NOVELTY - Manufacturing a functional film (10), comprises: continuously feeding a support (B) from a first film roll, forming a coating film (12) having a degree of hardness of greater than or equal to 3B on the support and winding up the support into a second film roll at a tension of 30 N/m or more; and loading the second film roll which has been wound up in the prior step in a vacuum film forming apparatus, continuously feeding the support from the second film roll, forming an inorganic film (14) on the coating film formed on the support, and winding up the support into a third film roll.    USE - The method is useful for manufacturing a functional film (claimed), which is useful in optical element, display apparatus, semiconductor apparatus and thin film solar cells.    ADVANTAGE - The method provides the functional film with reduced occurrence of faults including crack and peel-off of the coating and inorganic films.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for:    (1) a functional film, manufactured by the method; and    (2) an apparatus for manufacturing the functional film, comprising a coating film forming apparatus and a vacuum film forming apparatus, where the coating film forming apparatus comprises (a1) a mechanism for continuously feeding the support from a first film roll, (a2) a mechanism for forming the coating film having a degree of hardness of greater than or equal to 3B on the support, and (a3) a mechanism for winding up the support into a second film roll at a tension of greater than or equal to 30 N/m, and the vacuum film forming apparatus comprises (b1) a mechanism for continuously feeding the support from the second film roll which has been wound up by the coating film forming apparatus, (b2) a mechanism for forming an inorganic film on the coating film formed on the support, and (b3) a mechanism for winding up the support into a third film roll.    DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of the method for manufacturing the functional film.    Functional film (10)    Coating film (12)    Inorganic film (14)    Support (B)