In(S(i-C4H9)2), ((P(C6H5)3)2Cu(Se(i-C4H9)2In(Se(i-C4H9)2), ((P(C6H5)3)2Ag(Cl)(SC(O)CH3)In(SC(O)CH3)2), ((P(C6H5)3)2Ag(Cl)(SC(O)C6H5)In(SC(O)C6H5)2), ((P(C6H5)3)2Ag(SC(O)CH3)2In(SC(O)CH3)2), ((P(C6H5)3)2Ag(SC(O)C6H5)2In(SC(O)C6H5)2), ((P(C6H5)3)2Cu(SC(O)C6H5)2In(SC(O)C6H5)2), ((P(C6H5)3)2Cu(SC(O)C6H5)2Ga(SC(O)C6H5)2), ((P(C6H5)3)2Ag(SC(O)C6H5)2Ga(SC(O)C6H5)2), and ((P(C6H5)3)2Ag(SC(O)CH3)2Ga(SC(O)CH3)2)) is new.    x=3;    x+y+z=4;    n=greater than or equal to1;    L=Lewis base that is coordinated to M' via a dative bond;    M'=Group I-B atom;    Ma=Group III-A atom;    E=Group VI-A atom;    X=Group VII-A atom; and    R=alkyl, aryl, vinyl, perfluoro alkyl, perfluoro aryl, silane, or carbamato groups.    INDEPENDENT CLAIMS are also included for:    (1) method (m1) of depositing ternary chalcopyrite materials involving providing a first single source precursor of formula (I) for the ternary chalcopyrite material; and depositing the single source precursor on a substrate using a spray CVD technique;    (2) preparation (p1) of single source precursor of formula ((L)nM'(ER)2Ma(ER)2) (II) involving reacting 4MkER with M'X3, MaX and nL; and    (3) preparation (p2) of a quantum dot involving providing (I) for a ternary chalcopyrite material; and pyrolyzing (I) to yield a quantum dot made of ternary chalcopyrite material having dimensions less than 100 nanometers.    Mk=alkali metal element.