NOVELTY - The trichlorosilane and/or dichlorosilane is supplied to the reactor (1). The hydrochloride of tertiary aliphatic-hydrocarbon substituted amine and/or tertiary aliphatic-hydrocarbon substituted amine is supplied to reactor. A production mixture of monosilane, monochlorosilane, dichlorosilane and trichlorosilane from reactor is introduced into upper-stage condenser (3,5,6). The monosilane is separated from condensate. A bottom-portion recovering liquid of tetrachloro silane and a catalyst acquired from the bottom portion of the reactor is introduced into evaporation tank.    USE - Continuous manufacture of monosilane used as raw material for highly purified silicon epitaxy and amorphous silicon used for solar cell.    ADVANTAGE - The method enables continuous manufacture of monosilane efficiently and economically.    DETAILED DESCRIPTION - The monosilane manufacturing apparatus has a reactor, upper-stage condensers with reflux supply pipe (8,9,10) connected with top portion of reactor in series, a bottom-portion reboiler (2) of the reactor and an evaporation tank connected with the bottom portion of the reactor. At least one of trichlorosilane and dichlorosilane is supplied to the middle-portion of reactor. At least one of hydrochloride of tertiary aliphatic-hydrocarbon substituted amine and tertiary aliphatic-hydrocarbon substituted amine is supplied to the upper-stage portion of the reactor as a catalyst. A production mixture containing monosilane, monochlorosilane, dichlorosilane and trichlorosilane from the upper-stage portion of the reactor is introduced into the upper-stage condenser. The monosilane is separated from the condensate containing monochlorosilane, dichlorosilane and trichlorosilane at 50 to -50degrees C with an upper-stage condenser. The condensate from which monosilane is separated is returned to the upper-stage portion of reactor with the reflux supply pipe. The condensate is contacted with a catalyst within the reactor. A bottom-portion recovering liquid containing tetrachloro silane and a catalyst acquired from the bottom portion of the reactor is introduced into the evaporation tank. The catalyst recovered from the bottom portion of the evaporation tank is returned to the reactor.    DESCRIPTION OF DRAWING(S) - The drawing shows the explanatory drawing of the apparatus for continuous manufacture of monosilane.    Reactor (1)    Bottom-portion reboiler (2)    Upper-stage condensers (3,5,6)    Raw material supply pipe (4)    Reflux supply pipes (8,9,10)