TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Compound: 9 Silicone derivatives (I) are given in the specification e.g. a compound of formula Xq-M1(O-Si(R1)(R5)-O-Si(R2)(R6)-R4)n (Ia) or O=M(=O)-(O-Si(R1a)(R5a)-O-Si(R3a)(R7a)-R4a)n-4 (Ib).R1a,R3a,R4a,R5a,R7a=H or methyl.Preferred Method: In the method, a Lewis base is coordinated to M1 of the compound (I). In the method, several compounds (I) are hydrolyzed. The several compounds (I) is a mixture. The method additionally involves coating a substrate with the compound before hydrolyzing. The hydrolyzing the compound step involves heating the compound at 100-200 degrees C. Preferred Definitions:    m,p=0;    M1=Al, Ga, Sc, Y, Ti, V, Zn, Cd, In, Sb or Sn;    R1-R7=H or methyl.    SPECIFIC COMPOUNDS - 6 Compounds are specified as the compound (I) e.g. Ti(OSi(CH3)2OSi(CH3)3)4; Al(OSi(CH3)2OSi(CH3)3)3; VO(OSi(CH3)2OSi(CH3)3)3; Zn(OSi(CH3)2OSi(CH3)3)2; and Sn(OSi(CH3)2OSi(CH3)3)4.    EXAMPLE - Freshly distilled titanium isopropoxide (9 g) was mixed with dry cyclohexane (250 ml) in a 500-ml three-neck round bottom flask equipped with a thermometer, addition funnel, magnetic stirring and a Liebig condenser attached to argon-vacuum line. The mixture was heated to 55-60 degrees C, and acetoxypentamethyldisiloxane (26.5 g) in dry cyclohexane (50 ml) were added dropwise during 1 hour under vigorous stirring. The mixture was heated to 55-60 degrees C for additional 2 hours and was cool down to room temperature. Volatiles were removed under reduced pressure. After workup, Ti(OSi(CH3)2OSi(CH3)3)4 (A1) was obtained. Transparent Oxide-Coated Substrate was prepared as follows: A 4-inch silicon wafer was spin-coated with solution of (A1) (5 wt.%) in hexane at 2 krpm/30 second. The wafer was placed into a 150 degrees C oven for 1 hour. Refractive index of the resulted coating measured with an ellipsometer was 1.721 at 30 nanometers thickness. After an additional 6 hours treatment at 150 degrees C, the refractive index of the resultant coating 1.782 at 30 nm thickness. After additional treatment for 6 hours at 450 degrees C, the refractive index of the resultant coating was 2.122 at 27 nm thickness.