;  EP2053630-A2 -- KR2006128303-A   ;  US5543688-A   APPLIED MATERIALS JAPAN KK (MATE-Non-standard)   MORITA K;  US20030137251-A1   ;  US20040137647-A1   ;  WO2006120239-A1   UNIV DUBLIN CITY (UYDU-Non-standard)   ELLINGBOE A R;  WO2009054671-A2 -- JP07169590-A   ;  JP2001181848-A   ;  JP2002025919-A   ;  US6972524-B1   LAM RES CORP (LRES)   MARAKHTANOV A M,  HUDSON E A,  SADJADI S M R;  KR979186-B1 -- JP2000331995-A   NICHIDEN ANELVA KK (NICV)   SNIL W;  JP2001181848-A   ;  JP2002246368-A   NICHIDEN ANELVA KK (NICV)   SNIL W;  WO2006050632-A2   UNAXIS BALZERS AG (BALV)   BELINGER A;  KR955207-B1 -- JP2000331995-A   NICHIDEN ANELVA KK (NICV)   SNIL W;  KR2006128303-A   ;  KR2007101067-A   ;  KR302167-B   TOKYO ELECTRON LTD (TKEL);  TOKYO ELECTRON YAMANASHI LTD (TKEL)   TOMOYASU M,  KOSHIISHI A,  IMAFUKU K,  ENDO S,  TAHARA K,  NAITO Y,  NAGASEKI K,  HIROSE K,  KOMINO M,  TAKENAKA H,  NISHIKAWA H,  SAKAMOTO Y;  US8018163-B2 -- US5643364-A   APPLIED MATERIALS INC (MATE-Non-standard)   ZHAO J M,  SMYTH K,  MCNUTT G,  WOLFF S,  TAYLOR W N;  US20060219363-A1   ;  US20070252529-A1   ;  US6495963-B1   TRIKON HOLDINGS LTD (TRIK-Non-standard)   BENNETT P G;  US6858112-B2   FLAMM D L (FLAM-Individual)   FLAMM D L;  US6962664-B2   TOKYO ELECTRON LTD (TKEL)   MITROVIC A S,  JOHNSON W L;  US7094313-B2   APPLIED MATERIALS INC (MATE-Non-standard)   JUCO E Y,  SIVARAMAKRISHNAN V,  SILVETTI M D,  SAJOTO T;  US7342361-B2   UNIV DUBLIN CITY (UYDU-Non-standard)   ELLINGBOE A R;  CN101420816-B -- CN1577730-A   KWON G (KWON-Individual);  CHANG H (CHAN-Individual);  LEE Y (LEEY-Individual)   KWON G,  CHANG H,  LEE Y;  JP2001181848-A   ;  JP2002025919-A   ;  US20050031796-A1   ;  JP5668957-B2 -- JP91030424-A   ;  JP2000058296-A   FO KK (FOFO-Non-standard);  KOBE STEEL LTD (KOBM)   OKUMURA Y,  TOKUMURA T,  MUNEMASA A,  ISHIBASHI K,  SEGAWA T,  NOZAWA T;  JP2000058465-A   MITSUBISHI HEAVY IND CO LTD (MITO)   MURATA M,  TAKEUCHI Y;  JP2001271169-A   ;  JP2003059840-A   ;  JP2003109908-A   ;  JP2004128159-A   MITSUBISHI HEAVY IND CO LTD (MITO)   KAWAMURA K,  YAMADA A,  MASHIMA H,  TAKEUCHI Y;  JP2005293854-A   TAKIGAWA H (TAKI-Individual);  KURITA SEISAKUSHO KK (KURI-Non-standard);  DAIKEN KAGAKU KOGYO KK (DAIK-Non-standard)   TAKIGAWA H,  NISHIMURA Y,  HARADA A;  JP99509358-W