;  WO2007120163-A2 -- SU1629353-A   BERESHCHENKO A A (BERE-Individual)   BERESHCHEN A A,  BERESHCHEN A S,  SHAPOVALOV I I;  US4839005-A   KOBE SEIKO SHO KK (KOBM)   KATSUMOTO K,  ISODA S,  YUUKI T,  KOIKE S,  YAMAMOTO Y,  MOTONISHI S,  KAWAGUCHI T,  GOTOH T,  HORIGUCHI S;  US4959113-A   RODEL INC (RODE-Non-standard)   ROBERTS J V H;  US5209816-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   YU C C,  DOAN T T,  LAULUSA A E;  WO2007120163-A3 -- US6011537-A   SLOTZNICK B (SLOT-Individual)   SLOTZNICK B;  US6535888-B1   OXELIS INC (OXEL-Non-standard)   VIJAYAN M,  BEHZADI S;  US8062096-B2 -- US3662501-A   ;  US4769046-A   FUJIMI KENMAZAI (FJMI)   SENDA T,  BABA T;  US4835909-A   BASF AG (BADI)   RICHTER J,  GRAU W,  MAURER G,  DOMAS F,  LOESER W,  BENDER R,  SCHULZE A R,  DOERR K;  US4839005-A   KOBE SEIKO SHO KK (KOBM)   KATSUMOTO K,  ISODA S,  YUUKI T,  KOIKE S,  YAMAMOTO Y,  MOTONISHI S,  KAWAGUCHI T,  GOTOH T,  HORIGUCHI S;  US4959113-A   RODEL INC (RODE-Non-standard)   ROBERTS J V H;  US5196353-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   SANDHU G S,  DOAN T T;  US5209816-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   YU C C,  DOAN T T,  LAULUSA A E;  US5230833-A   NALCO CHEM CO (NALC)   ROMBERGER J A,  PAYNE C C;  US5433651-A   INT BUSINESS MACHINES CORP (IBMC)   LUSTIG N E,  SAENGER K L,  TONG H;  US5609511-A   HITACHI LTD (HITA)   KUSUKAWA K,  FURUSAWA T,  HOMMA Y,  MORIYAMA S,  KAWAMURA Y;  US5643046-A   TOSHIBA KK (TOKE)   KATAKABE I,  AKIYAMA T,  MIYASHITA N;  US5658183-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   DOAN T T,  SANDHU G S;  US5730642-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   DOAN T T,  SANDHU G S;  US5783489-A   CABOT CORP (CABO)   KAUFMAN V B,  WANG S;  US5838447-A   EBARA CORP (EBAR)   HIYAMA H,  WADA T;  US5858813-A   ;  US5863838-A   MOTOROLA INC (MOTI)   JANOSU P,  MELISSA F;  US5872633-A   SPEEDFAM CORP (SPEE-Non-standard)   HOLZAPFEL P,  ALLEN R F,  LIN W,  SCHLUETER J,  KARLSRUD C;  US5893796-A   APPLIED MATERIALS INC (MATE-Non-standard)   BIRANG M,  GLEASON A,  GUTHRIE W L;  US5897426-A   APPLIED MATERIALS INC (MATE-Non-standard)   SOMEKH S;  US5949927-A   TANG W T Y (TANG-Individual)   TANG W T Y;  US5964643-A   APPLIED MATERIALS INC (MATE-Non-standard)   BIRANG M,  JOHANSSON N,  GLEASON A,  PYATIGORSKY G;  US6033596-A   CABOT CORP (CABO)   KAUFMAN V B,  WANG S;  US6039891-A   CABOT CORP (CABO)   KAUFMAN V B,  WANG S;  US6099389-A   ;  US20030082998-A1   ;  US20030124959-A1   ;  US20030220061-A1   ;  US20040165296-A1   ;  US20050159085-A1   ;  US6287175-B1   NIPPON MICROCOATING KK (NIMI-Non-standard)   MARUKAWA T,  HAMADA N,  ENDO K;  US6300249-B1   ;  US6316366-B1   CABOT CORP (CABO)   KAUFMAN V B,  WANG S;  US6350176-B1   ;  US6461227-B1   CABOT MICROELECTRONICS CORP (CABO)   FANG M;  US6554878-B1   ;  US6596150-B2   ;  US6720265-B2   MICRON TECHNOLOGY INC (MICR-Non-standard)   DINESH C;  US6830350-B2   ;  US6896591-B2   CABOT MICROELECTRONICS CORP (CABO)   CHANEYALEW A N,  SUN T;  KR1178338-B1 -- KR2004065303-A   PPG IND OHIO INC (PITT)   ALLISON W C,  SWISHER R G,  WANG A E;  US5209816-A   MICRON TECHNOLOGY INC (MICR-Non-standard)   YU C C,  DOAN T T,  LAULUSA A E;  US20030220061-A1   ;  JP5155858-B2 -- JP01246068-A   ;  JP02185365-A   ;  JP06069187-A   ;  JP2002059357-A   ;  JP2002100592-A   ;  JP2003100682-A   ;  JP2003264161-A   ;  JP2004014744-A   ;  JP2005001059-A