NOVELTY - Manufacture (M1) of di-, tri-, and/or tetrafluoroethylene carbonate involves reacting starting material with a lower degree of fluorination in the liquid phase with elemental fluorine to form trifluoroethylene carbonate, tetrafluoroethylene carbonate, or difluoroethylene carbonate.    USE - For the manufacture of difluoroethylene carbonate, trifluoroethylene carbonate and/or tetrafluoroethylene carbonate used as etching agent for the manufacture of semiconductors, flat panel displays and TFTs, as solvent or building block in synthesis, as refrigerant, as flame retardant or as etching gas for the manufacture of semiconductors, flat panel displays and solar panels (claimed).    ADVANTAGE - The process produces difluoroethylene carbonate, trifluoroethylene carbonate and/or tetrafluoroethylene carbonate in excellent yields, in an easy and reliable manner, selectively.    DETAILED DESCRIPTION - Manufacture (M1) of di-, tri-, and/or tetrafluoroethylene carbonate involves reacting starting material with a lower degree of fluorination selected from ethylene carbonate, fluoroethylene carbonate, 4,4-difluoroethylene carbonate, cis-4,5-difluoroethylene carbonate and/or trans-difluoroethylene carbonate, in the liquid phase with elemental fluorine to form trifluoroethylene carbonate, or reacting a starting material with a lower degree of fluorination selected from ethylene carbonate, fluoroethylene carbonate, 4,4-difluoroethylene carbonate, cis-4,5-difluoroethylene carbonate, trans-difluoroethylene carbonate and/or trifluoroethylene carbonate in the liquid phase with elemental fluorine to form tetrafluoroethylene carbonate, or reacting a starting material with a lower degree of fluorination selected from ethylene carbonate and/or fluoroethylene carbonate, in the liquid phase with elemental fluorine to form difluoroethylene carbonate. An INDEPENDENT CLAIM is included for method (M2) of handling difluoroethylene carbonate, trifluoroethylene carbonate and tetrafluoroethylene carbonate where difluoroethylene carbonate, trifluoroethylene carbonate and tetrafluoroethylene carbonate are not contacted with Lewis acids or Lewis acid precursors.