WO2007000469-A1 -- US6071573-A   LAM RES CORP (LRES)   KOEMTZOPOULOS C R,  KOZAKEVICH F;  US20030211735-A1   ;  US20050085098-A1   ;  US6403501-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   HANDER J W,  SANGANERIA M K,  HSIEH J J;  WO2005103327-A1   TOKYO ELECTRON LTD (TKEL)   FUKIAGE N;  US7514374-B2 -- JP2002289557-A   TOKYO ELECTRON LTD (TKEL)   HASHIMOTO T,  MATSUSE K,  OKUBO K,  TAKAHASHI T;  US5177578-A   ;  US5811195-A   APPLIED MATERIALS INC (MATE-Non-standard)   BYRNE J E,  MURUGESH L,  BERCAW C;  US5863602-A   NEC CORP (NIDE)   WATANABE H,  HIROTA T,  OGAWA T;  US5970383-A   ADVANCED MICRO DEVICES INC (ADMI)   LEE C;  US5981899-A   BALZERS AG (BALV)   PERRIN J,  ELYAAKOUBI M,  SCHMITT J;  US6071573-A   LAM RES CORP (LRES)   KOEMTZOPOULOS C R,  KOZAKEVICH F;  US20050214454-A1   ;  US20050257747-A1   ;  US6530992-B1   APPLIED MATERIALS INC (MATE-Non-standard)   YANG M X,  HO H,  CHEN S A;  US7204913-B1   LAM RES CORP (LRES)   SINGH H,  ULLAL S J,  GANGADHARAN S;  US6790793-B2   ;  US6828254-B2   HAN J (HANJ-Individual);  KIM K (KIMK-Individual);  AHN B (AHNB-Individual);  SHIN S M (SHIN-Individual);  KIM H (KIMH-Individual);  PARK H (PARK-Individual)   HAN J,  KIM K,  AHN B,  SHIN S M,  KIM H,  PARK H;  US6881684-B2   AOTA Y (AOTA-Individual);  KANAI M (KANA-Individual);  KOIKE A (KOIK-Individual);  SUSHIHARA T (SUSH-Individual)   AOTA Y,  KANAI M,  KOIKE A,  SUSHIHARA T;  US6902629-B2   APPLIED MATERIALS INC (MATE-Non-standard)   ZHENG Y,  SINGH V,  NEMANI S D,  CHEN C,  LEE J,  VENKATARAMAN S;  US6974781-B2   TIMMERMANS E A H (TIMM-Individual);  TEEPEN M J (TEEP-Individual);  MUCCIATO R (MUCC-Individual);  WILHELM R (WILH-Individual)   TIMMERMANS E A H,  TEEPEN M J,  MUCCIATO R,  WILHELM R;  CN101208457-B -- US6071573-A   LAM RES CORP (LRES)   KOEMTZOPOULOS C R,  KOZAKEVICH F;  US20030211735-A1   ;  US20050085098-A1   ;  US6403501-B1   NOVELLUS SYSTEMS INC (NOVE-Non-standard)   HANDER J W,  SANGANERIA M K,  HSIEH J J;  US7897966-B2 -- JP2002289557-A   TOKYO ELECTRON LTD (TKEL)   HASHIMOTO T,  MATSUSE K,  OKUBO K,  TAKAHASHI T;  US5177578-A   ;  US5677236-A   MITSUI TOATSU CHEM INC (MITK)   SAITOH K,  ISHIGURO N,  SADAMOTO M,  FUKUDA S,  ASHIDA Y,  FUKUDA N;  US5811195-A   APPLIED MATERIALS INC (MATE-Non-standard)   BYRNE J E,  MURUGESH L,  BERCAW C;  US5863602-A   NEC CORP (NIDE)   WATANABE H,  HIROTA T,  OGAWA T;  US5970383-A   ADVANCED MICRO DEVICES INC (ADMI)   LEE C;  US5981899-A   BALZERS AG (BALV)   PERRIN J,  ELYAAKOUBI M,  SCHMITT J;  US6071573-A   LAM RES CORP (LRES)   KOEMTZOPOULOS C R,  KOZAKEVICH F;  US20050214454-A1   ;  US20050257747-A1   ;  US20060205205-A1   ;  US6335540-B1   SEMICONDUCTOR ENERGY LAB (SEME)   CHIYOU K;  US6530992-B1   APPLIED MATERIALS INC (MATE-Non-standard)   YANG M X,  HO H,  CHEN S A;  US7204913-B1   LAM RES CORP (LRES)   SINGH H,  ULLAL S J,  GANGADHARAN S;  US6790793-B2   ;  US6828254-B2   HAN J (HANJ-Individual);  KIM K (KIMK-Individual);  AHN B (AHNB-Individual);  SHIN S M (SHIN-Individual);  KIM H (KIMH-Individual);  PARK H (PARK-Individual)   HAN J,  KIM K,  AHN B,  SHIN S M,  KIM H,  PARK H;  US6881684-B2   AOTA Y (AOTA-Individual);  KANAI M (KANA-Individual);  KOIKE A (KOIK-Individual);  SUSHIHARA T (SUSH-Individual)   AOTA Y,  KANAI M,  KOIKE A,  SUSHIHARA T;  US6902629-B2   APPLIED MATERIALS INC (MATE-Non-standard)   ZHENG Y,  SINGH V,  NEMANI S D,  CHEN C,  LEE J,  VENKATARAMAN S;  US6974781-B2   TIMMERMANS E A H (TIMM-Individual);  TEEPEN M J (TEEP-Individual);  MUCCIATO R (MUCC-Individual);  WILHELM R (WILH-Individual)   TIMMERMANS E A H,  TEEPEN M J,  MUCCIATO R,  WILHELM R