NOVELTY - An apparatus (20) which manufactures a transparent electroconductive substrate (10) is equipped with a support (21) for mounting the to-be-processed component, units (28,29) for separately producing mist (23A,23B) of the raw-material solution of the electroconductive film containing each component of the film, discharge units (24A,24B) for atomizing the mist which leads to separation of each component towards the surface of to-be-processed component, and a temperature controller (22) for adjusting the temperature of to-be-processed component.    USE - Apparatus is used for manufacturing transparent electroconductive substrate (claimed) for solar cells, LCDs, and plasma displays.    ADVANTAGE - The apparatus enables wide setting of ratio in which a raw material is dissolved in a solvent. The concentration and mist-generation amount of raw-material solution, and the amount of spraying of solution mist can be controlled separately. The apparatus enables high-speed film-formation. The obtained transparent electroconductive support utilizes visible light and infrared light of long wavelength.    DETAILED DESCRIPTION - An apparatus (20) manufactures a transparent electroconductive substrate (10) by forming a transparent electroconductive film (12) on one surface of a to-be-processed component (11) by thermal spray decomposition method. The apparatus is equipped with a support (21) for mounting the to-be-processed component, units (28,29) for separately producing mist (23A,23B) of the raw-material solution of the electroconductive film containing each component of the film, discharge units (24A,24B) for atomizing the mist which leads to separation of each component towards the surface of to-be-processed component, and a temperature controller (22) for adjusting the temperature of to-be-processed component.    DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of manufacturing apparatus of transparent electroconductive substrate.    Transparent electroconductive substrate (10)    To-be-processed component (11)    Transparent electroconductive film (12)    Manufacturing apparatus of transparent electroconductive substrate (20)    Support (21)    Temperature controller (22)    Mist (23A,23B)    Discharge units (24A,24B)    Units for producing mist (28,29)