NOVELTY - A sputtering system or deposition system for use with a substrate (18) comprises a sputtering chamber (10); at least one magnetron (12) disposed in the chamber; at least one cooling device positioned along the path of the substrate to come into physical contact with the substrate; and at least one emissivity-based heat sink located within the chamber for drawing heat away from the substrate. The cooling device is located outside the sputtering chamber or is located inside the sputtering chamber.    USE - As sputtering system for use with a substrate (claimed); for roll-to-roll, in line processing equipments; in solar cells; and in batch manufacturing processes.    ADVANTAGE - The sputtering system is an improved sputtering system that can be used for substrate that degrades at normal sputtering temperatures.    DETAILED DESCRIPTION - A sputtering system or deposition system for use with a substrate (18) comprises a sputtering chamber (10); at least one magnetron (12) disposed in the chamber; at least one cooling device positioned along the path of the substrate to come into physical contact with the substrate; and at least one emissivity-based heat sink located within the chamber for drawing heat away from the substrate. The cooling device is located outside the sputtering chamber or is located inside the sputtering chamber. The cooling device comprises of a chilled roller with a pliable coating on the roller. The cooling device cools by way of conduction. The system further comprises a tensioner positioned to pull the substrate against the cooling device for improved surface contact or a tensioner positioned to push the substrate against the cooling device for improved surface contact; and several cooling devices positioned along the path of the substrate. The system further comprises at least a second sputtering chamber arranged to receive the substrate.    DESCRIPTION OF DRAWING(S) - The figure shows side view of a sputtering chamber.    Sputtering chamber (10)    Magnetron (12)    Target (14)    Substrate (18)    Emissivity based cooling element (20)