TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Components: The aqueous solution is saturated with carbon dioxide at a reaction temperature and reaction pressure. The aqueous solution comprising carbon dioxide is prepared by addition of carbon dioxide in water in which the initial pH is 6.5-7.5. The aqueous solution is acid mixture comprising carbon dioxide and at least one acid comprising hydrochloric acid, sulfuric acid, phosphoric acid and acetic acid. Preferred Process: The reaction is carried out: at a pressure close to the atmospheric pressure; at a temperature of 0-75 degrees C, preferably 0-50 degrees C; and a pH of less than 6, preferably 4.5-5. The process comprises (a) mixing of the aqueous solution comprising carbon dioxide with water, (b) mixing the silicon alloy with the obtained mixture, (c) sedimentation and filtration of the products, and (d) storage of silanes by condensation under liquid or compressed gas form. The process further comprises (e) fractional distillation close to ambient pressure for separating monosilane of higher silanes and traces of disiloxane optionally obtained in step (b). The silicon alloy comprises aluminum (30-38 wt.%), silicon (35-45 wt.%) and calcium (15-25 wt.%). The silicon alloy is iron-silicon (FeSi), FeSi-magnesium (FeSiMg), FeSi-calcium (FeSiCa), silicon-magnesium (Si(0.5)Mg), silicon-calcium (Si(0.5)Ca), aluminum-silicon-calcium (AlSiCa), calcium-silicon (CaSi), calcium-silicon (Ca(0.5)Si), magnesium-silicon (MgSi), aluminum-silicon-sodium (AlSiNa), aluminum-silicon-magnesium (AlSiMg), silicon-sodium (SiNa), aluminum-silicon-lithium (AlSiLi), silicon-potassium (SiK), calcium-aluminum-silicon (Ca(0.5)AlSi(0.33)) and/or calcium-aluminum-silicon (Ca(0.5)AlSi(0.75)), preferably silicon-magnesium (Si(0.5)Mg), aluminum-silicon-sodium (AlSiNa), silicon-sodium (SiNa), silicon-lithium (Si(0.25)Li), silicon-sodium (Si(0.25)K) or silicon-potassium. The size of the silicon alloy is 0.2-0.9 mm, preferably 0.2-0.5 mm. EXAMPLE - No suitable example given.