NOVELTY - A solid substrate having a film of the metal or metal compound on a surface is heated at a temperature for a time sufficient to convert the film into an array of particles of the metal or metal compound dispersed on the surface.    USE - Fabrication of array of metal particles or metal compound particles dispersed on substrate, to produce substrate having array of metal particles or metal compound particles for use in sensing chips (both claimed). Can also be used in electronics (super fast computers, plasmon waveguides), optoelectronics, solar cells, catalysis, high-density storage, ultra-thin display devices, magnetic (magnetic disk drives), and electrochemical applications, dirt repelling surfaces, environmental-friendly fuel cells, platform for growth of semiconductor nanowires and carbon nanotubes, biomedical diagnostics for disease diagnosis, drug discovery, electrochemical or optical detection of DNA hybridization or proteins, cancer treatment, surface plasmon resonance (SPR) biosensors, and detection of nucleic acids, protein markers for cancer and biotoxins.    ADVANTAGE - The method enables template free and wet-chemistry free fabrication of arrays of metal or metal compound nanoparticles on solid surfaces. The method enables fabrication of large range of metal and metal oxide particles including their alloys, and also enables control of particle size and uniformity, and fabrication of ordered arrays having uniform sized particles. The method is simple (very low technical experience is required), easy to use, and time effective, can be combined with existing microelectronics technologies, and provides superior quality particle arrays with better fixation of particles on surface, superior array robustness, thermal and chemical stability. The method provides flexibility for tuning of the properties of fabricated arrays by choosing the chemical composition of nanoparticles, their size, and the size ratio, and allows for a high degree of flexibility to design desired patterns on the surface.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the fabrication of metal or metal oxide nanoparticle arrays on solid surface.