NOVELTY - A laser processing apparatus comprises: a stage (2) for carrying a substrate (1) on which a thin film is formed; a laser radiation section for irradiating laser light on the thin film formed on the substrate placed on the stage to form grooves in the thin film; and a drive for scanning the substrate for the laser radiation section; the apparatus further comprises: a measurement section or inspection section for making a measurement or inspection of the substrate or the thin film.    USE - The laser processing apparatus and method are useful for manufacturing thin-film solar cells (all claimed).    ADVANTAGE - The laser processing apparatus achieves both reduction in processing defects and shorter turn around time.    DETAILED DESCRIPTION - A laser processing apparatus comprises: a stage for carrying a substrate on which a thin film is formed; a laser radiation section for irradiating laser light on the thin film formed on the substrate placed on the stage to form grooves in the thin film; and a drive for scanning the substrate for the laser radiation section; the apparatus further comprises: a measurement section or inspection section for making a measurement or inspection of the substrate or the thin film; where the laser radiation section irradiates laser light on the substrate being scanned; and where the measurement section or the inspection section makes a measurement or an inspection of the substrate being scanned and irradiated with laser light, simultaneously with the laser radiation. INDEPENDENT CLAIMS are:    (1) a method for manufacturing thin-film solar cells, comprising: preparing a substrate; forming transparent conductive film on the substrate; forming a first groove in the transparent conductive film; forming an electricity-generating layer on the transparent conductive film having the first groove; forming a second groove in the electricity-generating layer; forming a conductive film on the electricity-generating layer having the second groove; and forming a third groove in a laminate of the conductive film and the electricity-generating layer; where the laser processing apparatus is used to form at least one of the first, second and third grooves; and    (2) a laser processing method comprising: placing a substrate on which a thin film is formed, on a stage; and performing laser radiation and measurement or inspection of the substrate simultaneously while scanning the substrate on the stage.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the laser processing apparatus.    Substrate (1)    Stage (2)    X-axis moving mechanism (3x)    Laser optics system (4)    Laser light (5)    Condenser lens (6)    Laser processed grooves (7)    Objective lens (8)    Mirror (9)    Observation device (10)    Displacement gauge light source (11)    Photo-detector (12)    Mechanism for blowing off foreign matter (13)