NOVELTY - The discharge electrode (3-1) has several vertical electrodes (21) extending along preset direction, and two horizontal electrodes (20) such that the vertical electrodes are arranged in parallel, and the horizontal electrodes are mounted perpendicular to the horizontal electrodes extension direction. A high frequency electric power is applied between the discharge electrode and counter electrode, and processing gas is supplied inside a processing chamber so that the plasma density distribution of the generated plasma is equalized.    USE - For discharge electrode used during formation of thin film during manufacture of solar cell (claimed) such as amorphous silicon solar cell and fine crystal silicon solar cell.    ADVANTAGE - Film having uniform thickness, is formed on the substrate for solar cell, and the quality of the film formed on the substrate, is improved by equalizing the distribution density of high frequency plasma formed between discharge electrode and counter electrode during film formation. The film formation productivity is improved.    DETAILED DESCRIPTION - Space between the adjacent vertical electrodes, changes periodically along a direction parallel to the horizontal electrodes. The width of the vertical electrodes, changes periodically along a direction parallel to the horizontal electrodes so that the plasma density distribution is equalized. INDEPENDENT CLAIMS are included for the following:    (a) thin film formation apparatus; and    (b) solar cell manufacturing method involves maintaining a substrate on a counter electrode. The processing gas is supplied inside a film formation chamber. A high frequency electric power is applied between discharge electrode and counter electrode such that the discharge electrode has vertical and horizontal electrodes arranged for equalizing plasma distribution density. A thin film is formed on the substrate.    DESCRIPTION OF DRAWING(S) - The figure shows the top view of the discharge electrode.    Discharge electrode (3-1)    Horizontal electrodes (20)    Vertical electrodes (21)    Feeding points (53,54)