WO2008011061-A1  RYAN D M ET AL: "Microscopic batteries for micro electromechanical systems (MEMS)" IECEC '97. PROCEEDINGS OF THE 32ND INTERSOCIETY ENERGY CONVERSION ENGINEERING CONFERENCE. ENERGY SYSTEMS, RENEWABLE ENERGY RESOURCES, ENVIRONMENTAL IMPACT AND POLICY IMPACTS ON ENERGY. HONOLULU, HI, JULY 27 - AUG. 1, 1997, INTERSOCIETY ENERGY CONVERS, vol. VOL. 3 & 4, 27 July 1997 (1997-07-27), pages 77-82, XP010269012 ISBN: 0-7803-4515-0;  RYAN D M ET AL: "Microscopic batteries for micro electromechanical systems (MEMS)" IECEC '97. PROCEEDINGS OF THE 32ND INTERSOCIETY ENERGY CONVERSION ENGINEERING CONFERENCE. ENERGY SYSTEMS, RENEWABLE ENERGY RESOURCES, ENVIRONMENTAL IMPACT AND POLICY IMPACTS ON ENERGY. HONOLULU, HI, JULY 27 - AUG. 1, 1997, INTERSOCIETY ENERGY CONVERS, vol. VOL. 3&4, 27 July 1997 (1997-07-27), pages 77-82, XP010269012 ISBN: 0-7803-4515-0US2008032236-A1  AZ 5214 E Image Reversal Photoresist product data sheetEP2434567-A2  RYAN D M ET AL: "Microscopic batteries for micro electromechanical systems (MEMS)", IECEC '97. PROCEEDINGS OF THE 32ND INTERSOCIETY ENERGY CONVERSION ENGINEERING CONFERENCE. ENERGY SYSTEMS, RENEWABLE ENERGY RESOURCES, ENVIRONMENTAL IMPACT AND POLICY IMPACTS ON ENERGY. HONOLULU, HI, JULY 27 - AUG. 1, 1997, INTERSOCIETY ENERGY CONVERS, vol. VOL. 3&4, 27 July 1997 (1997-07-27) , pages 77-82, XP010269012, ISBN: 0-7803-4515-0EP2434567-A3  RYAN D M ET AL: "Microscopic batteries for micro electromechanical systems (MEMS)", IECEC '97. PROCEEDINGS OF THE 32ND INTERSOCIETY ENERGY CONVERSION ENGINEERING CONFERENCE. ENERGY SYSTEMS, RENEWABLE ENERGY RESOURCES, ENVIRONMENTAL IMPACT AND POLICY IMPACTS ON ENERGY. HONOLULU, HI, JULY 27 - AUG. 1, 1997, INTERSOCIETY ENERGY CONVERS, vol. VOL. 3 & 4, 27 July 1997 (1997-07-27), pages 77 - 82, XP010269012, ISBN: 0-7803-4515-0;  RYAN D M ET AL: "Microscopic batteries for micro electromechanical systems (MEMS)", IECEC '97. PROCEEDINGS OF THE 32ND INTERSOCIETY ENERGY CONVERSION ENGINEERING CONFERENCE. ENERGY SYSTEMS, RENEWABLE ENERGY RESOURCES, ENVIRONMENTAL IMPACT AND POLICY IMPACTS ON ENERGY. HONOLULU, HI, JULY 27 - AUG. 1, 1997, INTERSOCIETY ENERGY CONVERS, vol. VOL. 3 & 4, 27 July 1997 (1997-07-27), pages 77 - 82, XP010269012, ISBN: 0-7803-4515-0,relevantClaims[1-8],relevantPassages[&lt;pp&gt;77&lt;/pp&gt;&lt;line&gt;1-4&lt;/line&gt;]