DE102007022431-A1 -- DE2653736-A   BOSCH GMBH ROBERT (BOSC)   ADAM H,  KELLER M,  KRUGER G;  DE4330266-A1   MITSUBISHI DENKI KK (MITQ)   TSUTAHARA K,  YAMAGUCHI T,  EJIMA T,  MINAMI T,  KAWATA Y;  DE10348281-A1   APPLIED FILMS GMBH & CO KG (APFM)   LINDENBERG R,  FUCHS F,  SCHUESSLER U,  BANGERT S,  STOLLEY T;  US6514347-B2   DENPOH K (DENP-Individual)   DENPOH K;  DE19901426-A1   SAMSUNG ELECTRONICS CO LTD (SMSU)   KIM K,  JEOUNG G,  KWAG G;  EP312447-B1   SOLEMS SA (SOLE-Non-standard)   SCHMITT J;  EP2218112-B1   SGL CARBON AG (SIGE)   CHRIST M,  HEUER D,  OETTINGER O;  JP06267808-A   ;  US4798739-A   ;  US5944857-A   TOKYO ELECTRON ARIZONA INC (TKEL)   EDWARDS R C,  ZIELENSKI M;  US6183564-B1   TOKYO ELECTRON LTD (TKEL);  TOKYO ELECTRON ARIZONA INC (TKEL)   REYNOLDS G J,  HILLMAN J T;  WO2009003552-A2 -- DE2653736-A   BOSCH GMBH ROBERT (BOSC)   ADAM H,  KELLER M,  KRUGER G;  DE4330266-A1   MITSUBISHI DENKI KK (MITQ)   TSUTAHARA K,  YAMAGUCHI T,  EJIMA T,  MINAMI T,  KAWATA Y;  DE10103341-A1   MATSUSHITA ELECTRIC IND CO LTD (MATU)   HAJI H,  ARITA K;  EP1524215-A1   APPLIED FILMS GMBH & CO KG (APFM)   LINDENBERG R,  FUCHS F,  SCHUESSLER U,  BANGERT S,  STOLLEY T;  EP1746182-A2   APPLIED MATERIALS INC (MATE-Non-standard)   TAKEHARA T,  SUN S,  WHITE J M;  JP02141568-A   ;  JP10121237-A   SONY CORP (SONY)   NOBE Y;  JP2000177842-A   MITSUBISHI JUKOGYO KK (MITO)   SASAGAWA E,  KANZAKI J,  UENO M,  KONDOU T,  NISHIMURA T;  US20020078892-A1   ;  US20040102025-A1   ;  US20040149389-A1   ;  US20060096857-A1   ;  US20060218680-A1   ;  US6241857-B1   NEC CORP (NIDE)   YAMADA Y;  US6818560-B1   TOKYO ELECTRON LTD (TKEL)   KOSHIMIZU C,  NAGAHATA K;  WO2009003552-A3 -- DE2653736-A   BOSCH GMBH ROBERT (BOSC)   ADAM H,  KELLER M,  KRUGER G;  DE4330266-A1   MITSUBISHI DENKI KK (MITQ)   TSUTAHARA K,  YAMAGUCHI T,  EJIMA T,  MINAMI T,  KAWATA Y;  DE10103341-A1   MATSUSHITA ELECTRIC IND CO LTD (MATU)   HAJI H,  ARITA K;  EP1524215-A1   APPLIED FILMS GMBH & CO KG (APFM)   LINDENBERG R,  FUCHS F,  SCHUESSLER U,  BANGERT S,  STOLLEY T;  EP1746182-A2   APPLIED MATERIALS INC (MATE-Non-standard)   TAKEHARA T,  SUN S,  WHITE J M;  JP02141568-A   ;  JP10121237-A   SONY CORP (SONY)   NOBE Y;  JP2000177842-A   MITSUBISHI JUKOGYO KK (MITO)   SASAGAWA E,  KANZAKI J,  UENO M,  KONDOU T,  NISHIMURA T;  US20020078892-A1   ;  US20040102025-A1   ;  US20040149389-A1   ;  US20060096857-A1   ;  US20060218680-A1   ;  US6241857-B1   NEC CORP (NIDE)   YAMADA Y;  US6818560-B1   TOKYO ELECTRON LTD (TKEL)   KOSHIMIZU C,  NAGAHATA K;  EP2147452-B1 -- DE2653736-A   BOSCH GMBH ROBERT (BOSC)   ADAM H,  KELLER M,  KRUGER G;  DE4330266-A1   MITSUBISHI DENKI KK (MITQ)   TSUTAHARA K,  YAMAGUCHI T,  EJIMA T,  MINAMI T,  KAWATA Y;  DE10103341-A1   MATSUSHITA ELECTRIC IND CO LTD (MATU)   HAJI H,  ARITA K;  EP1524215-A1   APPLIED FILMS GMBH & CO KG (APFM)   LINDENBERG R,  FUCHS F,  SCHUESSLER U,  BANGERT S,  STOLLEY T;  EP1746182-A3   APPLIED MATERIALS INC (MATE-Non-standard)   TAKEHARA T,  SUN S,  WHITE J M;  JP02141568-A   ;  JP10121237-A   SONY CORP (SONY)   NOBE Y;  JP2000177842-A   MITSUBISHI JUKOGYO KK (MITO)   SASAGAWA E,  KANZAKI J,  UENO M,  KONDOU T,  NISHIMURA T;  US20020078892-A1   ;  US20040102025-A1   ;  US20040149389-A1   ;  US20060096857-A1   ;  US20060218680-A1   ;  US6241857-B1   NEC CORP (NIDE)   YAMADA Y;  US6818560-B1   TOKYO ELECTRON LTD (TKEL)   KOSHIMIZU C,  NAGAHATA K;  JP5243525-B2 -- JP02294018-A   ;  JP78124968-A   ;  JP89173710-A   ;  JP97316642-A   ;  JP99124675-A   ;  JP2004158781-A   ;  JP2006352010-A   NISSIN ION EQUIP CO LTD (NISS-Non-standard)   ANDO Y,  ONODA M;  JP2007023380-A   APPLIED MATERIALS INC (MATE-Non-standard)   TAKEHARA T,  SUN S,  WHITE J M;  JP91085466-U   ;  JP97502792-W   ;  KR1284961-B1 -- JP2007023380-A   APPLIED MATERIALS INC (MATE-Non-standard)   TAKEHARA T,  SUN S,  WHITE J M;  JP2580663-B2   ;  US6818560-B1   TOKYO ELECTRON LTD (TKEL)   KOSHIMIZU C,  NAGAHATA K;  CN101743610-B -- DE10103341-A1   MATSUSHITA ELECTRIC IND CO LTD (MATU)   HAJI H,  ARITA K;  JP10121237-A   SONY CORP (SONY)   NOBE Y