NOVELTY - The method for deposition of diamond-like carbon (DLC) films on a surface of photovoltaic solar cells using plasma ions, comprises varying ion kinetic energy, plasma discharge current and spatial distribution of plasma density by controlling an electric field with a system of annular electrodes having a diaphragm, a neutralizer and an accelerating electrode, mounting a substrate (9) on a support device (10), and rotating the support device about an axis in a vacuum chamber (4). The control of uniformity plasma density is performed by measurement of ion current density at surface of the film.    USE - The method is useful for deposition of diamond-like carbon films on a surface of photovoltaic solar cells using plasma ions for encapsulation of surface of the films to protect against chemical, mechanical and radiation damage.    ADVANTAGE - The method is capable of simply, uniformly and reliably depositing the diamond-like carbon films on the surface of photovoltaic solar cells thus providing high stability to the encapsulants to protect against chemical, mechanical and radiation damage.    DETAILED DESCRIPTION - The method for deposition of diamond-like carbon (DLC) films on a surface of photovoltaic solar cells using plasma ions, comprises varying ion kinetic energy, plasma discharge current and spatial distribution of plasma density by controlling an electric field with a system of annular electrodes having a diaphragm, a neutralizer and an accelerating electrode, mounting a substrate (9) on a support device (10), and rotating the support device about an axis in a vacuum chamber (4). The control of uniformity plasma density is performed by measurement of ion current density at the surface of the film. The manufacturing of DLC films with refractive index of 1.48-2.60 is performed by variation of average kinetic energy of ions (20-140 ev), plasma current density (0.2-0.8 mA.cm-2) and hydrocarbon content in the feed gas mixture (2-40%). The manufacturing of multilayer DLC films with discrete or continuous values of refractive index along a direction normal to the surface of the cells is performed by either discrete or continuous variation of ion energy, plasma current, and feed gas mixture composition. An INDEPENDENT CLAIM is included for a deposition apparatus.    DESCRIPTION OF DRAWING(S) - The diagram shows an apparatus for depositing diamond-like carbon films.    Anode (1)    Cathode (2)    Magnet (3)    Vacuum chamber (4)    Substrate (10) Support device. (9)