;  WO2009082753-A2 -- JP08236294-A   ;  JP2002260899-A   NIPPON KOSHUHA STEEL CO LTD (NPPK)   KANDA M;  US5272417-A   OHMI T (OHMI-Individual);  OMI T (OMIT-Individual);  OOMI T (OOMI-Individual)   OHMI T;  US6620290-B2   SHARP KK (SHAF);  OHMI T (OHMI-Individual)   YAMAMOTO T,  OKAMOTO M,  HIRAYAMA M,  OMI T;  WO2009082753-A3 -- JP08236294-A   ;  JP2002260899-A   NIPPON KOSHUHA STEEL CO LTD (NPPK)   KANDA M;  US5272417-A   OHMI T (OHMI-Individual);  OMI T (OMIT-Individual);  OOMI T (OOMI-Individual)   OHMI T;  US6620290-B2   SHARP KK (SHAF);  OHMI T (OHMI-Individual)   YAMAMOTO T,  OKAMOTO M,  HIRAYAMA M,  OMI T;  EP2232958-A2 -- EP961307-A2   MITSUBISHI HEAVY IND CO LTD (MITO)   MURATA M,  TAKEUCHI Y;  EP1134773-A2   MITSUBISHI HEAVY IND CO LTD (MITO)   YAMAKOSHI H,  SATAKE K,  TAKEUCHI Y,  MASHIMA H,  AOI T,  MURATA M;  US20030137251-A1   ;  US20040194709-A1   ;  US20050183827-A1   ;  US6857387-B1   APPLIED MATERIALS INC (MATE-Non-standard);  KR1166988-B1 -- JP08236294-A   ;  US8343592-B2 -- DE4242894-A1   LEYBOLD AG (LEYB)   BRUCH J,  TESCHNER G;  EP961307-A2   MITSUBISHI HEAVY IND CO LTD (MITO)   MURATA M,  TAKEUCHI Y;  JP08236294-A   ;  JP2002260899-A   NIPPON KOSHUHA STEEL CO LTD (NPPK)   KANDA M;  US5252178-A   TEXAS INSTR INC (TEXI)   MOSLEHI M M;  US5272417-A   OHMI T (OHMI-Individual);  OMI T (OMIT-Individual);  OOMI T (OOMI-Individual)   OHMI T;  US5733511-A   BOC GROUP INC (BRTO)   FRANCESCO F D;  US5882411-A   APPLIED MATERIALS INC (MATE-Non-standard)   SCLAVER A,  ZOO;  US6079356-A   APPLIED MATERIALS INC (MATE-Non-standard)   UMOTOY S,  NGUYEN A N,  TRAN T T,  LEI L C L,  CHANG M;  US20010021422-A1   ;  US20020023899-A1   ;  US20030037881-A1   ;  US20030079983-A1   ;  US20040194709-A1   ;  US20050183827-A1   ;  US20060049138-A1   ;  US20060105114-A1   ;  US20080274297-A1   ;  US20090159423-A1   ;  US20090202741-A1   ;  US20110126405-A1   ;  US6228229-B1   APPLIED MATERIALS INC (MATE-Non-standard)   RAAJIMAKERS I,  STIMSON B O,  FORSTER J,  RAAIJMAKERS I;  US6254738-B1   APPLIED MATERIALS INC (MATE-Non-standard)   STIMSON B O,  SMYTH K,  GOPALRAJA P;  US6353201-B1   MITSUBISHI JUKOGYO KK (MITO)   YAMAKOSHI H,  YAMAGUCHI K,  MURATA M,  TAKEUCHI Y,  NAWATA Y,  SATAKE K,  KOKAJI S,  MORITA S,  KUDOME M,  HORIOKA R,  MASHIMA H;  US6359250-B1   APPLIED KOMATSU TECHNOLOGY INC (APMA);  BLONIGAN W T (BLON-Individual)   BLONIGAN W T,  SORENSEN C A;  US6477980-B1   APPLIED MATERIALS INC (MATE-Non-standard)   WHITE J M,  KELLER E,  BLONIGAN W T;  US6857387-B1   APPLIED MATERIALS INC (MATE-Non-standard);  US7153387-B1   TOKYO ELECTRON LTD (TKEL)   TOMOYASU M;  US6456010-B2   MITSUBISHI HEAVY IND CO LTD (MITO)   YAMAKOSHI H,  SATAKE K,  TAKEUCHI Y,  MASHIMA H,  AOI T,  MURATA M;  US6552297-B2   APPLIED KOMATSU TECHNOLOGY INC (APMA);  BLONIGAN W T (BLON-Individual)   BLONIGAN W T,  SORENSEN C A;  US6620290-B2   SHARP KK (SHAF);  OHMI T (OHMI-Individual)   YAMAMOTO T,  OKAMOTO M,  HIRAYAMA M,  OMI T;  US6824658-B2   ;  US6827815-B2   HYTROS M M (HYTR-Individual);  TRAN T T (TRAN-Individual);  TEOH H (TEOH-Individual);  LEI L C (LEIL-Individual);  GELATOS A (GELA-Individual);  UMOTOY S P (UMOT-Individual)   HYTROS M M,  TRAN T T,  TEOH H,  LEI L C,  GELATOS A,  UMOTOY S P;  US6863020-B2   TOKYO ELECTRON LTD (TKEL)   MITROVIC A S,  JOHNSON W L;  US6884635-B2   TOKYO ELECTRON LTD (TKEL)   PARSONS R;  US6916401-B2   TOKYO ELECTRON LTD (TKEL)   LONG M;  US7141516-B2   MITSUBISHI HEAVY IND CO LTD (MITO)   KAWAMURA K,  YAMADA A,  MASHIMA H,  TAKEUCHI Y;  US7164236-B2   TOKYO ELECTRON LTD (TKEL)   MITROVIC A S,  STRANG E J,  SIRKIS M D,  QUON B H,  PARSONS R,  TSUKAMOTO Y;  US7205034-B2   MITSUBISHI HEAVY IND CO LTD (MITO)   KAWAMURA K,  TAKANO A,  MASHIMA H,  TAKATUKA H,  YAMAUTI Y,  TAKEUCHI Y,  SASAKAWA E;  US7270713-B2   APPLIED MATERIALS INC (MATE-Non-standard)   BLONIGAN W T,  WHITE J M,  BAGLEY W A;  CN101911840-B -- CN1319683-A   SHARP KK (SHAF);  OHMI T (OHMI-Individual)   YAMAMOTO T,  OKAMOTO M,  HIRAYAMA M,  OMI T;  CN1655660-A   LEE J (LEEJ-Individual)   LEE J;  EP961307-A2   MITSUBISHI HEAVY IND CO LTD (MITO)   MURATA M,  TAKEUCHI Y;  JP82036294-A   ;  US20040194709-A1   ;  JP5524076-B2 -- JP2003524895-A   TOKYO ELECTRON LTD (TKEL)   LONG M,  PARSONS R,  JOHNSON W L;  JP2006040810-A   ;  US20070221128-A1