NOVELTY - Semiconductor device module comprises a number of n semiconductor devices formed on a substrate, where n is greater than or equal to 2, and each semiconductor device has a stack of a first contact layer region, a semiconductor layer region, and a second contact layer region.    USE - The semiconductor device module is useful in semiconductor devices such as solar cells, thin-film solar cells, thin-film solar cells of the substrate type, or thin-film solar cells of the superstrate type (claimed).    DETAILED DESCRIPTION - Semiconductor device module comprises a number of n semiconductor devices formed on a substrate, where n is greater than or equal to 2; and each semiconductor device has a stack of a first contact layer region, a semiconductor layer region, and a second contact layer region. The first contact layer region of each semiconductor device is connected to the second contact layer region of the nth semiconductor device by an interconnection; and, of the first and second contact layer regions, the first contact layer region of the semiconductor devices has a varying thickness, where the thickness is maximum at the interconnection. INDEPENDENT CLAIMS are included for:    (1) a method of manufacturing a semiconductor device module including a number of n semiconductor devices formed on a substrate comprising forming a stack of a first contact layer, a semiconductor layer, and a second contact layer, which includes n stacks of a first contact layer region, a semiconductor layer region, and a second contact layer region;    (2) a semiconductor device module manufacturing device for manufacturing the semiconductor device module comprising a number of n semiconductor devices formed on a substrate, each semiconductor device having a stack of a first contact layer region, a semiconductor layer region, and a second contact layer region; and    (3) a semiconductor device module obtainable by the method above.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the semiconductor device module.    Substrate (10)    Contact layer (12)    Semiconductor layer region (30)    Interconnection (46)