NOVELTY - Two or more layers are deposited on a substrate (a) (102). Then, surface of chamber component disposed in processing chamber is passivated by depositing passivation layer. Two or more layers are deposited on substrate (b) by forming intrinsic type layer on surface in the processing chamber, and forming doped layer (a) on intrinsic layer. The surface of chamber component is subjected to seasoning by removing amount of material from chamber component, and depositing seasoning layer comprising silicon on surface of chamber component. Thus, solar cell (100) is formed.    USE - Method for forming solar cell.    ADVANTAGE - The method provides solar cell without releasing contaminants.    DETAILED DESCRIPTION - Two or more layers are deposited on a substrate (a), by forming intrinsic type layer on surface of substrate (a) in processing chamber, and forming doped layer (i) on intrinsic layer. Then, surface of chamber component disposed in processing chamber is passivated by depositing passivation layer comprising silicon on surface. Two or more layers are deposited on substrate (b) by forming intrinsic type layer on surface in the processing chamber, and forming doped layer (a) on intrinsic layer. The surface of chamber component is subjected to seasoning by removing an amount of material from chamber component using cleaning gas, and depositing seasoning layer comprising silicon on surface of chamber component. Thus, solar cell is formed. The doped layer comprises a p-type silicon containing layer or an n-type silicon containing layer. The passivation layer comprises a p-type or an n-type amorphous silicon containing layer. The method further involves purging the processing region in chamber by forming hydrogen containing plasma in the processing region, and removing material disposed on surface of chamber component by exposing surface to reactive gas and generated plasma. The reactive gas comprises fluorine containing gas. The purging gas comprises hydrogen and argon.    DESCRIPTION OF DRAWING(S) - The drawing shows schematic view of multi-junction solar cell.    Solar cell (100)    Substrate (102)    Amorphous silicon layer (122)    Intrinsic type amorphous silicon layer (124)    Micro-crystalline silicon layer (132)