NOVELTY - Gas-barrier laminated film has base material and thin film layer(s) formed on surface(s) of base material. Thin film layer(s) contains silicon, oxygen and carbon. Silicon distribution curve, oxygen distribution curve, and carbon distribution curve show relation between distance from the surface of thin film layer in film thickness direction of thin film layer, and atomic ratio of silicon, oxygen and carbon. In 90% or more area of film thickness of thin film layer, atomic ratio of oxygen is greater than atomic ratio of silicon which is greater than atomic ratio of carbon.    USE - Gas-barrier laminated film is used for organic electroluminescent element, organic thin film solar cell and liquid crystal display (all claimed). Can also be used for packaging container for packing food or beverage products, cosmetics and detergents.    ADVANTAGE - The gas-barrier laminated film has excellent gas-barrier property.    DETAILED DESCRIPTION - Gas-barrier laminated film has a base material and thin film layer(s) formed on surface(s) of base material. The thin film layer(s) contains silicon, oxygen and carbon. The silicon distribution curve, oxygen distribution curve, and carbon distribution curve show relation between the distance from the surface of thin film layer in the film thickness direction of thin film layer, and atomic ratio of silicon, oxygen and carbon. In 90% or more area of film thickness of thin film layer, the atomic ratio of oxygen is greater than atomic ratio of silicon which is greater than atomic ratio of carbon, or the atomic ratio of carbon is greater than atomic ratio of silicon which is greater than atomic ratio of oxygen. The carbon distribution curve has at least one extreme value(s). The maximum value of atomic ratio of carbon in carbon distribution curve and absolute value of difference of minimum value are 5 atomic% or more. The electron beam transmittance curve shows the relation between the distance from the surface of thin film layer in the thickness direction and electron beam transmittance having extreme value(s).