WO2007007003-A2  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11, 30 septembre 1999 (1999-09-30) -& JP 11 156156 A (SEIKO EPSON CORP), 15 juin 1999 (1999-06-15);  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11, 30 septembre 1999 (1999-09-30) -0x26 JP 11 156156 A (SEIKO EPSON CORP), 15 juin 1999 (1999-06-15);  VARTANIAN V ET AL: "REDUCTION OF SEMICONDUCTOR PROCESS EMISSIONS BY REACTIVE GAS OPTIMIZATION" IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 17, no. 4, novembre 2004 (2004-11), pages 483-490, XP001209966 ISSN: 0894-6507FR2888519-A1  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11, 30 septembre 1999 (1999-09-30) -& JP 11 156156 A (SEIKO EPSON CORP), 15 juin 1999 (1999-06-15);  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11, 30 septembre 1999 (1999-09-30) -0x26 JP 11 156156 A (SEIKO EPSON CORP), 15 juin 1999 (1999-06-15);  VARTANIAN V ET AL: "REDUCTION OF SEMICONDUCTOR PROCESS EMISSIONS BY REACTIVE GAS OPTIMIZATION" IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 17, no. 4, novembre 2004 (2004-11), pages 483-490, XP001209966 ISSN: 0894-6507;  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11, 30 septembre 1999 (1999-09-30) -&JP 11 156156 A (SEIKO EPSON CORP), 15 juin 1999 (1999-06-15)WO2007007003-A3  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11, 30 septembre 1999 (1999-09-30) -& JP 11 156156 A (SEIKO EPSON CORP), 15 juin 1999 (1999-06-15);  VARTANIAN V ET AL: "REDUCTION OF SEMICONDUCTOR PROCESS EMISSIONS BY REACTIVE GAS OPTIMIZATION" IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 17, no. 4, novembre 2004 (2004-11), pages 483-490, XP001209966 ISSN: 0894-6507;  PATENT ABSTRACTS OF JAPAN vol. 1999, no. 11 30 September 1999 (1999-09-30),relevantClaims[1-13],relevantPassages[&lt;figure&gt;13&lt;/figure&gt;];  VARTANIAN V ET AL: "REDUCTION OF SEMICONDUCTOR PROCESS EMISSIONS BY REACTIVE GAS OPTIMIZATION", IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, IEEE SERVICE CENTER, PISCATAWAY, NJ, US, vol. 17, no. 4, November 2004 (2004-11-01), pages 483 - 490, XP001209966, ISSN: 0894-6507,relevantClaims[1-6,8,9,13],relevantPassages[&lt;para&gt;2&lt;/para&gt;&lt;figure&gt;1&lt;/figure&gt;]