NOVELTY - A mechanical pump and a molecular pump are used to vacuum the sputtering cavity to a background vacuum of 2x 10 raised to - 4 Pa, and preparation of the film is started. The range of magnetron sputtering is set by controlling the depositing time such that sputtering power is 50-250 W, sputtering gas is high-purity argon, pressure is 0.1-0.3 Pa, substrate temperature is room temperature to 200 degrees centigrade, and film thickness is 500-1000 nm.    USE - Low temperature preparation method for zinc oxide transparent conductive film used in flexible photoelectric device.    ADVANTAGE - Vanadium ions are used in place of zinc ions, providing enough free current carriers under low doping amount, thus ionization impurity scattering is effectively reduced, electronic transfer rate is improved and comprehensive performance of transparent conductive film is increased. Low temperature growth realizes growth on organic polymer and other flexible substrate materials, and broader space is provided for application in flexible photoelectric device. Performing plasma anti-sputtering on surface of substrate enables growth of film of high quality at lower temperature.    DETAILED DESCRIPTION - The method starts with installing special target material to a target gun of a magnetron sputtering equipment, placing a cleaned substrate on a substrate platform of the sputtering cavity, using the mechanical pump to vacuum the cavity to 1x 10 raised to - 1 MPa, and using high-purity argon to perform plasma anti-sputtering cleaning on the substrate. The plasma anti-sputtering cleaning parameters are set such that the sputtering pressure is 3-6 Pa, the offset voltage is 600-800 V, the duty ratio is 15-25%, and the anti-sputtering time is 5-10 minutes. The special target material is the zinc oxide ceramic target material with doped vanadium pentoxide. The substrate material may be glass, quartz, silicon sheet, flexible stainless steel substrate or organic polymer. The organic polymer may be Makrolon (RTM: High-technology polycarbonate from Bayer Material Science), polyester, polyimide, polyethylene terephthalate, polypropylene glycolester or polypropylene.