NOVELTY - A textured zinc oxide coating is sputtered onto substrate (12) by establishing reaction chamber pressure at 80-400 mTorr; establishing substrate temperature greater than 170 degrees C; flowing gas through a channel of a sputter reactor; generating plasma, in which material is sputtered off a channel-defining surface to form a zinc-containing gaseous mixture containing target atoms that are transported to the substrate; and introducing reactive oxygen containing gas into the sputter reactor.    USE - Method for sputtering textured zinc oxide coating onto substrate for solar cell.    ADVANTAGE - The method allows fore direct deposition of textured zinc oxide without the need for post-deposition etching. The utilization of reactive-environment hollow cathode sputtering allows the use of linear sources that can be scaled for large coating widths. The method is reliable, uses low cost metal targets (no need for expensive ceramic targets), and does not require high vacuum pumps.    DETAILED DESCRIPTION - Sputtering textured zinc oxide coating onto substrate (12) using sputter reactor having cathode channel that allows gas stream to flow to a reaction chamber and having a flow exit end, the cathode channel being defined by a channel defining surface having containing target, involves:    (A) establishing reaction chamber pressure at 80-400 mTorr;    (B) establishing substrate temperature greater than 170 degrees C;    (C) flowing gas through the channel;    (D) generating plasma, in which material is sputtered off the channel-defining surface to form a zinc-containing gaseous mixture containing target atoms that are transported to the substrate; and    (E) introducing reactive oxygen containing gas into the sputter reactor, the reactive gas reacting with the zinc-containing gaseous mixture to form the textured zinc oxide coating scattering greater than or equal to 1% of visible light incident.    DESCRIPTION OF DRAWING(S) - The drawing is a schematic view showing the incorporation of zinc oxide layer in a photovoltaic device.    Photovoltaic device (10)    Substrate (12)    Zinc oxide layer (14)    Photovoltaic active layers (16)    Reflective rear electrode (20)