NOVELTY - A solution of a mixture of thermally decomposable reactive metal-containing compounds and non-reactive metal-containing compounds in a thermally volatilizable solvent is formed. An aerosol containing finely divided droplets of the obtained solution dispersed in a carrier gas is formed. The aerosol is heated such that solvent is volatilized, the reactive metal-containing compounds and the non-reactive metal-containing compounds are decomposed to form finely, divided particles, and the particles form an alloy and are densified, and metal powder is separated.    USE - Manufacture of multi-element, finely divided, spherical metal powder used for thick film composition and electrode for silicon solar cell (all claimed).    ADVANTAGE - The multi-element, finely divided, spherical metal powder has uniform particle size.    DETAILED DESCRIPTION - A solution of a mixture of thermally decomposable reactive metal-containing compounds and non-reactive metal-containing compounds is formed in a thermally volatilizable solvent. An aerosol containing finely divided droplets of the obtained solution dispersed in a carrier gas is formed, the droplet concentration which is below the concentration, where collision and subsequent coalescence of the droplets results in a 10% reduction in droplet concentration. The aerosol is heated to an operating temperature above the decomposition temperature of the reactive metal containing compounds and non-reactive metal containing compounds but below the melting point of the resulting multi-metallic alloy by which the solvent is volatilized, the reactive metal-containing compounds and the non-reactive metal-containing compounds are decomposed to form finely, divided particles, and the particles form an alloy and are densified. The multi-element, finely divided, spherical, metal powder containing reactive metal powder and non-reactive metal powder is separated from the carrier gas reaction by-products, and solvent volatilization products. The reactive metal powder contains titanium, zirconium, hafnium, tantalum, niobium, vanadium, nickel, cobalt, molybdenum, manganese and/or iron. The non-reactive metals is chosen from silver, tin, bismuth, lead, antimony, zinc, germanium, phosphorus, gold, cadmium, beryllium and tellurium. INDEPENDENT CLAIMS are included for the following:    (1) thick film composition; and    (2) electrode formed on silicon solar cell.