TECHNOLOGY FOCUS - IMAGING AND COMMUNICATION - Preferred Process: The method of using siloxane prepolymer composition in a lithographic method, comprises: patterning the material compositions by direct lithographic patterning, by conventional lithographic masking and etching procedure, or by imprinting and embossing.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: The solvent is a solvent capable of reacting with the siloxane prepolymer. The solvent is water, aliphatic alcohols, aliphatic ethers, and/or aromatic alcohols (preferably propylene glycol monomethylether, propylene glycol propyl ether, 2-propanol, water, ethanol, methanol and/or ethyl lactate). The photo reactive compound is a photo acid generator or photo initiator. The photo reactive compound is capable of cross-linking the siloxane composition subject to treatment with ultraviolet light or thermally. The concentration of the photo reactive compound is 0.1-10%, preferably 0.5-5%, calculated from the mass of (II). The nanoparticles are light scattering pigments or inorganic phosphors. The aqueous base developer solution has a pH of at least 7, preferably 12-13. Preferred Process: The hydrolysis step is carried out in an aqueous solvent.    TECHNOLOGY FOCUS - POLYMERS - Preferred Components: (II) has an average molecular weight of 500-20000 g/mol, preferably 1000-10000 g/mol. The organosiloxane polymer contains at least 1 mole%, preferably at least 5 mole% units derived from monomers comprising at least one group, which is capable of being deprotonated. Preferred Composition: (I) comprises a siloxane prepolymer in a solvent phase, where: the prepolymer has a siloxane backbone formed by repeating silicon oxide (-Si-O-) units and has a molecular weight of 1000-10000 g/mol; and the siloxane backbone exhibits hydroxyl groups of 5-70% of the -Si-O- units and further exhibits epoxy groups of 1-15 mole%, calculated from the amount of repeating units. (I) further comprises 0.1-3 wt.%, based on the weight of the solid matter, and at least one cationic photo reactive compound. (I) has a solid concentration of at least 1 wt.% and up to 70 wt.%. (I) contains a thermo acid generator as an additive. (I) comprises solid nanoparticles (5-50 wt.%). EXAMPLE - Methyltriethoxysilane (1440 g) and 3-glysidoxypropyltrimethoxysilane (211.84 g) were weighed to a flask. Acetone (3303.68 g) was added to the flask. Water (969.28 g) (0.01 M nitric acid) was added to the flask and stirred. The reaction mixture was refluxed for 5 hours using electric mantel. After the refluxing, most of the acetone was removed from the reaction mixture. Propylene glycol monomethylether acetate (250 g) was added to the flask. The reaction mixture was evaporated. The solution was refluxed at 120 degrees C for 1 hour. The material was ready for use after formulation (addition of solvents and additives) and filtration. The material was formulated to certain solid content depending on the film thickness requirements, and filtered. The solution was ready for use for processing in a lithographic process.