TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Process: The patterned or structured SiO2-layers or SiO2-lines are generated with high resolution by use of SiO2 precursor compositions, which are inkjet printed; or by inkjet printing SiO2 precursor compositions, comprising at least one high boiling alcohol as solvent, with high resolution on substrate surfaces, drying and treating at high temperature for converting the precursor into solid SiO2. The SiO2 precursor compositions are inkjet printed at temperatures in the range from room temperature up to 300 (preferably room temperature to up to 150, especially room temperature to up to 70) degrees C, and dried at 80-400 (preferably 100-200) degrees C. After printing the inkjet printed and dried SiO2 precursor compositions are converted to a barrier film consisting of SiO2 at 500-1000 degrees C. The dried SiO2 precursor compositions are converted to a barrier film consisting SiO2 at 650-900 degrees C. The temperature for drying and subsequently converting is elevated by slow degrees to save the treated wafers but also in order to evaporate the solvents smoothly. Preferred Composition: The composition comprises at least one aromatic and aliphatic fluoro solvent; and comprises (wt.%) the precursor (0.1-90, preferably 0.5-50, especially 1-20), the high boiling solvent or homogeneous solvent mixture (10-99.9, preferably 50-99.5, especially 80-99), with the proviso that 90 wt.% of the comprising carrier solvent has a boiling point 100-400 degrees C and at least 5 wt.% of the solvent mixture is an high boiling alcohol. The precursor composition has a viscosity of 2-20 cps at printing temperature; have a surface tension of 20-60 dyne/cm; and is inkjet printable.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: The alcohol is selected from tetraethylene glycol, glycerol, dipropylene glycol, 4-methoxybenzyl alcohol, tripropylene glycol, dipropylene glycol butyl ether, 2-phenoxyethanol, diethanolamine, triethylene glycol, ethylene glycol, 2-undecanol, ethylene glycol 2-ethylhexyl ether, diethylene glycol propyl ether, ethylene glycol hexyl ether, diethylene glycol, 1-decanol, terpineol, lactic acid, hexylene glycol, propylene glycol, 1-nonanol, dipropylene glycol methyl ether, diethylene glycol butyl ether, 1 ,3-butanediol, benzyl alcohol, 1-octanol, 2-methyl-2-heptanol, 2-octanol, 2,2-dimethyl-1-pentanol, 1-heptanol, ethylene glycol butyl ether, 4-heptanol, 3-heptanol, diethylene glycol ethyl ether, tetrahydrofurfuryl alcohol, propylene glycol butyl ether, furfuryl alcohol, diacetone alcohol, 2-heptanol, ethanolamine, 5-methyl- 2-hexanol, diethylene glycol methyl ether, ethylene glycol butyl ether, 1-hexanol, cyclohexanol, 3-methylcyclohexanol, 2,2-dimethyl-1-butanol, 4-methyl- 1-pentanol, ethylene glycol propyl ether, ethyl lactate, 2-hexanol, 2- methyl-1-pentanol, 2-ethyl-1-butanol, 3-hexanol, 3-methyl-2-pentanol 1- pentanol, cyclopentanol, 4-methyl-2-pentanol, 2-methyl-3-pentanol, 3- methyl-1-butanol, ethylene glycol ethyl ether, 3,3-dimethyl-1-butanol, 2- methyl-1-butanol, 2-pentanol, ethylene glycol methyl ether, 3-pentanol, propylene glycol methyl ether, 1-butanol and 2-methyl-1-propanol (preferably methyl alcohol, ethyl alcohol, p-propyl alcohol, isopropyl alcohol, n-butyl alcohol, 2-ethyl-1 butanol, sec-butyl alcohol, tert-butyl alcohol, isobutyl alcohol, iso-amyl alcohol, n-amyl alcohol, t-amyl alcohol, n-hexyl alcohol, heptanol, octanaol, allyl alcohol, crotyl alcohol, ethylene glycol, propylene glycol, trimethylene glycol, glycerol, methyl isobutyl carbinol, 2-ethyl-1-hexanol, diacetone alcohol, nonyl alcohol, decyl alcohol, cetyl alcohol, cyclohexanol, furfuryl alcohol, tetrahydrofurfuryl alcohol, benzyl alcohol or phenyl ethyl alcohol). The organic co-solvent, which is selected from the aromatic or heteroaromatic hydrocarbons (preferably toluene), xylene (all isomers), tetralin, indan, or mono, di, tri, tetra, penta and hexa alkyl benzenes, naphthalene, alkyl naphthalene, alkylthiazoles, alkylthiophenes, or selected from the aliphatic hydrocarbons in form of linear or branched alkanes (preferably n-octane) or from the cycloalkanes (preferably methylcyclohexane) and/or decalin (preferably toluene, xylene (all isomers), tetralin, indan, benzene, naphthalene n-octane methylcyclohexane or decalin). The aromatic and aliphatic fluoro solvent is methyl nonafluorobutyl ether, 3-ethoxy-1,1,1,2,3,4,4,5,5,6,6,6-dodecafluoro-2-trifluoromethyl-hexane, perfluorodecane or at least one ether (preferably ethylene glycol diethyl ether), or ester (preferably amyl acetate), or lactone (preferably gamma -butyrolactone, or ketone, or amide (preferably N-methylpyrrolidone (NMP)) or N,N-dimethyl formamide (DMF), N,N-dimethyl sulfoxide (DMSO), or sulfones.