NOVELTY - The single crystal silicon particle (101) is provided with a silicon oxynitride film on the surface. The silicon oxynitride film has a larger nitrogen concentration on the inner surface than on the outer surface.    USE - Single crystal silicon particle for photoelectric conversion apparatus, e.g., solar cell.    ADVANTAGE - Silicon oxynitride film has larger nitrogen concentration on inner surface that contacts silicon part comprising core of single crystal silicon particle, thus impurities, e.g., heavy metal elements from outside do not easily penetrate silicon part which improves quality. Silicon oxynitride film can be efficiently formed on surface of single crystal silicon particle. Unification of crystalline silicon particles is effectively suppressed when putting in order and single-crystallizing crystal silicon particles, thus preventing cracks on contact surface of crystal silicon particles and achieving high crystal quality. Crystal silicon particle has silicon nitride film having network structure in surface layer part, thus achieving sufficient flexibility to maintain shape of crystal silicon particle with respect to volume change during melt-solidification of silicon inside crystal silicon particle. Silicon nitride film has large diffusion restraining force that suppresses diffusion of contaminant and impurities in silicon inside crystal silicon particle, thus reducing contamination by diffusion of heavy metal elements such as iron and producing crystal silicon particles having high crystal quality. Crystal silicon particles can be manufactured inexpensively and with sufficient mass productivity, thus enabling efficient manufacture. Crystal silicon particles can single-crystallize easily without using seed crystal.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a single crystal silicon particle manufacturing method.    DESCRIPTION OF DRAWING(S) - The drawing shows sectional views of crystal silicon particles in each manufacturing process.    Crystal silicon particle (101)    Lower side rotation surface plate (201)    Upper side rotation surface plate (202)    Loose abrasive (203)    Base plate (301)