WO2007032855-A2 -- JP03111564-A   ;  JP11200027-A   ;  JP62076145-A   ;  US20040020769-A1   ;  US6284106-B1   BALZERS HOCHVAKUUM AG (BALV)   HAAG W,  GRUENENFELDER P,  SCHWENDENER U,  SCHLEGEL M,  KRASSNITZER S;  US6376385-B2   LAM RES CORP (LRES)   LILLELAND J,  HUBACEK J S,  KENNEDY W S;  US6840427-B2   TOSOH SMD INC (TOYJ)   IVANOV E Y;  US7588668-B2 -- DE4127260-C   ;  JP03111564-A   ;  JP11200027-A   ;  JP62076145-A   ;  US3878085-A   ;  US4272355-A   ;  US4275126-A   ;  US4415427-A   ;  US4437966-A   GTE PROD CORP (SYLV)   HOPE L L,  DAVEY E A;  US4444643-A   ;  US4600492-A   ;  US4610775-A   WESTINGHOUSE ELECTRIC CORP (WESE)   PHIFER C G;  US4631106-A   HITACHI LTD (HITA)   NAKAZATO N,  KAKEHI Y,  HARADA T,  FUKUYAMA R,  NAWATA M,  UEDA H,  OMOTO Y,  NAGATOMO K,  SHIBATA F;  US4714536-A   VARIAN ASSOC INC (VARI)   FREEMAN K,  HARRA D J,  GARRETT C B,  LEI L C;  US4717462-A   HITACHI LTD (HITA)   HONMA Y,  TSUNEKAWA S,  SASABE S;  US4724060-A   HITACHI LTD (HITA)   SAKATA M,  SHIMAMURA H,  KOBAYASHI S,  KAWAHITA M,  KAMEI T,  ABE K; 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 US5419029-A   ;  US5439524-A   VLSI TECHNOLOGY INC (PHIG)   MARSH W P,  COSTABILE M E,  CAIN J L,  RELUE M P;  US5458759-A   NICHIDEN ANELVA KK (NICV)   KOBAYASHI T,  HOSOKAWA N;  US5505833-A   ;  US5549802-A   APPLIED MATERIALS INC (MATE-Non-standard)   GUO X S;  US5565071-A   APPLIED MATERIALS INC (MATE-Non-standard)   DEMARAY R E,  BERKSTRESSER D E,  HERRERA M J;  US5593082-A   ;  US5598622-A   ;  US5614055-A   APPLIED MATERIALS INC (MATE-Non-standard)   FAIRBAIRN K,  NOWAK R;  US5628869-A   LSI LOGIC CORP (LSIL)   MALLON T G;  US5630917-A   APPLIED MATERIALS INC (MATE-Non-standard)   GUO X S;  US5653856-A   TOSOH SMD INC (TOYJ)   IVANOV E Y,  GRIGORIVA T F,  BOLDYREV V V;  US5658442-A   APPLIED MATERIALS INC (MATE-Non-standard)   LLOYD M,  DORLEANS F,  YANG S,  TANG H,  WEST R S,  VAN GOGH J,  HAGERTY C;  US5693203-A   NIKKO KYODO CO LTD (NIHA);  JAPAN ENERGY CORP (NIHA)   OHHASHI T,  FUKUYO H,  SAWAMURA I,  NAKAMURA K,  FUKUSHIMA A,  NAGASAWA M;  US5707498-A   ;  US5725740-A   ;  US5755936-A   ;  US5780357-A   ;  US5798029-A   APPLIED MATERIALS INC (MATE-Non-standard)   MORITA K;  US5819434-A   APPLIED MATERIALS INC (MATE-Non-standard)   HARALD H,  WALTER R M,  WILLIAM B;  US5824197-A   APPLIED MATERIALS INC (MATE-Non-standard)   TANAKA Y;  US5827408-A   APPLIED MATERIALS INC (MATE-Non-standard)   RAAIJMAKERS I;  US5833815-A   NICHIDEN ANELVA KK (NICV)   KIN K,  AONUMA D,  YAMADA T,  AZEHARA Y;  US5855744-A   APPLIED KOMATSU TECHNOLOGY INC (APMA)   HALSEY H L,  DEMARAY R E,  BLACK R,  HOSOKAWA A,  DE SALVO A M,  HALL V L;  US5873989-A   INTEVAC INC (ITVC)   HUGHES J L,  KOLENKOW R J,  POND N H,  DAVIS G A,  PETERSEN C T,  WEISS R E;  US5876573-A   CVC PROD INC (CVCC-Non-standard)   MOSLEHI M M,  HEIMANSON D,  DAVIS C J,  OMSTEAD T R;  US5876574-A   APPLIED MATERIALS INC (MATE-Non-standard)   HOFMANN R,  ZHENGU X;  US5876838-A   LSI LOGIC CORP (LSIL)   MALLON T G;  US5914018-A   APPLIED MATERIALS INC (MATE-Non-standard)   FU J,  VAN GOGH J;  US5942042-A   APPLIED MATERIALS INC (MATE-Non-standard)   VAN GOGH J;  US5956608-A   ;  US5990016-A   SAMSUNG ELECTRONICS CO LTD (SMSU)   BYONG-DONG K,  JUNG-KYU R,  SUNG-IRU K;  US6071389-A   TOSOH SMD INC (TOYJ)   ZHANG H;  US6083360-A   ;  US6093293-A   BALZERS HOCHVAKUUM AG (BALV)   HAAG W,  GRUENENFELDER P,  SCHWENDENER U,  SCHLEGEL M,  KRASSNITZER S;  US6103069-A   APPLIED MATERIALS INC (MATE-Non-standard)   DAVENPORT R E;  US6113700-A   SAMSUNG ELECTRONICS CO LTD (SMSU)   CHOI J Y;  US6143140-A   ;  US6143149-A   NIPPON DENKI KK (NIDE);  US20010023742-A1   ;  US20010045352-A1   ;  US20020011215-A1   ;  US20030089314-A1   ;  US20030234175-A1   ;  US20040020769-A1   ;  US20040129211-A1   ;  US20040231973-A1   ;  US20050006222-A1   ;  US20050066898-A1   ;  US20050103620-A1   ;  US6168696-B1   ;  US6176978-B1   ;  US6182603-B1   APPLIED KOMATSU TECHNOLOGY INC (APMA);  LAW K S (LAWK-Individual)   LAW K S,  SHANG Q,  SUN S,  BEER E;  US6183614-B1   APPLIED MATERIALS INC (MATE-Non-standard)   FU J;  US6199259-B1   APPLIED KOMATSU TECHNOLOGY INC (APMA)   DEMARAY R E,  HERRERA M; 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