NOVELTY - The photoelectric-conversion apparatus has transparent electrode(s) (I) (12), photoelectric-conversion layer(s) (10), and transparent electrode (II) (16) provided sequentially on an insulating substrate (11). Transparent electrode (I and/or II) is a zinc oxide layer optionally containing gallium in an amount of 5 atomic% or less with respect to zinc. The zinc oxide layer is formed by sputtering method using a noble gas containing oxygen. The additional amount of oxygen is 0.1-5 vol.% with respect to the sum total of volume of oxygen and noble gas.    USE - As solar cell.    ADVANTAGE - The photoelectric-conversion apparatus has excellent photoelectric-conversion efficiency. The transparent electrode has optimized relationship between resistivity and transmittance. Several lights can be supplied with respect to photoelectric-conversion layer, and short-circuit-current density is increased.    DETAILED DESCRIPTION - The photoelectric-conversion apparatus has transparent electrode(s) (I) (12), photoelectric-conversion layer(s) (10) containing amorphous silicon or fine-crystal silicon, and transparent electrode (II) (16) provided sequentially on an insulating substrate (11). Transparent electrode (I and/or II) is a zinc oxide layer optionally containing gallium in an additional amount of 5 atomic% or less with respect to zinc. The zinc oxide layer is formed by sputtering method using a noble gas containing oxygen as sputtering gas. The additional amount of oxygen in the sputtering gas is 0.1-5 vol.% with respect to the sum total of volume of oxygen and noble gas.    An INDEPENDENT CLAIM is included for manufacture of photoelectric-conversion apparatus.    DESCRIPTION OF DRAWING(S) - The figure shows the sectional drawing of the photoelectric-conversion apparatus. (Drawing includes non-English language text).    Photoelectric-conversion layer (10)    Insulating substrate (11)    Transparent electrodes (12, 16)    Silicon layer (13)    Back surface electrode (17)