NOVELTY - UV-transparent electrode assembly (10), comprises: a sample location (14) adapted to receive a sample (24) comprising a metal base; a source of UV light; and a top electrode (12) disposed between the source and the sample location comprising a UV transparent portion, and a metal contact (16) disposed proximate the UV transparent portion, where the top electrode is disposed proximate the sample location such that a gap exists between the sample location and the top electrode, and such that when the sample is placed at the sample location, the top electrode does not touch the sample.    USE - The UV-transparent electrode assembly is useful for: hydrogenation of a sample, which is a semiconductor wafer; extracting hydrogen from a semiconductor wafer; and cleaning a sample (all claimed).    ADVANTAGE - The UV-transparent electrode assembly: exhibits greater processing flexibility and control; is cost effective; and is an extremely versatile tool for semiconductor processing.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for:    (1) a method-1 for hydrogenating a sample comprising: placing the sample at a sample location; providing a top electrode comprising a UV-transparent material and a metal contact such that a gap exists between the top electrode and the sample location; providing hydrogen gas to the sample at the gap; irradiating the sample with UV-light; and providing an electric field to the metal contact during irradiation;    (2) a method-2 for extracting hydrogen from a semiconductor wafer comprising: placing the sample at a sample location; providing a top electrode comprising a UV-transparent material and a metal contact such that a gap exists between the top electrode and the sample location; applying a high electric field near the sample location; irradiating the sample with UV-light; and providing a pressure of at or below atmospheric pressure to the sample; and    (3) a method-3 for cleaning a sample comprising: placing the sample at a sample location; placing the sample location proximate a UV source and a source of a cleaning gas at a pressure at or below atmospheric pressure; and providing UV light and the cleaning gas to the sample.    DESCRIPTION OF DRAWING(S) - The figure shows a side view of an electrode assembly for the hydrogen processing of a semiconductor.    Electrode assembly (10)    Top electrode (12)    Sample location (14)    Metal contact (16)    Sample (24)