NOVELTY - Microfluidic system comprises micro-electro-mechanical system (MEMS) integrated circuit (290) comprising moveable fingers, where each finger engages with respective compression component, and urges respective compression component between closed position in which respective part of membrane wall is sealingly pinched against opposed wall, and open position in which respective part of membrane wall is disengaged from opposed wall; thermal bend actuators for controlling movement of respective finger; and control circuitry for controlling actuation of actuators.    USE - Microfluidic system e.g. lab-on-a-chip (LOC) devices (300) or micro total analysis system useful for enzymatic analysis (e.g. glucose and lactate assays), DNA analysis (e.g. PCR and high-throughput sequencing), proteomics, disease diagnosis, analysis of air/water samples for toxins/pathogens, fuel cells, and micromixers.    ADVANTAGE - The microfluidic system fully complements existing LOC technology based on soft lithographic fabrication of microfluidics platforms. Conventional platforms only require minor modifications to be integrated into the CMOS-controllable LOC devices. The microfluidic device may be used interchangeably as a valve, a micromixer, or peristaltic pump. The CMOS control circuitry can provide either a valving action, a mixing action, or a pumping action in the device, simply by altering an actuation sequence for the finger actuators. The CMOS control circuitry, individually controlling each finger actuator, can tune the pump to the characteristics of particular fluid. The control achievable by the on-chip CMOS circuitry would not be possible using traditional LOC technology.    DETAILED DESCRIPTION - A microfluidic system comprises:    (1) microfluidics platform (295) comprising a compliant body having a microfluidic channel; an elongate chamber defined by a section of microfluidic channel, and having a membrane wall defining part(s) of an outer surface of the body; and compression components spaced apart along the membrane wall, each compression component pinches a respective part of the membrane wall against an opposed wall of the chamber; and    (2) MEMS integrated circuit bonded to the outer surface of the body, and comprising moveable fingers, where each finger engages with a respective compression component, and urges the respective compression component between a closed position in which the respective part of the membrane wall is sealingly pinched against the opposed wall, and an open position in which the respective part of the membrane wall is disengaged from the opposed wall; thermal bend actuators, each associated with a respective finger for controlling movement of the respective finger; and control circuitry for controlling actuation of the actuators.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an integrated LOC device comprising bonded microfluidics platform and MEMS integrated circuit.    CMOS layer (240)    MEMS layer (260)    MEMS integrated circuit (290)    Microfluidics platform (295)    LOC devices (300)