NOVELTY - The method involves applying electrical potential to an electrically conductive pattern (2) formed on a substrate (1) so as to attract an atomized liquid coating material on the substrate. The electrical potential for repelling the atomized liquid coating material is applied on the masks (4) adjacent to electrically conductive pattern to control the surface geometry of the deposited material (3).    USE - Method for forming micro-conductive pattern such as hemispherical conductive pattern, stepped pyramid shaped conductive pattern, conical conductive pattern, or photonic crystal shaped conductive pattern, semi-columnar conductive pattern, triangular column shaped conductive pattern used as optical diffraction/reflection gratings on substrate in manufacture of component such as solar cell, LED, display (all claimed) e.g. organic LED (OLED) display.    ADVANTAGE - Since the substrate on which conductive potential patterns are deposited has a pull factor during deposition by the electrospray atomized liquid, the charged material from the atomized liquid is directed to the conductive patterns and deposited on the patterns while non-conductive areas located next to or located next to repulsive poled areas are not coated so that the mask for covering non-conductive or repulsive polarized areas is not necessary, and the time-consuming mask lithography technique or steps are not necessary. Electrospray coating process can be continuously performed even on uneven surfaces such as curved surface under normal pressure without a need of costly vacuum engineering and without wasting coating material. Hence cost for coating of micro-conductive pattern and manufacturing of the component can be reduced and the performance and service life time of the components can be increased.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the process for coating of micro-conductive pattern on substrate.    Substrate (1)    Electrically conductive pattern (2)    Deposited material (3)    Mask (4)    Electrode (6)