NOVELTY - Manufacturing stacked film (100, 102, 104) involves subjecting semiconductor substrate (10, 20, 30) to radical oxidation reaction to form radical oxide layer on surface of semiconductor substrate; annealing radical oxide layer in hydrogen atmosphere to convert radical oxide layer to first passivation layer (18); and disposing second passivation layer (28) on first passivation layer.    USE - For manufacturing a stacked film useful in photoelectric conversion device e.g. solar cell which converts solar energy into electrical energy.    ADVANTAGE - The surface textured semiconductor substrate can increase surface area to increase the light absorption rate and decrease reflectance, thus improves electrical operation characteristics of solar cell. The passivation layers function as anti-reflective coating for decreasing light reflection rate at surface of solar cell and increasing selectivity of specific wavelength region and improves contact characteristic with silicon existing at surface of semiconductor substrates, thus increasing efficiency of solar cell. The rear electrode can be made of opaque metal such as aluminum, and may be formed on front side of dielectric layer to reflect light passing the semiconductor substrates back into semiconductor substrate, thus preventing light leakage to increase efficiency.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacturing solar cell involving providing semiconductor substrate comprising first and second semiconductor layers including first and second type of semiconductor material; disposing stacked film on semiconductor substrate; and disposing first and second electrodes electrically connected with first and second semiconductor layers.    DESCRIPTION OF DRAWING(S) - The figure shows cross-sectional view of solar cell including stacked film.    Semiconductor substrates (10, 20, 30)    Passivation layers (18, 28)    Stacked films (100, 102, 104)    Front electrode (130)    Rear electrode (150)