TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: The method further comprises: depositing a non-reactive packaging polymer using iCVD techniques over the cathodic current collector to avoid the reactivity of the cathodic material with the atmosphere; and depositing an insulator layer on the exposed portions of the surface of the anodic current collector using masking techniques to surround the three-dimensional electrodes prior to deposition of the conformal polymeric layer, where the insulator layer is silicon oxide, aluminum nitride, or aluminum oxide. Preferred Components: The gaseous monomer is polytetrafluoroethylene or organosilicone. The initiator source comprises perfluorooctane sulfonyl fluoride, perfluorobutane-1-sulfonyl fluoride, triethylamine, tert-butyl peroxide, 2, 2'-azobis(2-methylpropane), tert-amyl peroxide and benzophenone.    TECHNOLOGY FOCUS - INSTRUMENTATION AND TESTING - Preferred Components: The anodic current collector is a copper foil and the cathodic current collector is an aluminum foil. The three dimensional electrodes comprise silicon nanowires or carbon nanotubes. The finite distance is 5-500 nm. The energy storage device further comprises a non-reactive packaging polymer formed over the cathodic current collector to prevent the cathodic material from reacting with the atmosphere. The apparatus further comprises: a fourth and fifth chambers disposed between the first end and the second end, where the fourth and fifth chambers comprise a first source configured to deliver an initiator source gas, a second source configured to deliver a monomer source gas, and a filament adapted to be heated at 300-450 degrees C configured and adapted to deposit a conformal electrolytic polymer over the substrate using an iCVD process; and a supply roll at the first end for supplying the continuous web of material to the chambers disposed between the first end and the second end; and a take-up roll at the second end for receiving the continuous web of material with the energy storage device formed on it.    TECHNOLOGY FOCUS - POLYMERS - Preferred Components: The conformal polymeric layer is an electrolytic polymer comprising poly(tetrafluoroethylene), poly(glycidyl methacrylate), poly(dimethylaminomethylstyrene), poly(perfluoroalkyl ethylmethacrylate), poly(trivinyltrimethoxy-cyclotrisiloxane), poly(furfuryl methacrylate), poly(cyclohexyl methacrylate-co-ethylene glycol dimethacrylate), poly(pentafluorophenyl methacrylate-co-ethylene glycol diacrylate), poly(2-hydroxyethyl methacrylate-co-ethylene glycol diacrylate), poly(methacrylic acid-co-ethylene glycol dimethacrylate), poly(3,4-ethylenedioxythiophene), and/or silicone (organosiloxanes). The cathodic material is a lithium containing polymeric material.