NOVELTY - Deposition of semiconductor material on substrate (400) involves introducing a material and a carrier gas into a first chamber; heating the material such that portion of material vaporizes into vapor; directing a mixture of vapor and carrier gas through first flow path to form uniform vapor/carrier gas composition; directing a mixture of vapor and carrier gas through second flow path to maintain the uniform vapor/carrier gas composition; and directing the composition toward a surface of a substrate having temperature lower than the vapor.    USE - For depositing a semiconductor material on a substrate for use in manufacture of photovoltaic device. The semiconductor material can be cadmium chalcogenide, preferably cadmium telluride or cadmium sulfide. (All claimed)    ADVANTAGE - Passing the vapor and carrier gas through two flow paths can require the vapor to travel a greater distance to the substrate and can allow more time for the powder of semiconductor material to completely vaporize. Reducing or eliminating the amount of powder from the vapor/carrier gas composition and providing a uniform vapor/carrier gas composition results in a deposited film that is uniform as to both thickness and grain structure, resulting in higher-quality and lower-cost production.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for:    (1) a distributor assembly (300) comprising a first chamber, a heating element, a first flow path, a second flow, and an outlet; and    (2) a substrate processing system (200) for depositing a film on a substrate comprising a material source connected to a distributor assembly such that a solid material and carrier gas supplied by the material source are introduced into the distributor assembly, and a conveyor for transporting the substrate proximate to the distributor assembly such that the vapor may be deposited on the substrate as a film.    DESCRIPTION OF DRAWING(S) - The figure shows a system for depositing a semiconductor on a glass sheet substrate.    Substrate processing system (200)    Rollers (230)    Housing (240)    Distributor assembly (300)    Substrate (400)