NOVELTY - A liquid or solution of hardenable substance is applied on the surface of mold containing fluoropolymer and on which inverting structure corresponding to fine structure (14) is formed. The solvent is removed at a temperature below softening temperature of fluoropolymer. Curing is carried out until the hardenable substance (16) becomes a hardened precursor. The layer of hardened precursor is separated from the mold, to obtain a compact of hardened precursor. The hardened precursor is then cured by sol gel process, to obtain a fine structure (10).    USE - Manufacture of fine structure for optical elements (such as micro mirrors, micro-lens arrays, wire grid components, optical waveguides, wavelength filters, polarizing plates, optical switches, Fresnel zone plates, binary optical elements, and photonic crystals), reflection-preventing filters, biochips, microreactor chips, memory media (such as patterned media and discrete media), display materials (such as rib materials), filters, sensors, super-hydrophobic materials, energy related components (such as fuel cells, three-dimensional batteries, capacitors, Peltier devices, and solar cells), and micro-electromechanical components.    ADVANTAGE - The method enables manufacture of fine structures having excellent dimensional accuracy, mechanical strength, and thermal conductivity, with high productivity.    DETAILED DESCRIPTION - A liquid or solution of hardenable substance is applied on the surface of mold containing fluoropolymer and on which inverting structure corresponding to fine structure (14) is formed. The solvent is removed at a temperature below softening temperature of fluoropolymer. Curing is carried out until the hardenable substance (16) becomes a hardened precursor. The layer of hardened precursor is separated from the mold, to obtain a compact of hardened precursor. The hardened precursor is then cured by sol gel process, to obtain a fine structure (10). The fluoropolymer has a fluorine atom content of 35 mass% or more. A solution of water repellent is applied on the surface of hardened substance. The water repellent is fluorine-containing silane-coupling agent.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the fine structure.    Fine structures (10,14)    Base material (12)    Hardened substance (16)    Water-repellent thin film (18)