WO2007048993-A2 -- US2710878-A   ;  US5342472-A   TOKYO ELECTRON LTD (TKEL)   ISHII N,  IMAHASHI I;  US5453125-A   KROGH O D (KROG-Individual)   KROGH O D;  US20030000823-A1   ;  WO1996013621-A1   ;  WO2001008783-A2   ;  EP1951422-B1 -- US2710878-A   ;  US5342472-A   TOKYO ELECTRON LTD (TKEL)   ISHII N,  IMAHASHI I;  US5453125-A   KROGH O D (KROG-Individual)   KROGH O D;  US20030000823-A1   ;  WO1996013621-A1   ;  WO2001008783-A2   ;  JP4966973-B2 -- JP05190501-A   ;  JP09196773-A   ;  JP10284299-A   ;  JP2003321760-A   TOCALO CO LTD (TOCL);  TOKYO ELECTRON LTD (TKEL)   HARADA Y,  TAKEUCHI J,  HAMAGUCHI T,  NAGAYAMA N,  MITSUHASHI K;  JP2004313998-A   EBARA CORP (EBAR)   MATSUMURA S,  MAKITA Y,  TSUJI T;  WO1996013621-A1   ;  WO2001008783-A2   ;  KR1320251-B1 -- US2710878-A   ;  US5342472-A   TOKYO ELECTRON LTD (TKEL)   ISHII N,  IMAHASHI I;  WO1996013621-A1   ;  US9333460-B2 -- GB2273027-A   UK ATOMIC ENERGY AUTHORITY (UKAT)   BAYLISS K H;  GB2316170-A   AEA TECHNOLOGY PLC (UKAT)   RAYBONE D,  GILLESPIE R F,  WINTERBOTTOM F,  HALL S I;  JP05190501-A   ;  JP09196773-A   ;  JP10284299-A   ;  JP2004313998-A   EBARA CORP (EBAR)   MATSUMURA S,  MAKITA Y,  TSUJI T;  JP2003321760-A1   TOCALO CO LTD (TOCL);  TOKYO ELECTRON LTD (TKEL)   HARADA Y,  TAKEUCHI J,  HAMAGUCHI T,  NAGAYAMA N,  MITSUHASHI K;  TW288251-B1   ;  TW400010-B1   BOC GROUP PLC (BRTO)   SEELEY A J;  TW451286-B1   ;  US2710878-A   ;  US5137701-A   ;  US5342472-A   TOKYO ELECTRON LTD (TKEL)   ISHII N,  IMAHASHI I;  US5451259-A   KROGH O D (KROG-Individual)   KROGH O D;  US5453125-A   KROGH O D (KROG-Individual)   KROGH O D;  US5663476-A   MOTOROLA INC (MOTI)   KOONTZ J C,  CRIPE J D,  REED G T;  US6045618-A   APPLIED MATERIALS INC (MATE-Non-standard)   RAOUX S,  FAIRBAIRN K,  KELKAR M,  CHEUNG D,  PONNEKANTI H,  TANAKA T;  US6110556-A   APPLIED MATERIALS INC (MATE-Non-standard)   BANG W,  YIEH E,  PHAM T;  US20030000823-A1   ;  US20090165953-A1   ;  US20090183684-A1   ;  US6187072-B1   APPLIED MATERIALS INC (MATE-Non-standard)   CHEUNG D,  RAOUX S,  HUANG J H,  TAYLOR W N,  FODOR M,  FAIRBAIRN K;  US6193802-B1   APPLIED MATERIALS INC (MATE-Non-standard)   PANG B,  CHEUNG D,  TAYLOR W N,  RAOUX S,  FODOR M;  US6230652-B1   APPLIED MATERIALS INC (MATE-Non-standard)   TSUTOMU T,  MUKUL K,  FAIRBAIRN K,  PONNEKANTI H,  CHEUNG D;  US6271148-B1   APPLIED MATERIALS INC (MATE-Non-standard)   CHEN-TOEE K,  KENNETH T,  KUEN F,  RONALD,  CALVIN,  JOSEPH Y;  US6391146-B1   APPLIED MATERIALS INC (MATE-Non-standard)   BHATNAGAR A,  RAMASWAMY K,  KAUSHAL T S,  WONG K M,  SHAMOUILIAN S;  US7497922-B2   ;  WO1996013621-A1   ;  WO2004098246-A1   BOC GROUP PLC (BRTO)   SEELEY A J;  WO2001008783-A2