TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: Heating occurs in the furnace with at least one anti-stiction plate within the furnace. Processing precursor layer in group via environment further comprises vaporizing a first group VIA material and then condensing the VIA material onto the substrate; and vaporizing a second group VIA material and then condensing the second VIA material onto the substrate and any material already on it. It also comprises heating the substrate to a first plateau temperature; heating the substrate to a second plateau temperature, lower than the first; providing a VIA vapor source in close proximity to a substrate at a temperature lower than a condensation temperature of the VIA vapor; heating a VIA material printed on a sacrificial substrate or conveyor to vaporize the VIA material in close proximity to the substrate; or heating a second VIA material printed on the sacrificial substrate or conveyor to vaporize the second VIA material in close proximity to the substrate. Preferred Components: The anti-stiction surface extends only along a bottom inner surface of the furnace. The furnace comprises a non-porous, non gas permeable material; or the furnace comprises muffle with heater element spaced apart and not in contact with the muffle. It comprises a material different from the material used for the anti-stiction surface. The anti-stiction surface is formed from a gas porous material. The anti-stiction surface comprises of a material with a coefficient of friction of about 0.5 or less at 500 degrees C; the anti-stiction surface comprises of a material with a coefficient of friction of about 0.4 or less at 500 degrees C; the anti-stiction surface comprises of a material with a coefficient of friction of about 0.2 or less at 500 degrees C; or the anti-stiction surface comprises of a material with a coefficient of friction of about 0.1 or less at 500 degrees C. The substrate is pulled along a path through the furnace over a high-temperature anti-stiction material at one location and over a low temperature anti-stiction material at a different location along the path. The anti-stiction material is configured as hearth plates lining at least the bottom surface of the furnace. The reduced height portion is no more than half of interior chamber portions before or after the reduced height portion; the reduced height portion is no more than 0.9 of interior chamber height of portions before or after the reduced height portion; the reduced height portion is no more than 0.75 of interior chamber height of portions before or after the reduced height portion; the reduced height portion is no more than half of exterior chamber portions before or after the reduced height portion; the reduced height portion is no more than 0.9 of exterior chamber height of portions before or after the reduced height portion; or the reduced height portion is no more than 0.75 of exterior chamber height of portions before or after the reduced height portion.