NOVELTY - The template (40) has a deformation textured substrate (42) and an intermediate epitaxial film (44) coupled to the substrate. The substrate has face-centered-cubic metal and the intermediate epitaxial film includes diamond-centered-cubic metal. The film is chemically compatible and lattice matched with the semiconductor film. The film is either directly coupled to the substrate or is indirectly coupled to the substrate by a non-oxide intermediate layer.    USE - For growth of semiconductor film.    ADVANTAGE - The template enables low-cost production of photovoltaic device by using cost effective substrate. The light conversion efficiency is improved.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following:    (1) method for manufacturing template involves deforming a substrate and depositing intermediate epitaxial film by using chemical vapor deposition, electroplating, sputtering, electron beam evaporation, molecular beam epitaxy, physical vapor deposition, solution deposition or electrochemical deposition process;    (2) photovoltaic device has semiconductor layer which is epitaxially grown on intermediate epitaxial film. The semiconductor layer comprises a compound semiconductor or series of compound semiconductor films forming multiple p-n or p-i-n junctions;    (3) photovoltaic cell has metal intermediate epitaxial film coupled to flexible deformation substrate and electrodes coupled to photovoltaic stack coupled to intermediate film;    (4) photovoltaic module has array of photovoltaic cells electrically coupled together and supported by a support structure. The module has a transparent protective cover for protecting the array of cells;    (5) method of manufacturing photovoltaic device involves producing textured metal, depositing transition metal soluble in both textured metal and refractory element and depositing epitaxial layer on transition metal. The semiconductor layers are deposited on epitaxial layer;    (6) method for manufacturing semiconductor device using roll-to-roll process involves coupling intermediate epitaxial film to textured substrate and forming semiconductor layer on intermediate epitaxial film; and    (7) semiconductor device.    DESCRIPTION OF DRAWING(S) - The figure shows the schematic view of the template.    Template (40)    Substrate (42)    Intermediate epitaxial film (44)