TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Components: The solvent comprises water.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Composition: The composition is diluted in a range of 5:1 to 200:1. The composition further comprises residues and contaminants, where the residue comprises post-chemical mechanical polishing (CMP) residues, post-etch residue and/or post-ash residue; and at least one additional component selected from at least one reducing agent, at least one complexing agent, at least one supplemental corrosion inhibitor, at least one alcohol, at least one surfactant, and a compound of formula NR1aR2aR3aR4aOH. The composition further comprises at least one reducing agent, at least one complexing agent and at least one supplemental corrosion inhibitor.R1a-R4a=H, methyl or ethyl.Provided that at least one of R1a, R2a, R3a and R4a must be H. Preferred Method: The method further involves diluting the cleaning composition (C1) with solvent at or before a point of use, where the solvent comprises water. Preferred Components: The corrosion inhibitor comprises a species selected from N-ribosylpurine, adenosine, guanosine, 2-aminopurine riboside, 2-methoxyadenosine, N-methyladenosine, N,N-dimethyladenosine, trimethylated adenosine, trimethyl N-methyladenosine, C-4'-methyladenosine, 3-deoxyadenosine, adenine, methylated adenine, dimethylated adenine, N4,N4-dimethylpyrimidine-4,5,6-triamine, 4,5,6-triaminopyrimidine, allantoin, hydroxylated C-O-O-C dimers, C-C bridged dimers, ribose, methylated ribose, tetramethylated ribose, xylose, glucose, purine, guanine, hypoxanthine, xanthine, theobromine, caffeine, uric acid, isoguanine, triaminopyrimidine and/or amino-substituted pyrimidines; or comprises a species selected from adenosine, adenosine degradation products, and their derivatives. The amine comprises at least one species selected from aminoethylethanolamine, N- methylaminoethanol, aminoethoxyethanol, dimethylaminoethoxyethanol, diethanolamine, N-methyldiethanolamine, monoethanolamine, triethanolamine, 1-amino-2-propanol, 2-amino-1-butanol, isobutanolamine, triethylenediamine, other 1-8C alkanolamines, tetraethylenepentamine (TEPA), 4-(2-hydroxyethyl)morpholine (HEM), N-aminoethylpiperazine (N-AEP), ethylenediaminetetraacetic acid (EDTA), 1,2-cyclohexanediamine-N,N,N',N'-tetraacetic acid (CDTA), glycine/ascorbic acid, iminodiacetic acid (IDA), 2-(hydroxyethyl)iminodiacetic acid (HIDA), nitrilotriacetic acid, thiourea, 1,1,3,3-tetramethylurea, urea, urea derivatives, uric acid, glycine, alanine, arginine, asparagine, aspartic acid, cysteine, glutamic acid, glutamine, histidine, isoleucine, leucine, lysine, methionine, phenylalanine, proline, serine, threonine, tryptophan, tyrosine, valine and/or 1-methoxy-2-aminoethane. The quaternary base has the formula NR1R2R3R4OH. The reducing agent comprises a species selected from ascorbic acid, L(+)-ascorbic acid, isoascorbic acid, ascorbic acid derivatives, gallic acid and/or glyoxal. The supplemental corrosion inhibitor comprises a species selected from ascorbic acid, L(+)-ascorbic acid, isoascorbic acid, ascorbic acid derivatives, benzotriazole, citric acid, ethylenediamine, gallic acid, oxalic acid, tannic acid, 1,2,4-triazole (TAZ), tolyltriazole, 5-phenyl-benzotriazole, 5-nitro-benzotriazole, 3-amino-5-mercapto-1,2,4-triazole, 1-amino-1,2,4-triazole, hydroxybenzotriazole, 2-(5-amino-pentyl)-benzotriazole, 1,2,3-triazole, 1-amino-1,2,3-triazole, 1-amino-5-methyl-1,2,3-triazole, 3-amino-1,2,4-triazole, 3-mercapto-1,2,4-triazole, 3-isopropyl-1,2,4-triazole, 5-phenylthiol-benzotriazole, halo-benzotriazoles, naphthotriazole, 2-mercaptobenzimidazole (MBI), 2-mercaptobenzothiazole, 4-methyl-2-phenylimidazole, 2-mercaptothiazoline, 5-aminotetrazole, 5-amino-1,3,4-thiadiazole-2-thiol, 2,4-diamino-6-methyl-1,3,5-triazine, thiazole, triazine, methyltetrazole, 1,3-dimethyl-2-imidazolidinone, 1,5-pentamethylenetetrazole, 1-phenyl-5-mercaptotetrazole, diaminomethyltriazine, imidazoline thione, mercaptobenzimidazole, 4-methyl-4H-1,2,4-triazole-3-thiol, 5-amino-1,3,4-thiadiazole-2-thiol, benzothiazole, tritolyl phosphate, imidazole, indiazole, benzoic acid, ammonium benzoate, catechol, pyrogallol, resorcinol, hydroquinone, cyanuric acid, barbituric acid and derivatives such as 1,2-dimethylbarbituric acid, pyruvic acid, phosphonic acid and their derivatives, 1-hydroxyethylidene-1,1-diphosphonic acid (HEDP), propanethiol, benzohydroxamic acids, heterocyclic nitrogen inhibitors and/or potassium ethylxanthate. The complexing agent comprises a species selected from acetic acid, acetone oxime, acrylic acid, adipic acid, alanine, arginine, asparagine, aspartic acid, betaine, dimethyl glyoxime, formic acid, fumaric acid, gluconic acid, glutamic acid, glutamine, glutaric acid, glyceric acid, glycerol, glycolic acid, glyoxylic acid, histidine, iminodiacetic acid, isophthalic acid, itaconic acid, lactic acid, leucine, lysine, maleic acid, maleic anhydride, malic acid, malonic acid, mandelic acid, 2,4-pentanedione, phenylacetic acid, phenylalanine, phthalic acid, proline, propionic acid, pyrocatecol, pyromellitic acid, quinic acid, serine, sorbitol, succinic acid, tartaric acid, terephthalic acid, trimellitic acid, trimesic acid, tyrosine, valine, and/or xylitol; and their salts and derivatives.R1-R4=H, straight-chained or branched 1-6C alkyl, or optionally substituted 6-10C aryl. EXAMPLE - A formulation comprising (wt.%): tetramethyammonium hydroxide (TMAH) (5), tetraethylenepentamine (TEPA) (2.79), adenosine (0.1) and water (92.11) was prepared.