TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Components: (C1) further comprises residue material selected from post-etch photoresist residue and post-ash residue. (S1) is selected from carbon dioxide, oxygen, argon, krypton, xenon, ammonia, hydrogen, forming gas, or sulfur hexafluoride (preferably carbon dioxide). The fluoro species comprises a fluorine-containing compound selected from hydrogen fluoride (HF), ammonium fluoride (NH4F) or xenon fluoride.Preferred Composition: (C1) comprises (wt.%): supercritical fluid (80 - 99.01), fluoro species (001 - 5), boric acid (5) and co-solvent (1 - 20).Preferred Method: The method further involves forming (C1) by subjecting at least one source fluid (S1) to pressure and temperature Conditions, where the source fluid becomes the supercritical fluid; and adding the cleaning concentrate to the supercritical fluid. The contacting is carried out at pressure of 800 - 10,000 psi and at a temperature of 20 - 150 degreesC. The method also involves washing the semiconductor wafer at a region at which residue has been removed, with a super critical fluid-containing solution to remove post-removal residue and fluoro species from the semiconductor wafer.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: (S1) is selected from methane, methanol or dimethyl ketone. The fluoro species comprises a fluorine-containing compound selected from alkyl hydrogen fluoride (NRH3F), dialkylammonium hydrogen fluoride (NR2H2F), trialkylammonium hydrogen fluoride (NR3HF), trialkylammonium trihydrogen fluoride (NR3(3HF)) or tetraalkylammonium fluoride (NR4F) (where each R is independently selected from 1-8C alkyl or 6-10C aryl) (preferably triethylamine trihydrogen fluoride). The at least one co-solvent comprises an organic species selected from methanol, ethanol, isopropyl alcohol, N-alkylpyrrolidones, N-arylpyrrolidones, dimethylsulfoxide, sulfolane, catechol, ethyl lactate, acetone, butyl carbitol, monoethanolamine, butyrol lactone, diglycol amine, gamma-butyrolactone, butylene carbonate, ethylene carbonate or propylene carbonate, (where alkyl is 1-8C alkyl and aryl is 6-10C aryl) (preferably methanol, ethanol, and isopropyl alcohol).