TECHNOLOGY FOCUS - CERAMICS AND GLASS - Preferred Substrate: The substrate is selected from ceramic substrates, glass or glass substrates.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: The method uses chemical vapor deposition, atomic layer deposition or physical vapor deposition. The precursor is evaporated using film evaporation (e.g. using a spinning disc) or a membrane module, preferably a ceramic membrane module. The method involves depositing a layer having an average layer thickness of 0.01 nm to 3 mm (preferably 0.1 nm to 10 mu m, especially 0.1 nm to 100 nm, and particularly 0.1-10 nm). Preferred Components: The precursor material is selected from metals, metal-organic compounds, organo-metallic compounds, metal halides, metalloids, metalloid organic compounds, or metalloid halides. The precursor material comprises an inorganic metal salt or an inorganic metalloid salt, preferably a halide salt, in particular a chloride salt. The ionic liquid comprises the precursor material 0.1-70 (preferably 10-70; especially 40-70) mol.% based on the total weight of the ionic liquid. The ionic liquid comprises a salt selected from a salt formed of at least one of the anions selected from chloride, bromide, iodide, nitrate, nitrite, fluoride, phosphate, imide, amide, borate, tosylate, tetrafluoroborate, hexafluoroborate, hexafluorophosphate, trifluoromethanesulfonate, methylsulfate, bis(pentafluoroethyl) phosphinate, thiocynate, octylsulfate, hexylsulfate, butylsulfate, ethylsulfate, dicyanamide, hexafluoroantimonate, bis-(pentafluoroethyl)phospinate, bis-(trifluoromethyl) imide, trifluoroacetate, bis-trifluorosulfonimide or dicyanamide. Preferred Substrate: The substrate is selected from silicon-based substrates or metallic substrates (preferably silicon (Si), silicon dioxide (SiO2), stainless steel, and aluminum (Al)). Preferred Device: The apparatus for evaporating a compound comprising a first container for holding an electrolyte, where the first container comprises a cathode; and a salt bridge for allowing ions from the electrolyte to be transported from the container to a film evaporator in the form of a second container for holding an ionic liquid, where the film evaporator comprises an anode.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: The ionic liquid comprises a salt selected from a salt formed of at least one of the cations selected from mono-substituted imidazolium, di-substituted imidazolium, tri-substituted imidazolium, pyridinium, pyrrolidinium, phosphonium, ammonium, guanidinium, tri-substituted sulfonium and isouronium or their derivatives. Preferred Method: The ionic liquid comprising the salt is formed by the reaction of at least one amine salt of the formula R1R2R3R4N+X- with at least one hydrated salt, which is a chloride, nitrate, sulfate or acetate of lithium (Li), magnesium (Mg), calcium (Ca), chromium (Cr), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), cadmium (Cd), lead (Pb), bismuth (Bi), lanthanum (La) or cerium (Ce).R1-R3=1-5C alkyl or 6-10C cycloalkyl;orR2+R3=4-10C alkylene;orNR2R3=5-11 membered heterocyclic ring;R4=H, phenyl or 1-12C alkyl or cycloalkyl (optionally substituted with at least one group selected from -OH, -Cl, -Br, -F, -I, -phenyl, -NH2, -CN, -NO2, -COOR5, -CHO, -COR5 or -OR5);R5=1-10C alkyl or cycloalkyl;andX-=anion capable of being complexed by the hydrated salt.    TECHNOLOGY FOCUS - POLYMERS - Preferred Substrate: The substrate is selected from polymer substrates. Preferred Components: The precursor material is selected from vaporizable polymers. EXAMPLE - No suitable example given.