NOVELTY - Plasma apparatus comprises several linear tubes (132) having a dielectric interior fluidly connected together by dielectric connector (134). The tubes and connectors are joined together to form a leak-tight plasma vessel (130). The apparatus further includes a gas delivery port connected to tubes or connectors; sealing elements disposed at a junction between tubes and connectors; and a cooling system having a heat sink positioned relative to the linear tubes. An intermediary material is positioned between heat sink and linear tubes; and includes a thermal transfer material.    USE - For discharging plasma used to dissociate gases that produces activated gases containing ions, free radicals, atoms and molecules useful in industrial and scientific application having processing materials such as semiconductor wafers, powders and other gases.    ADVANTAGE - The plasma apparatus minimizes the defects, which lead to particle generation in plasma system. Under the influence of plasma environment, particle or chucks of material forming the defect may detach resulting in particle contamination of the plasma system. Plasma apparatus utilizing linear tubes do not have as high of defect concentration and thus emit lesser particles from the walls of the tubes than prior art plasma system. Since the plasma apparatus is formed of individual tubes rather than a solid block of material with channels formed within, the apparatus is easily configured into an appropriate shape and can be easily refurbished through cleaning and/or replacement of individual tubes. Since tubes are not processed into a tube shape, the interior surfaces of the tubes have a minimal concentration of surface defects and thus, a lower concentration of unwanted particle generation sites as compared to prior art plasma vessels. The apparatus provides stable, reproducible and high-energy plasma, as the plasma vessel is evenly cooled by the cooling system to avoid localized heating and resulting damage. After refurbishing all or a portion of the plasma vessel, the operator may reuse the cooling plates and deformable layers to surround the new or refurbished plasma vessel. As a result, effective and efficient cooling can be maintained even after plasma vessel refurbishment or replacement. The plasma vessel surrounded by the cooling plates and deformable layers can then be reattached to the plasma device and operated.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for:    (a) refurbishing the plasma apparatus involving cleaning the connectors and the gas injector;    (b) a method of providing gas to plasma vessel formed of tubes having dielectric interior surface involving connecting gas source to a manifold surrounding and fluidly coupled to apertures formed in a wall of tubes, and delivering the gas from the gas source to the plasma vessel through the manifold and apertures; and    (c) manufacturing the plasma apparatus involving connecting linear tubes and connectors to form a torodial plasma vessel, forming a fluid port within wall of tubes, and attaching a gas injector to the fluid port.    DESCRIPTION OF DRAWING(S) - The figure shows a perspective view of the plasma vessel.    plasma vessel (130)    linear tubes (132)    connectors (134)    entrance for gas (136)    gas exit. (138)