NOVELTY - The film-forming apparatus has vacuum chamber having substrate on circulation support, exhaust apparatus, substrate transfer system, film forming unit and temperature control unit. The substrate transfer system conveys substrate such that thin film is formed on substrate. The film forming unit supplies material to substrate to form thin film. The circulation support has soft resin layer (24) provided inside hard resin layer (25), which is provided at surface. Temperature control unit controls temperature of surface of support by circulating coolant or heating medium.    USE - Apparatus is used for forming film used as active material layer for battery.    ADVANTAGE - The apparatus continuously enables formation of thin film without generating wrinkles. The thin film provides battery having excellent reliability.    DETAILED DESCRIPTION - The film-forming apparatus has a vacuum chamber having substrate on circulation support, exhaust apparatus for exhausting interior of vacuum chamber, substrate transfer system, film forming unit and temperature control unit. The substrate transfer system conveys substrate such that a thin film is formed on substrate. The film forming unit is provided in vacuum chamber, and supplies a material to substrate to form a thin film. The circulation support has a soft resin layer (24) provided inside hard resin layer (25), which is provided at surface. The temperature control unit controls the temperature of surface of circulation support by circulating coolant or heating medium. The soft resin layer contains silicone rubber, fluoro rubber, natural rubber or petroleum synthetic rubber. The hard resin layer contains phenol resin, polyimide, aramid, polyethylene terephthalate, polyethylene naphthalate or nylon.    DESCRIPTION OF DRAWING(S) - The drawing shows the structure of cylindrical can. (Drawing includes non-English language text)    Roll portion (23)    Soft resin portion (24)    Hard resin portion (25)    Shaft (32)    Warming-cooling medium pipe (33)