NOVELTY - A vapor deposition material (21) and trigger electrode (23) are arranged at outer peripheral portion of insulation structure (22). An anode electrode (24) of arc deposition source is arranged concentrically around trigger electrode. A carbon-type material layer (C) is formed in substrate (W) located in chamber (10). The fine particles of deposition material are generated by discharge control between material and anode electrode. The electrons supplied to substrate surface from source (40), are synchronized with discharge control between material and anode electrode.    USE - Method for manufacturing catalyst material e.g. cobalt nanoparticle and platinum nanoparticle for polymer electrolyte fuel cell and methanol fuel cell, and for forming catalyst layer of carbon nanotube.    ADVANTAGE - Since the electrons supplied from the electron supply source are synchronized with the discharge control between the vapor deposition material and anode electrode, the charging-up of the substrate face can be neutralized reliably, and catalyst material can be manufactured effectively. The simplification of the vacuum arc vapor deposition apparatus can be attained efficiently.    DETAILED DESCRIPTION - The vapor deposition material is made of platinum or platinum alloy. An INDEPENDENT CLAIM is included for vacuum arc vapor deposition apparatus (1) has a trigger power supply (26) that is connected between vapor deposition material and trigger electrode. An arc power supply (27) is connected between vapor deposition material and anode electrode. A power supply unit (25) has a capacitor unit (28) that is connected in parallel with the arc power supply. A control unit (50) synchronizes and drives the power supply unit and electron supply source.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic block diagram of the vacuum arc vapor deposition apparatus. (Drawing includes non-English language text)    Vacuum arc vapor deposition apparatus (1)    Vacuum chamber (10)    Vapor deposition material (21)    Insulation structure (22)    Trigger electrode (23)    Anode electrode (24)    Power supply unit (25)    Trigger power supply (26)    Arc power supply (27)    Capacitor unit (28)    Electron supply source (40)    Control unit (50)    Carbon-type material layer (C)    Substrate (W)