WO2008093090-A2  KONG Y P ET AL: "Stacked polymer patterns imprinted using a soft inkpad" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, AVS /AIP, MELVILLE, NY, US, vol. 22, no. 4, 1 July 2004 (2004-07-01), pages 1873-1878, XP012073830 ISSN: 0734-2101;  TAN L ; KONG Y P ; BAO L -R ; HUANG X D ; GUO L J ; PANG S W ; YEE A F: "Imprinting polymer film on patterned substrates" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, vol. 21, no. 6, 5 December 2003 (2003-12-05), pages 2742-2748, XP002484902;  TAN L ET AL: "Imprinting of polymer at low temperature and pressure" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AVS / AIP, MELVILLE, NEW YORK, NY, US, vol. 22, no. 5, 13 October 2004 (2004-10-13), pages 2486-2492, XP012074653 ISSN: 1071-1023WO2008093090-A3  TAN L ET AL: "Imprinting of polymer at low temperature and pressure" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AVS / AIP, MELVILLE, NEW YORK, NY, US, vol. 22, no. 5, 13 October 2004 (2004-10-13), pages 2486-2492, XP012074653 ISSN: 1071-1023;  TAN L ; KONG Y P ; BAO L -R ; HUANG X D ; GUO L J ; PANG S W ; YEE A F: "Imprinting polymer film on patterned substrates" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, vol. 21, no. 6, 5 December 2003 (2003-12-05), pages 2742-2748, XP002484902;  KONG Y P ET AL: "Stacked polymer patterns imprinted using a soft inkpad" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, AVS /AIP, MELVILLE, NY, US, vol. 22, no. 4, 1 July 2004 (2004-07-01), pages 1873-1878, XP012073830 ISSN: 0734-2101;  See also references of EP 2115794A2EP2115794-A2  See also references of WO 2008093090A2EP2115794-B1  TAN L ET AL: "Imprinting of polymer at low temperature and pressure" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B, AVS / AIP, MELVILLE, NEW YORK, NY, US, vol. 22, no. 5, 13 October 2004 (2004-10-13), pages 2486-2492, XP012074653 ISSN: 1071-1023;  TAN L ; KONG Y P ; BAO L -R ; HUANG X D ; GUO L J ; PANG S W ; YEE A F: "Imprinting polymer film on patterned substrates" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY B, vol. 21, no. 6, 5 December 2003 (2003-12-05), pages 2742-2748, XP002484902;  KONG Y P ET AL: "Stacked polymer patterns imprinted using a soft inkpad" JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART A, AVS /AIP, MELVILLE, NY, US, vol. 22, no. 4, 1 July 2004 (2004-07-01), pages 1873-1878, XP012073830 ISSN: 0734-2101