WO2009028084-A1 -- JP2004203741-A   ;  JP2006319192-A   ;  JP2006515708-A   DOW CORNING IRELAND LTD (DOWO)   SWALLOW F,  DOBBYN P;  JP2006515708-W   DOW CORNING IRELAND LTD (DOWO)   SWALLOW F,  DOBBYN P;  KR1174202-B1 -- JP2004115896-A   ;  JP2006319192-A   ;  DE112007003640-B4 -- DE69321409-T2   ;  JP10212106-A   ;  JP2003036996-A   KIKUCHI A (KIKU-Individual);  HORIIKE Y (HORI-Individual);  YOSHIKI H (YOSH-Individual)   HORIIKE Y,  YOSHIKI H;  JP3607905-B2   ;  US4693870-A   ;  WO1998019961-A2   ;  US8857371-B2 -- DE112006002127-A5   FRAUNHOFER GES FOERDERUNG ANGEWANDTEN EV (FRAU)   EICHLER M,  THOMAS M,  SCHLITTENHARDT E;  JP10212106-A   ;  JP2003036996-A   KIKUCHI A (KIKU-Individual);  HORIIKE Y (HORI-Individual);  YOSHIKI H (YOSH-Individual)   HORIIKE Y,  YOSHIKI H;  JP2003142482-A   ;  JP2004115896-A   ;  JP2004203741-A   ;  JP2005347679-A   RENESAS TECHNOLOGY CORP (RENE)   HAMAMURA H,  MINE T,  YOKOYAMA N;  JP2006319192-A   ;  JP2006515708-A   DOW CORNING IRELAND LTD (DOWO)   SWALLOW F,  DOBBYN P;  US4693870-A   ;  US5376212-A   TOKYO ELECTRON YAMANASHI LTD (TKEL)   SAIKI K;  US5538695-A   ;  US20020000202-A1   ;  US20030095899-A1   ;  US20040052701-A1   ;  US20040076560-A1   ;  US20050272198-A1   ;  US20050279458-A1   ;  US20060196424-A1   ;  US20070137569-A1   ;  US20090152097-A1   ;  US6664737-B1   AXCELIS TECHNOLOGIES INC (AXCE)   BERRY I,  JANOS A C,  COLSON M B;  US6670766-B2   MATSUSHITA ELECTRIC WORKS LTD (MATW)   YAMAZAKI K,  INOOKA Y,  SAWADA Y,  TAGUCHI N,  NAKAZONO Y,  NAKANO A;  US6919107-B2   TETRA PAK SUISSE SA (TETR)   SCHWARZENBACH W,  ROESSLER B,  FAYET P;  US7056416-B2   MATSUSHITA ELECTRIC IND CO LTD (MATU);  US7514377-B2   HITACHI KOKUSAI DENKI KK (KOKZ);  ADTEC PLASMA TECHNOLOGY CO LTD (ADTE-Non-standard);  SATO N (SATO-Individual);  MASE H (MASE-Individual);  FUJIWARA T (FUJI-Individual)   SATO N,  MASE H,  FUJIWARA T,  TANIGUCHI T,  FUJII S;  US7644680-B2   ;  US7662253-B2   YOON H A (YOON-Individual);  THIE W (THIE-Individual);  DORDI Y (DORD-Individual)   YOON H A,  THIE W,  DORDI Y;  WO1998019961-A2   ;  WO2007017271-A2   FRAUNHOFER GES FOERDERUNG ANGEWANDTEN EV (FRAU)   EICHLER M,  THOMAS M,  SCHLITTENHARDT E