NOVELTY - A plasma vapor deposition system (100) for making multi-junction silicon thin film solar cell modules and panels comprises flexible substrate (116) disposed about and removably supported by a rotatable substrate support (114); and a plasma vapor deposition torch (108) located adjacent to the flexible substrate for depositing at least one thin film material layer on an outer surface of the flexible substrate.    USE - For making multi-junction silicon thin film solar cell modules and panels (claimed).    ADVANTAGE - The novel system provides a measurably higher deposition rate, thus leading to a much lower manufacturing cost. Adding appropriate multi-layers or multi-junction thin film solar cells increases the conversion efficiency of solar energy, which results in higher total conversion efficiency compared to a single layer or single-junction solar cell. This leads to further decreases in manufacturing costs of solar cells, solar cell modules, and solar cell panels. The apparatus does not require the need to move the target or substrate from one chamber to another chamber, back and forth, to deposit layers of different composition. The apparatus preferably just changes the supply of different chemicals to plasma flame. This not only reduces the processing time, but also has the advantage to allow users to build multiple junction cells when it is desirable, without adding more chambers. The apparatus deposits thin films with a capability of producing different sizes; the apparatus allows for easily changing the length and/or diameter of substrate support and substrate used in the deposition process.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for plasma vapor deposition method for making multi-junction silicon thin film solar cell modules and panels comprising providing a rotatable substrate support; providing a high frequency induction coupled plasma torch comprising a coil, the induction coupled plasma torch being selected positionable along the surface area of rotatable substrate support; mounting flexible sheet-like substrate about an outer surface of the rotatable substrate support, the flexible sheet-like substrate taking the shape of the rotatable substrate support; introducing a plasma gas into the high frequency induction coupled plasma torch to form a plasma within the coil; injecting at least one source chemical into the high frequency induction coupled plasma torch; and depositing thin film layer on the outer surface of the sheet-like flexible substrate.    DESCRIPTION OF DRAWING(S) - The figure shows a front view of system for making solar cell modules and panels.    Plasma vapor deposition system (100)    Chamber (102)    Exhaust subsystem (104)    Plasma vapor deposition torch (108)    Headstock (110)    Tailstock (112)    Rotatable substrate support (114)    Substrate (116)