TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: The method-1 further comprises: processing the sample in a hydrogen-rich ambient at a pressure below atmospheric pressure; pre-cleaning the sample prior to hydrogenation, where the wafer is pre-cleaned by placing the sample proximate a UV source and source of a cleaning gas at a pressure at or below atmospheric pressure; etching the sample using a UV-opaque mask to shield a portion of the sample from UV light; and using the electrode to provide a voltage to the sample during etching. The method-2 further comprises providing a temperature above 30 degrees C. In the method-3, the cleaning gas is ozone. The method-3 further comprises the step of hydrogenating the sample after cleaning, where the step comprises: providing a top electrode comprising a UV-transparent material and a metal contact such that a gap exists between the top electrode and the sample location; providing hydrogen gas to the sample at the gap; and providing an electric field to the metal contact. Preferred Components: The metal contact is: serpentine; mesh comprising a mesh size, where the mesh size is less than a width of the gap; encapsulated within UV-transparent portion; placed between silica glass and sealed by vacuum-grade epoxy; and charged to alter a rate of hydrogenation. The distance between a first and a second portion of the serpentine metal contact is less than a width of the gap. The top electrode is adapted to rotate such that the sample is evenly irradiated with UV light by the source. The gap is filled with process gas, where the process gas comprises hydrogen or deuterium, and is introduced into the gap at above atmospheric pressure. The sample location further comprises a dielectric, and is adapted to rotate relative to the top electrode such that the sample is evenly irradiated with UV light by the source. The electric field is an alternating electric field or a static electric field, where the electric field enhances or retards the rate of hydrogenation. The cleaning gas is hydrogen and/or ozone.