NOVELTY - The apparatus has a first transfer chamber (101), a film formation chambers (103-105) and a buffer chamber (102a-102c) provided between the first transfer and film formation chambers. A slit (113a-113g) is provided in buffer chamber. A second transfer chamber (106) includes a roller (120). The slit is provided with a touch roller (112) that is in contact with a film formation surface of a substrate (121). The transfer chamber (101) includes a roller (111). The film formation chamber includes discharging electrodes (115).    USE - Apparatus for forming film e.g. semiconductor film such as silicon film, germanium film and silicon film containing germanium on substrate such as polyethylene naphthalate (PEN) film, polyethylene terephthalate (PET) film and polybutylene naphthalate (PBN) film, used in manufacture of photoelectric conversion device such as solar battery, photo sensor of semiconductor device using electronic appliance such as computer, display, cellular phone and television.    ADVANTAGE - The occurrence of a curled substrate in film formation is suppressed. A highly reliable photoelectric conversion device is obtained by suppressing occurrence of damage in a light receiving region, so that the photoelectric conversion device with high reliability is obtained. A film is formed over a surface opposite to a light receiving region over a substrate, so that a touch roller is in contact with a film formation surface. Thus the damage to the light receiving region of an element can be prevented. The occurrence of curl can be suppressed in a boundary between a region where a film is formed and a region where a film is not formed. Thus damage to a light receiving region of an element can be prevented. A film having higher quality can be obtained by separating the electrodes. One discharging electrode is sufficient as long as stable electric power can be supplied.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the film formation apparatus.    Transfers chambers (101,106)    Buffer chamber (102a-102c)    Film formation chamber (103-105)    Rollers (111,120)    Touch roller (112)    Slits (113a-113g)    Substrate (121)