NOVELTY - Forming a doped layer comprised of zinc oxide and at least one metal-containing species selected from aluminum (Al-), gallium (Ga-), indium (In-), thallium (Tl-) and boron (B)-containing species on a substrate, involves contacting a precursor vapor with the substrate to deposit the doped layer on it, where the precursor vapor is comprised of at least one primary precursor comprising at least one zinc-containing compound and at least one secondary precursor comprising at least one metal selected from Al, Ga, In, Tl and B complexed with at least one N,O polydentate ligand.    USE - For forming a doped layer comprised of zinc oxide and at least one metal-containing species selected from aluminum (Al-), gallium (Ga-), indium (In-), thallium (Tl-) and boron (B)-containing species on a substrate (claimed), used in semiconductor industry to produce thin films; and in thin film photovoltaic and organic photovoltaic devices, flat panel displays, liquid crystal display devices, solar cells, electrochromic absorbers and reflectors, energy-conserving heat mirrors, antistatic coatings (e.g. for photomasks), solid state lighting (LEDs and OLEDs), induction heating, gas sensors, optically transparent conductive films, transparent heater elements (e.g. for various antifogging equipment such as freezer showcases), touch panel screens and thin film transistors as well as low emissivity and/or solar control layers and/or heat ray reflecting films in architectural and vehicular window applications.    ADVANTAGE - The layer prepared by the method exhibits desired combination of volatility and stability. The method provides suitable precursors for chemical vapor deposition such as atmospheric pressure chemical vapor deposition of layers of metal oxides in which the physical properties of the precursors are controlled by the selection of particular ligands to complex the metals used in the precursors. Using the method, it is possible obtain coatings that are electrically conductive, transparent to visible light, reflective to infrared radiation and/or absorbing to ultraviolet light. The method provides zinc oxide-coated transparent substrate materials exhibiting high visible light transmittance, low emissivity properties and/or solar control properties as well as high electrical conductivity/low sheet resistance. The method is cost effective method of making pyrolytic zinc oxide coatings at commercially viable growth rates on transparent substrate materials having a glass transition point (Tg) of less than 400 degrees C.