NOVELTY - The substrate processing system comprises a front end module (260) for transporting cassettes holding substrates, a loadlock module that is coupled to the front end module and has a mechanism for loading substrates from the cassettes onto the loadlock (250), a transport chamber (210), and processing chambers (240) coupled to the transport chamber. Each processing chamber: has rotatable substrate supports comprising a substrate heater, and evaporators that are divided into subgroup to deposit materials onto one substrate; and is provided with the same material composition.    USE - The substrate processing system is useful for fabricating solar cells.    ADVANTAGE - The substrate processing system is capable of economically fabricating the high quality solar cells with improved conversion efficiency.    DETAILED DESCRIPTION - The substrate processing system comprises a front end module (260) for transporting cassettes holding substrates, a loadlock module that is coupled to the front end module and has a mechanism for loading substrates from the cassettes onto the loadlock (250), a transport chamber (210), and processing chambers (240) coupled to the transport chamber. Each processing chamber: has rotatable substrate supports comprising a substrate heater, and evaporators that are divided into subgroup to deposit materials onto one substrate; and is provided with the same material composition. The transport chamber comprises a linear track, and transport robot arms (220) riding on the linear track. Each substrate support is positioned to receive deposition from uniformly spaced evaporator sources comprising an evaporator to deposit copper, gallium, indium and selenium. Each evaporator comprises a crucible within a main body, a heater provided about the main body, an injection opening, and a control valve that is in thermal contact with the main body and is configured for controlling the amount of evaporated material leaving the evaporator. Each chamber comprises an evaporation head housing the evaporators, where the evaporator head comprises shutters for controlling evaporation material reaching the substrates. An INDEPENDENT CLAIM is included for a method for fabricating solar cells.    DESCRIPTION OF DRAWING(S) - The diagram shows a schematic view of an evaporation system.    Transport chamber (210)    Robot arms (220)    Processing chambers (240)    Loadlock (250)    Front end module. (260)