NOVELTY - Silicon particles are deposited on the surface of a substrate (210). The substrate is heated, and a densified film ink pattern is formed. The substrate is exposed to a dopant source with a deposition ambient comprising phosphorus oxychloride, nitrogen gas as carrier, main nitrogen gas, and reactive oxygen gas. A phosphosilicate glass layer is formed on the substrate, and substrate is heated. A silicon nitride layer (204) is deposited, and metal contacts (202) are deposited on silicon particles. The substrate is further heated, and ohmic contact is formed on substrate.    USE - Formation of ohmic contact on substrate used in manufacture of front metal contact solar cell.    ADVANTAGE - The phosphorus doped silicon particle film formed on the substrate surface can be used to catalyze the formation of silver crystallites between the metal and the silicon surface, thus enabling the formation of low resistance ohmic contact. Since a particle film containing silicon and phosphorus is utilized to enhance the formation of crystallites, the doping profile of the emitter is optimized for low carrier recombination. Hence conversion efficiency of the solar cell is improved.    DETAILED DESCRIPTION - Silicon particles are deposited on the surface of a substrate. The substrate is heated in a baking ambient to baking temperature and for baking time period, and a densified film ink pattern is formed. The substrate is exposed to a dopant source in a diffusion furnace with a deposition ambient comprising phosphorus oxychloride, nitrogen gas as carrier, main nitrogen gas, and reactive oxygen gas at a deposition temperature and for a deposition time period. A phosphosilicate glass layer is formed on the substrate surface, and substrate is heated in a drive-in ambient to a drive-in temperature and for drive-in time period. A silicon nitride layer is deposited, and metal contacts are deposited on silicon particles. The substrate is further heated to a firing temperature and for firing time period, and ohmic contact is formed on substrate.    DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of solar cell.    Metal contact (202)    Silicon nitride layer (204)    Single particles (207)    Emitter (208)    Silicon substrate (210)    Non-conductive glass layer (213)    Conductive crystallite (214)