NOVELTY - A conveying unit (10) conveys web of strip-like continuous flexible substrate (B). The target scribing film (M) is formed by applying tensile strength to substrate. A pressing unit (20) having convex curved surface, presses the substrate by making the curved surface in contact with substrate. A scribing unit (30) performs scribing on target scribing film formed on surface of portion of substrate. The specific formula including tensile strength, pressing force, cross-sectional area of substrate, width of substrate and radius of curvature of curved surface is satisfied.    USE - Scribing apparatus for use in manufacture of electronic device and photoelectric conversion device (claimed) used in solar cells.    ADVANTAGE - The scribing is formed accurately and efficiently on target scribing film with high yield rate and stably. The tensile strength and pressing force applied to substrate at the time of scribing can be adjusted in preferable ranges, so that the warpage, undulation, deflection, etc., can be reduced. The scribing is performed easily without applying excessive strength or stress, so that the abrasions and cracks around groove can be prevented and the photoelectric conversion rate of device is improved. The Laser emission conditions such as wavelength, emission energy, laser output pattern and emission time are adjusted according to light absorption coefficient of target scribing film, so that the accurate scribing with desired depth and width can be performed.    DETAILED DESCRIPTION - The conveyance unit has a roller for paying out the substrate, and a roller for rolling up the substrate after subjected to scribing. The pressing unit has a pressing roller for pressing the substrate. The radius of pressing roller is 40-300 mm. The position of convex curved surface is changed with respect to the substrate. The scribing unit has a scriber blade for performing mechanical scribing, and a laser light emission optical system for performing laser scribing. The scriber blade is made of diamond. The angle formed between face of scriber blade on the side of moving relative to the substrate, and normal line to the surface of substrate is -80 - 35 degrees or -70 - 0 degrees . Several sets of pressing unit and scribing units are provided for increasing depth and width of groove in target scribing film in stepwise manner. The target scribing film consists of semiconductor film, conductive film and laminated film. An insulating film is formed on flexible substrate such as metal base. An INDEPENDENT CLAIM is included for scribing method, which involves forming target scribing film by applying tensile strength to the substrate, while conveying web of strip-like continuous flexible substrate.    DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the scribing apparatus.    Scribing apparatus (1)    Conveying unit (10)    Pressing unit (20)    Scribing unit (30)    Substrate (B)    Target scribing film (M)