NOVELTY - Rare-earth element oxide powder (12) containing 2-17 types of elements chosen from rare-earth elements group, and zinc oxide powder (11) are mix-ground by mechanical alloying process to obtain a composite powder (13) having average particle diameter of 0.05-2 mu m. The granulated powder (14) produced using the composite powder is molded in pellet form, tablet form or plate form, and the molded product (15) is sintered to obtain zinc oxide vapor deposition material (16) containing 0.2-15 %mass of rare-earth elements.    USE - Manufacture of zinc oxide vapor deposition material used as target for forming zinc oxide film (claimed) used as electroconductive film, transparent conductive film for gas sensor, electromagnetic shielding panel and piezoelectric device. Uses include but are not limited to photoelectric conversion apparatus, light emitting device, thin film type secondary battery, liquid crystal display device, solar cell and transparent electrode of transparent piezoelectric sensor of electroluminescent display device and touch panel apparatus.    ADVANTAGE - The zinc oxide vapor deposition material has uniform composition. Since the zinc oxide powder and rare-earth element oxide powder are of nanoscale, the dispersibility of the rare-earth elements is improved. The 2-17 types of rare-earth elements added generate electrons which contribute to electroconductivity and provide zinc oxide film having improved electroconductivity over a wide temperature range. The zinc oxide film has high visible light transmittance, improved compactness and durability.    DETAILED DESCRIPTION - Rare-earth element oxide powder containing 2-17 types of elements chosen from rare-earth elements group, and zinc oxide powder are mix-ground by mechanical alloying process to obtain a composite powder having average particle diameter of 0.05-2 mu m. The granulated powder produced using the composite powder is molded in pellet form, tablet form or plate form, and the molded product is sintered to obtain zinc oxide vapor deposition material containing 0.2-15 %mass of rare-earth elements. The zinc oxide powder and the rare-earth element oxide powder each have purity of 98% or more.    DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the formation of sintered compact from the granulated powder.    Zinc oxide powder (11)    Rare-earth element oxide powder (12)    Composite powder (13)    Granulated powder (14)    Molded material (15)    Zinc oxide vapor deposition material (16)