NOVELTY - The reflector (24) has an elliptical or parabolic centrally positioned reflector (28) comprising a longitudinal strip (30) e.g. circular arcuate surface, that contains through holes to direct coolant gas (42) i.e. nitrogen, toward a UV lamp (22) e.g. sealed plasma bulb. Two elliptical or parabolic side reflectors (70, 72) are positioned on either side of the centrally positioned reflector to form a parabolic-type surface (80) with the centrally positioned reflector, where the side reflectors contain the arcuate reflective surfaces (74, 76) with dichroic coating e.g. thin-film filter.    USE - UV lamp e.g. sealed plasma bulb, elongated cylindrical bulb and spherical lamp, reflector i.e. quartz reflector, for use in an UV lamp module of a substrate process chamber (all claimed) e.g. self-contained chamber and producer processing system, utilized with a tandem process chamber i.e. chemical vapor deposition (CVD) chamber for depositing material e.g. low dielectric constant film, on a substrate e.g. semiconductor wafer i.e. silicon or compound semiconductor wafer, glass panel and metal panel, to facilitate UV treatment of the substrate, in a semiconductor processing apparatus, solar panel processing apparatus and a display processing apparatus.    ADVANTAGE - The reflector includes a secondary reflective coating applied to a back surface to reflect back the UV radiation that passes through a curved reflective surface at a front part of the longitudinal strip so as to rapidly dissipate heat accumulated in the longitudinal strip, thus processing and treating the substrate in an efficient manner, and hence enhancing service life of UV sources.    DETAILED DESCRIPTION - The dichroic coating comprises a multilayer film composed of different dielectric materials. INDEPENDENT CLAIMS are also included for the following:    (1) an UV lamp module comprising an elongated UV lamp    (2) a substrate process chamber comprising a substrate support    (3) a method for treating a substrate with UV radiation.    DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of an UV lamp module comprising a UV lamp and a primary reflector positioned above a quartz window and a substrate.    UV lamp (22)    UV lamp reflector (24)    Elliptical or parabolic centrally positioned reflector (28)    Longitudinal strip (30)    Coolant gas (42)    Elliptical or parabolic side reflectors (70, 72)    Arcuate reflective surface (74, 76)    Parabolic-type surface (80)