NOVELTY - The plasma inside vapor deposition apparatus (2) for making silicon thin film solar cell modules, comprises a unit for supporting a substrate having an outer and inner surface, a plasma torch unit located proximal to the inner surface for depositing a thin film layer on the inner surface of the substrate and located a distance from the substrate, a unit for supplying reagent chemicals (26) to the plasma torch unit, a laser (44) located proximal to the inner surface for scribing interconnections in the thin film layer to produce the thin film solar cell modules, and an injection nozzle.    USE - The plasma inside vapor deposition apparatus is useful for making silicon thin film solar cell modules (claimed).    ADVANTAGE - The plasma inside vapor deposition apparatus is capable of safely and reliably making silicon thin film solar cell modules with high deposition rates and high efficiency, and can be economically manufactured in flexible and easier manner.    DETAILED DESCRIPTION - The plasma inside vapor deposition apparatus (2) for making silicon thin film solar cell modules, comprises a unit for supporting a substrate having an outer and inner surface, a plasma torch unit located proximal to the inner surface for depositing a thin film layer on the inner surface of the substrate and located a distance from the substrate, a unit for supplying reagent chemicals (26) to the plasma torch unit, a laser (44) located proximal to the inner surface for scribing interconnections in the thin film layer to produce the thin film solar cell modules, and an injection nozzle located proximal to the outer surface for injecting one of a liquid and gas to control the temperature of the substrate. The supporting unit comprises a movable platform (8) for moving the substrate along its longitudinal axis relative to the plasma torch unit, and a rotatable chuck for rotating the substrate about its longitudinal axis relative to the plasma torch unit. The apparatus is oriented in a substantially vertical position. The plasma torch unit is an inductively coupled plasma torch (42). INDEPENDENT CLAIMS are included for:    (1) a method for making silicon thin film solar cell modules; and    (2) a silicon thin film photovoltaic panel.    DESCRIPTION OF DRAWING(S) - The diagram shows a cross-sectional view of a plasma deposition apparatus for making solar cells modules and panels.    Plasma deposition apparatus (2)    Deposition tube (4)    Movable platform (8)    Reagent chemicals (26)    Coupled plasma torch (44) Laser. (42)