NOVELTY - The method for the reduction of process gas consumption in chemical gas phase deposition of silicon containing layer, which emerges primary hydrogen as reaction product for thin film solar module, comprises selectively removing hydrogen from a system for chemical gas phase deposition. The process gas that is not yet reacted remains in the system and is recirculated from the gas outlet of process chamber (24) to gas inlet (8) of the process chamber. The hydrogen is removed from the system by a hydrogen permeable membrane (31).    USE - The method for the reduction of process gas consumption in chemical gas phase deposition of silicon containing layer for solar module.    ADVANTAGE - The method ensures economical production of the solar cell with high quality and high standard by reduced consumption of thin film solar module (claimed).    DETAILED DESCRIPTION - The method for the reduction of process gas consumption in chemical gas phase deposition of silicon containing layer, which emerges primary hydrogen as reaction product for thin film solar module, comprises selectively removing hydrogen from a system for chemical gas phase deposition. The process gas that is not yet reacted remains in the system and is recirculated from the gas outlet of process chamber (24) to gas inlet of the process chamber. The hydrogen is removed from the system by a hydrogen permeable membrane (31), which is present in gas pipeline system behind the gas outlet of the process chamber. The system for chemical gas deposition is a system by which low pressure is present in the process chamber (low pressure chemical vapor deposition) and is a deposition system reinforcing plasma (plasma enhanced chemical vapor deposition).    DESCRIPTION OF DRAWING(S) - The figure shows a construction of chemical vapor deposition system in which the process gas is circulated.    Inlet for process gas (1)    Gas inlet for recirculation of process gas (8)    Process chamber (24)    Hydrogen permeable membrane in the area of exhaust gas system (31)    Stop valve in recirculation direction. (38)