NOVELTY - A wire electrode structure (50) is manufactured by forming resistance film (40) on one surface side of substrate (10); laminating first, second and third electroconductive films on resistance film; forming first resist film on third electroconductive film; forming third electroconductive wiring layer (53a) and second electroconductive wiring layer (52a) by etching third and second electroconductive films; forming second resist film; and forming first electroconductive wiring layer (51a) by etching first electroconductive film.    USE - Manufacture of wire electrode structure for chemical reactor used for modifier of fuel cell system or generators.    ADVANTAGE - Manufactures wire electrode structure with comparatively low resistivity, and excellent surrounding bondability and adhesiveness.    DETAILED DESCRIPTION - A wire electrode structure (50) is manufactured by forming resistance film (40) with predetermined heat generation characteristic on one surface side of substrate (10); laminating first, second and third electroconductive films on resistance film respectively; forming first resist film with first pattern shape on third electroconductive film; forming third electroconductive wiring layer (53a) and second electroconductive wiring layer (52a) by etching third electroconductive film and second electroconductive film one by one; forming second resist film with second pattern shape having width that is wider than first pattern shape, and which covers upper surface and side of third and second electroconductive wiring layers; and forming first electroconductive wiring layer (51a) by etching first electroconductive film. The second electroconductive film comprises material with lower resistivity and higher linear expansion coefficient than electroconductive material of first electroconductive wiring layer. The third electroconductive film comprises material with lower linear expansion coefficient than electroconductive material of second electroconductive wiring layer.    DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the wire electrode structure.    Substrate (10)    Resistance film (40)    Wire electrode structure (50)    First electroconductive wiring layer (51a)    Second electroconductive wiring layer (52a)    Third electroconductive wiring layer (53a)