NOVELTY - A substrate processing system (300) comprises a source unit (320) to supply a deposition material to a substrate (405); a substrate holder (406); a shadow mask (440); and a transport mechanism to produce relative movement between shadow mask and substrate. The shadow mask includes a frame having two opposing arms, and a crossbar to be mounted to the two opposing arms. The frame and crossbar define openings that allow the deposition material supplied by the source unit to be deposited on the substrate.    USE - For fabricating a solar-cell module (claimed) for converting light into voltage and electric current.    ADVANTAGE - The substrate processing system provides simpler, cleaner, and more reliable processes for manufacturing solar-cell modules or photovoltaic cells comparing to some conventional manufacturing systems. The systems do not produce debris as in the patterning process in some conventional systems; can eliminate the cleaning steps for removing the debris in those conventional systems; and do not involve cutting thin film layers as conducted in some conventional systems. The systems can thus avoid current leakage and electrical shorting in those photovoltaic cells or modules made by conventional systems. The systems do not include the roughness associated with cutting or etching on the surface after patterning in those conventional systems. The performance can thus be improved and manufacturing costs of the solar-cell modules can be reduced using the systems. The system fabricates multiple layers in photovoltaic cells in continuous processing. The modules do not need to be disassembled for patterning and re-assembling for subsequent deposition steps as in some convention systems. Thus, the system improves manufacturing throughput and cost.    DETAILED DESCRIPTION - A substrate processing system (300), comprises a source unit (320) to supply a deposition material to a substrate (405); a substrate holder (406) to hold a substrate to receive the deposition material; a shadow mask (440); and a transport mechanism to produce relative movement between the shadow mask and the substrate. The shadow mask includes a frame having two opposing arms, and a crossbar to be mounted to the two opposing arms. The frame and the crossbar define several openings that allow the deposition material supplied by the source unit to be deposited on the substrate. The crossbar comprises an elongated portion, a mounting member at an end of the elongated portion and is mounted to the two opposing arms, and a spring to pull the mounting member against the one of the two opposing arms to securely mount the crossbar across the two opposing arms. The crossbar has a thermal expansion coefficient that is lower than a thermal expansion coefficient of the frame. The crossbar has a width of 0.02-2 millimeters. The shadow mask is positioned at a distance smaller than 2 millimeters from the substrate. The shadow mask and the crossbar are co-planar. INDEPENDENT CLAIMS are included for the following:    (1) a shadow mask for defining deposition patterns on a substrate, comprising frame, and a crossbar; and    (2) fabricating a solar-cell module, involving positioning a shadow mask over a substrate having first and second lower electrode layers with conductive materials, where the mask has openings; depositing at least one semiconductor material through the openings to form PN junction structure; producing translation between the shadow mask and the substrate; and depositing a second conductive material through the openings to form upper electrode layer on PN junction structure and partially on the second lower electrode layer, and to form a second upper electrode layer on PN junction structure.    DESCRIPTION OF DRAWING(S) - The figure shows a perspective view of the substrate processing system.    Substrate processing system (300)    Chamber (310)    Source unit (320)    Target (330)    Magnetron (340)    Substrate (405)    Substrate holder (406)    Shadow mask. (440)