WO2009142016-A1 -- JP11131244-A   CANON KK (CANO)   TAKAGI S,  TERANISHI K,  YAMAGAMI A;  JP11185996-A   MATSUSHITA DENKI SANGYO KK (MATU)   OKUMURA T,  KIMURA T,  MIHASHI A,  WATANABE A;  JP2003147534-A   MATSUDA R (MATS-Individual);  YAHATA N (YAHA-Individual);  SAKAMOTO H (SAKA-Individual)   MATSUDA R,  YAHATA N,  SAKAMOTO H;  JP2005079416-A   HITACHI LTD (HITA);  HITACHI HIGH TECHNOLOGIES CORP (HTTE)   MAEDA K,  YOKOGAWA K,  YOSHIDA T;  JP2005285564-A   MITSUI ENG & SHIPBUILDING CO LTD (MITB)   MORI Y,  TACHIBANA H,  KONISHI M,  MISUMI S;  JP10510095-T   LAM RES CORP (LRES)   DIBLE R D;  JP10510095-W   LAM RES CORP (LRES)   DIBLE R D;  US8917022-B2 -- DE69630589-T2   LAM RES CORP (LRES)   DIBLE R D;  EP1313127-A1   MATSUDA R (MATS-Individual);  YAHATA N (YAHA-Individual);  SAKAMOTO H (SAKA-Individual)   MATSUDA R,  YAHATA N,  SAKAMOTO H;  EP1727186-A1   NEW POWER PLASMA CO LTD (NEWP-Non-standard)   CHOI D,  WI S;  EP929093-A2   LAM RES CORP (LRES)   BARNES M,  BENJAMIN N,  HOLLAND J,  BEER R,  VELTROP R;  EP2051282-A2   MATSUDA R (MATS-Individual);  YAHATA N (YAHA-Individual);  SAKAMOTO H (SAKA-Individual)   MATSUDA R,  YAHATA N,  SAKAMOTO H;  JP04362091-A   ;  JP08138888-A   ;  JP08306500-A   ;  JP09069399-A   ;  JP09111460-A   ;  JP09266174-A   ;  JP10064697-A   NICHIDEN ANELVA KK (NICV)   TAKAGI K;  JP10189293-A   ;  JP11131244-A   CANON KK (CANO)   TAKAGI S,  TERANISHI K,  YAMAGAMI A;  JP11185996-A   MATSUSHITA DENKI SANGYO KK (MATU)   OKUMURA T,  KIMURA T,  MIHASHI A,  WATANABE A;  JP11233289-A   UNIV NAGOYA (UNAY);  TOSHIBA KK (TOKE)   SUGAI H,  SUZUKI H,  TONOTANI J;  JP11260596-A   HITACHI LTD (HITA)   OTSUBO T,  TANAKA J,  SASAKI I,  MASUDA T,  KAJI T,  WATANABE K;  JP2000164578-A   ;  JP2001035697-A   KAGAKU GIJUTSU SHINKO JIGYODAN (JSTA)   MIYAKE M,  SHIYOUJI T,  SETSUHARA Y;  JP2003147534-A   MATSUDA R (MATS-Individual);  YAHATA N (YAHA-Individual);  SAKAMOTO H (SAKA-Individual)   MATSUDA R,  YAHATA N,  SAKAMOTO H;  JP2003249452-A   ;  JP2005079416-A   HITACHI LTD (HITA);  HITACHI HIGH TECHNOLOGIES CORP (HTTE)   MAEDA K,  YOKOGAWA K,  YOSHIDA T;  JP2005285564-A   MITSUI ENG & SHIPBUILDING CO LTD (MITB)   MORI Y,  TACHIBANA H,  KONISHI M,  MISUMI S;  JP2006185921-A   SAMSUNG ELECTRONICS CO LTD (SMSU)   CHOE H,  KIM S,  OH M,  CHIN H;  JP10510095-W   LAM RES CORP (LRES)   DIBLE R D;  KR2003040131-A   MATSUDA R (MATS-Individual);  YAHATA N (YAHA-Individual);  SAKAMOTO H (SAKA-Individual)   MATSUDA R,  YAHATA N,  SAKAMOTO H;  TW200504815-A   KWON G (KWON-Individual);  CHANG H (CHAN-Individual);  LEE Y (LEEY-Individual)   KWON G,  CHANG H,  LEE Y;  US5573595-A   LAM RES CORP (LRES)   DIBLE R D;  US5846883-A   CVC PROD INC (CVCC-Non-standard)   MOSLEHI M M;  US6043608-A   NEC CORP (NIDE);  NICHIDEN ANELVA KK (NICV);  NIPPON KOSHUHA STEEL CO LTD (NPPK)   SAGAWA S,  NAKAGAWA K,  SATO H,  TSUKADA T,  SHINOHARA K,  NIIMURA Y;  US6152071-A   CANON KK (CANO)   TAKAGI S,  TERANISHI K,  YAMAGAMI A;  US6155199-A   LAM RES CORP (LRES)   CHEN J J,  VELTROP R G,  WICKER T E;  US6164241-A   LAM RES CORP (LRES)   CHEN J J,  VELTROP R G,  WICKER T E;  US20030089315-A1   ;  US20060110535-A1   ;  US20080050537-A1   ;  US20110133650-A1   ;  US20130043128-A1   ;  US6244211-B1   MITSUBISHI ELECTRIC CORP (MITQ)   NISHIKAWA K,  OMORI T,  ODERA H;  US6245202-B1   HITACHI LTD (HITA)   EDAMURA M,  NISHIO R,  YOSHIOKA K,  KANAI S;  US7098599-B2   KAGAKU GIJUTSU SHINKO JIGYODAN (JSTA)   MIYAKE M,  SHIYOUJI T,  SETSUHARA Y;  US7442273-B2   KWON G (KWON-Individual);  CHANG H (CHAN-Individual);  LEE Y (LEEY-Individual)   KWON G,  CHANG H,  LEE Y;  US7567037-B2   JAPAN SCI&TECHNOLOGY AGENCY (JSTA)   SETSUHARA Y,  SHOJI T,  KAMAI M;  US7605008-B2   CHUA T C (CHUA-Individual);  CRUSE J P (CRUS-Individual);  CZARNIK C (CZAR-Individual)   CHUA T C,  CRUSE J P,  CZARNIK C;  US7845310-B2   DIVERGILIO W F (DIVE-Individual);  SRIVASTAVA A K (SRIV-Individual)   DIVERGILIO W F,  SRIVASTAVA A K;  WO1997012502-A1   ;  JP5747231-B2 -- JP92362091-A   ;  JP96306500-A   ;  JP97069399-A   ;  JP97111460-A   ;  JP98064697-A   ;  JP98189293-A   ;  JP99131244-A   ;  JP99185996-A   ;  JP99260596-A   ;  JP2000164578-A   ;  JP2003147534-A   MATSUDA R (MATS-Individual);  YAHATA N (YAHA-Individual);  SAKAMOTO H (SAKA-Individual)   MATSUDA R,  YAHATA N,  SAKAMOTO H;  JP2003249452-A   ;  JP2005079416-A   HITACHI LTD (HITA);  HITACHI HIGH TECHNOLOGIES CORP (HTTE)   MAEDA K,  YOKOGAWA K,  YOSHIDA T;  JP2005285564-A   MITSUI ENG & SHIPBUILDING CO LTD (MITB)   MORI Y,  TACHIBANA H,  KONISHI M,  MISUMI S;  JP2006185921-A   SAMSUNG ELECTRONICS CO LTD (SMSU)   CHOE H,  KIM S,  OH M,  CHIN H;  JP98510095-W   ;  CN102027811-B -- JP11185996-A   MATSUSHITA DENKI SANGYO KK (MATU)   OKUMURA T,  KIMURA T,  MIHASHI A,  WATANABE A;  JP2005079416-A   HITACHI LTD (HITA);  HITACHI HIGH TECHNOLOGIES CORP (HTTE)   MAEDA K,  YOKOGAWA K,  YOSHIDA T;  JP2005285564-A   MITSUI ENG & SHIPBUILDING CO LTD (MITB)   MORI Y,  TACHIBANA H,  KONISHI M,  MISUMI S;  US5573595-A   LAM RES CORP (LRES)   DIBLE R D;  US6152071-A   CANON KK (CANO)   TAKAGI S,  TERANISHI K,  YAMAGAMI A;  US20030089315-A1