NOVELTY - A chlorosilane-recovery apparatus (100) consists of cooler (102), collection tank (106), and gas-liquid mixture supply pipe (103) with which gas-liquid mixture of liquid component liquefied by cooler, and gas component is derived from the cooler in the collected liquid (111) in collection tank. A tetrachlorosilane supply pipe (109) adds tetrachlorosilane to the collection tank and adjusts the tetrachlorosilane concentration of collected liquid to be higher than tetrachlorosilane concentration of liquid component of gas-liquid mixture.    USE - Apparatus is used for recovering chlorosilane from chlorosilane gas containing tetrachlorosilane and at least one of monochlorosilane, dichlorosilane and trichlorosilane used in manufacture of semiconductors, liquid-crystal panels, and solar cells.    ADVANTAGE - The apparatus enables efficient recovery of chlorosilane. Mist-form chlorosilane is captured reliably. The quantity of chlorosilane discharged is reduced and productivity of chlorosilane is improved.    DETAILED DESCRIPTION - A chlorosilane-recovery apparatus consists of a cooler which cools chlorosilane gas containing tetrachlorosilane, a collection tank in which collected liquid containing tetrachlorosilane is accommodated, and a gas-liquid mixture supply pipe with which the gas-liquid mixture consisting of a liquid component liquefied by the cooler, and a gas component not liquefied by the cooler is derived from the cooler in the collected liquid in collection tank. A tetrachlorosilane supply pipe adds tetrachlorosilane to the collection tank and adjusts the tetrachlorosilane concentration of collected liquid to be higher than tetrachlorosilane concentration of liquid component of gas-liquid mixture. An INDEPENDENT CLAIM is included for chlorosilane recovery method, which involves cooling chlorosilane gas containing tetrachlorosilane, deriving the gas-liquid mixture, adjusting tetrachlorosilane concentration, and recovering chlorosilane from collected liquid.    DESCRIPTION OF DRAWING(S) - The drawing shows an explanatory view of the chlorosilane recovery apparatus.    Chlorosilane recovery apparatus (100)    Cooler (102)    Gas-liquid mixture supply pipe (103)    Collection tank (106)    Tetrachlorosilane supply pipe (109)    Refrigeration unit (110)    Collected liquid (111)