NOVELTY - A solar cell forming system comprises cluster tool(s) having processing chamber(s) adapted to deposit a silicon-containing layer on a surface of a first substrate; a first scribing device adapted to remove a portion of the silicon-containing layer from the surface of the first substrate; and a test module adapted to characterize the output of process(es) performed in the system.    USE - A solar cell forming system.    ADVANTAGE - The system is fully automated; and reduces and/or removes the need for human interaction and/or labor intensive processing steps thus improving device reliability, process repeatability, and solar cell formation process cost of ownership.    DETAILED DESCRIPTION - A solar cell forming system comprises cluster tool(s) having processing chamber(s) adapted to deposit a silicon-containing layer on a surface of a first substrate; a first scribing device adapted to remove a portion of the silicon-containing layer from the surface of the first substrate; and a test module adapted to characterize the output of process(es) performed in the system. The test module comprises a substrate support; a measurement device in electrical communication with at least two contact pins which are oriented to contact at least two point on the surface of the first substrate that is disposed on the substrate support; a vision system positioned to view the surface of the first substrate; and an actuator adapted to position the first substrate disposed on the substrate support relative to the two or more contact pins. INDEPENDENT CLAIMS are included for:    (1) a method of forming solar cell devices on a large area substrate;    (2) a method of processing a solar cell substrate;    (3) an automated integrated solar cell production line;    (4) an automated and integrated system for forming a solar cell; and    (5) a method of processing a solar cell substrate in an automated and integrated solar cell production system.    DESCRIPTION OF DRAWING(S) - The drawing is a plan view of a solar cell production line.    Scribe module (208)    Accumulator (211)    Processing module (212)    Automation device (281)    System controller (290)