NOVELTY - A vertical electrode (21a) has gas distribution path (31), gaseous diffusion paths (34,35) and gas distribution unit (36). A vertical electrode main casing (30a) is connected between horizontal electrodes. The gas distribution path is extended along Y-axis. The gas distribution unit extended along Y-axis, has several holes (37) through which gas is distributed to exterior side. The gas diffusion paths at gas distribution unit, perform gas ejection at one side and touch hole (32) at other side so that gas distribution is extended along Y-axis inside main casing.    USE - For manufacture of thin film silicon type solar cell.    ADVANTAGE - The distance between substrate and electrode is narrowed. The productivity of solar cell can be improved. The uniformity and quality of the film are improved.    DETAILED DESCRIPTION - The gas distribution unit is plate shaped object or porous structure that covers the outer surface of counter electrode. The cross sectional area of portion where gas distribution unit and gaseous diffusion path contact, is larger than cross sectional area of portion where the gas distribution path and gas diffusion path contact. The gas distribution unit has several holes so that gas is transmitted along direction parallel to the counter electrode. A cover covers the counter electrode side of each gap between electrode main casings. A thermal medium circulation path (33) is extended along Y-axis in electrode main casing. INDEPENDENT CLAIMS are included for the following:    (1) thin film production apparatus; and    (2) solar cell manufacturing method involves placing substrate on counter electrode and applying electric power between discharge electrode (3a) and counter electrode after the gas is introduced from hole gaseous diffusion path to film production room. A thin film for solar cell is formed on the substrate. The thermal medium is circulated in thermal medium circulation path so that temperature of substrate during film formation, is within predetermined range. The protrusions (28) are formed on both sides of vertical electrodes such that portion of gap between the vertical electrodes is reduced.    DESCRIPTION OF DRAWING(S) - The figure shows the top and sectional views of discharge electrode.    Discharge electrode (3a)    Vertical electrode (21a)    Protrusion (28)    Vertical electrode main casing (30a)    Gas distribution path (31)    Hole (32)    Thermal medium circulation path (33)    Gaseous diffusion paths (34,35)    Gas distribution unit (36)