TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: In the method above, the solvent comprises a material selected from water, an alcohol, a ketone and its combinations. It is selected from ethanol, propanol, acetone and its combinations. The conductive film is transparent. The metal halide is selected from tin chloride (SnCl4), SnCl2, tin bromide (SnBr4), zinc chloride (ZnCl2) and its combinations. The solution further comprises a dopant precursor, where the dopant precursor is selected from hydrogen fluoride (HF), ammonium fluoride (NH4|F), tin chloride (SbCl3), and its combinations. It also comprises the metal halide in an amount of from 5 to 20 weight percent of the solution; or the metal halide in an amount of 13 weight percent or more of the solution. The aerosol droplets have a droplet size of 4000 nanometers or less in diameter. Preparing aerosol droplets comprises atomizing the solution. Applying the aerosol droplets comprises spraying the aerosol droplets from one or more sprayers adapted to receive the aerosol droplets from the atomizer and located proximate to the glass substrate. The method further comprises translating the one or more sprayers in one or more directions relative to the glass substrate. Atomizing the solution comprises flowing a gas selected from argon, helium, nitrogen, carbon monoxide, hydrogen in nitrogen and oxygen through the atomizer. The glass substrate is in a form selected from a glass sheet, a glass slide, a textured glass substrate, a glass sphere, a glass cube, a glass tube, a honeycomb, and its combination. The method further comprises applying the aerosol droplets to the glass substrate that is at a temperature of from 295 degrees C to 600 degrees C. It also comprises applying the aerosol droplets to the glass substrate that is at a temperature of from 350 degrees C to 420 degrees C. The conductive film comprises chlorine (Cl) doped tin oxide (SnO2), fluorine (F) and Cl doped SnO2, F doped SnCO2, tin (Sn) doped indium oxide (In2O3), aluminum (Al) doped zinc oxide (ZnO), cadmium (Cd) doped SnO2, or its combinations. The conductive thin film has a thickness of 2000 nanometers or less. The method also comprises heat treating the conductive film after forming the conductive film. The conductive film is formed at ambient pressure. Aerosol droplets have a droplet size of 50 nanometers to 450 nanometers.