NOVELTY - A transparent conductive film contains zinc oxide as main component and one or more additional metallic elements chosen from aluminum and gallium. The conductive film has surface roughness of 35 nm or more and surface resistance of 65 Omega /square or less. The amount of aluminum and gallium satisfies specified relation.    USE - Transparent conductive film is used for transparent conductive film laminate for silicon thin film solar cell (all claimed), heat generation component for motor-vehicle window, heat ray reflection film for construction, antistatic film, showcase, and electrode of liquid crystal display element and light receiving element.    ADVANTAGE - The transparent conductive film has excellent water resistance, high electroconductivity and high visible light transmittance, and provides thin film solar cell with high photoelectric conversion efficiency.    DETAILED DESCRIPTION - A transparent conductive film contains zinc oxide as main component and one or more additional metallic elements chosen from aluminum and gallium. The conductive film has surface roughness of 35 nm or more and surface resistance of 65 Omega /square or less. The amount of aluminum and gallium satisfies relation (in atomic%): -Al+0.3 less than or equal to Ga less than or equal to -2.68x Al+1.74, where Al is amount of aluminum with respect to total amount of zinc and aluminum, and Ga is amount of gallium with respect to total amount of zinc and gallium. INDEPENDENT CLAIMS are included for the following:    (1) manufacture of transparent conductive film;    (2) transparent conductive film laminate;    (3) manufacture of transparent conductive film laminate; and    (4) silicon thin film solar cell.    DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of thin film solar cell. (Drawing includes non-English language text)    Translucent substrate (1)    Surface transparent electrode layer (2)    Amorphous photoelectric conversion unit (3)    Back surface reflection electrode layer (5m)    Back surface transparent electrode layer (5t)