NOVELTY - A granulated powder (20) is prepared from rare-earth-element oxide powder (11) containing zinc oxide powder (15). The granulated powder (20) is molded and sintered to obtain a zinc oxide vapor deposition material. The granulated powder (20) is obtained by mixing rare-earth-element oxide powder and an organic solvent with a binder to obtain a coating liquid, spraying or injecting coating liquid to the zinc oxide powder, drying coating liquid adhered to zinc oxide powder, and covering surface of the zinc oxide powder with a layer of rare-earth-element oxide powder to obtain granules (19).    USE - Manufacture of zinc oxide vapor deposition material used for forming zinc oxide film (claimed) used as electroconductive film and transparent conductive film for gas sensor, electromagnetic shielding panel and piezoelectric device. Uses include but are not limited to solar cell, liquid crystal display device, transparent piezoelectric sensor of electroluminescent display device, touch panel apparatus, active-matrix drive device, photoelectric conversion apparatus, light-emitting device and thin film-type secondary battery.    ADVANTAGE - The method enables manufacture of uniform zinc oxide vapor deposition material having excellent electroconductivity and visible-light transmittance. The segregation of rare-earth elements in the zinc oxide vapor deposition material is suppressed.    DETAILED DESCRIPTION - A granulated powder (20) with average particle diameter of 0.1-10 mu m and purity of 98% or more is prepared from rare-earth-element oxide powder containing zinc oxide powder, and having purity of 98% or more and average particle diameter of 0.05-5 mu m. The granulated powder (20) is molded to pellet shape, tablet shape or plate shape. The molded material is sintered to obtain a zinc oxide vapor deposition material containing rare-earth element (0.2-15 %mass). The rare-earth-element oxide powder contains 2-17 elements chosen from rare-earth-element group. The granulated powder (20) is obtained by mixing rare-earth-element oxide powder and an organic solvent with a binder to obtain a coating liquid with concentration of 20-90 %mass, spraying or injecting coating liquid to the zinc oxide powder, drying coating liquid adhered to surface of the zinc oxide powder, and covering surface of the zinc oxide powder as a nucleus with a layer of rare-earth-element oxide powder having thickness of 0.05-5 mu m to obtain granules.    DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of the granulated powder.    Rare-earth-element oxide powder (11)    Zinc oxide powder (15)    Granules (19)    Granulated powder (20)