TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Gas: Purging gas chosen from helium, hydrogen, nitrogen, argon and ammonia is supplied to reaction chamber.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Precursors: The copper precursor is chosen from bis(acetylacetonato)copper, bis(2,2,6,6-tetramethylheptandionato)copper, bis(hexafluoroacetylacetonato)copper, (vinyltrimethylsilyl)(hexafluoroacetylacetonato)copper, (vinyltrimethylsilyl)(acetylacetonato)copper, (vinyltrimethylsilyl)(2,2,6,6-tetramethylheptandionato)copper, (vinyltriethylsilyl)-(acetylacetonato)copper, (vinyltriethylsilyl)-(2,2,6,6-teramethylheptandionato)copper, (vinyltriethylsilyl)-(hexafluoroacetylacetonato)copper and their mixture. The indium precursor is of formula: In(-R1)(-R2)(-R3).R1-R3=methyl, ethyl, butyl, tert-butyl, isobutyl, sec-butyl, methoxy, ethoxy, propoxy, isopropoxy, butoxy, tert-butoxy, isobutoxy or sec-butoxy.The indium precursor is chosen from trimethylindium, triethylindium, triisopropyl indium, tributyl indium, tritertiarybutyl indium, triethoxy indium, triethoxy indium, triisopropoxy indium, dimethylisopropoxy indium, diethylisopropoxy indium, dimethylethyl indium, diethylmethyl indium, dimethylisopropyl indium, diethylisopropyl indium, dimethyltertiarybutyl indium, and their mixture. The gallium precursor is of formula: Ga(-R1)(-R2)(-R3). The gallium precursor is chosen from trimethylgallium, triethylgallium, triisopropyl gallium, tributyl gallium, tritertiarybutyl gallium, triethoxy gallium, triethoxy gallium, triisopropoxy gallium, dimethylisopropoxy gallium, diethylisopropoxy gallium, dimethylethyl gallium, diethylmethyl gallium, dimethylisopropyl gallium, diethylisopropyl gallium, dimethyltertiarybutyl gallium, and their mixture. The selenium precursor is of formula: R4-Se-R5 or R4-Se-Se-R5.R4,R5=H, methyl, ethyl, propyl, isopropyl, butyl, tert-butyl and/or sec-butyl.The selenium precursor is chosen from dimethyl selenide, diethyl selenide, diisopropyl selenide, ditertiarybutyl selenide, dimethyl diselenide, diethyl selenide, diisopropyl diselenide, ditertiarybutyl diselenide, tertiarybutylisopropyl selenide, tertiarybutyl selenol, and their mixture.