NOVELTY - A n+-p--p+ laminate is provided on a titanium-based alloy film. Dichlorosilane and diborane are deposited on the titanium-based alloy film. A p-type light-soaking film is formed on a p+ type back surface field film. Argon-doped silicon oxocarbonitride plasma is provided for passivating the n+-p--p+ laminate to form anti-reflection film. A portion of n+-p--p+ laminate is etched using potassium hydroxide solution. The titanium/palladium/silver alloy film is annealed. A n- type ohmic contact is formed on n+ type emitter, to obtain tandem solar cell.    USE - Manufacture of tandem solar cell.    ADVANTAGE - The method provides tandem solar cell having excellent photoelectrical conversion efficiency and light-soaking stability.    DETAILED DESCRIPTION - A titanium-based alloy film is provided on a ceramic substrate (21). A n+-p--p+ laminate is provided on the titanium-based alloy film. Dichlorosilane and diborane are deposited on the titanium-based alloy film using atmospheric pressure chemical vapor deposition apparatus such that the epitaxial growth of p+ type back surface field film is carried out on the titanium-based alloy film. A p-type light-soaking film is formed on the p+ type back surface field film, by raising the temperature of atmospheric pressure chemical vapor deposition apparatus. The n+ type deposition of phosphine is conducted on the p--type light-soaking film to form n+ type emitter on p-type light-soaking film. Argon-doped silicon oxocarbonitride plasma is provided for passivating the n+-p--p+ laminate to form anti-reflection film of silicon cyanide/silica on n+ type emitter using plasma-enhanced chemical vapor deposition apparatus. A portion of n+-p--p+ laminate is etched using potassium hydroxide solution during patterned mask process. A p- type ohmic contact is formed on portion of titanium-based alloy film exposed from the n+-p--p+ laminate. A portion of anti-reflection film is etched. A titanium/palladium/silver alloy film is formed on portion of n+ type emitter exposed from the anti-reflection film. The titanium/palladium/silver alloy film is annealed in hydrogen environment. A n- type ohmic contact is formed on n+ type emitter, to obtain tandem solar cell.    DESCRIPTION OF DRAWING(S) - The drawing shows the side view of amorphous silicon film coated on the titanium-based alloy film.    High-temperature annealing apparatus (5)    Ceramic substrate (21)    Titanium film (22)    Amorphous silicon film (23)