NOVELTY - Making a functional film (10), comprises (a) supplying a lengthwise supporting member (12) having a laminate film (20) provided on a back surface side of the supporting member and having a self-supporting property, (b) forming a film of an inorganic material on a front surface side of the supporting member while transporting the supporting member under a vacuum, and (c) winding the supporting member.    USE - The method is useful for making a functional film (claimed), which is gas barrier films, protective films and optical films such as optical filters and antireflection films, where the optical films is useful in various devices including display devices such as LCDs and organic electroluminescent displays, semiconductor devices and thin-film solar cells.    ADVANTAGE - The method provides high-quality functional film with reduced defects such as cracks and cutouts in an inorganic film and having high producibility by transporting a supporting member with stability without causing degradation in performance when the inorganic film is grown on the supporting member.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for making a functional film (10), comprises: (a) supplying a lengthwise supporting member (12) having a laminate film (20) provided on a back surface side of the supporting member and having a self-supporting property, (b) forming a film of an inorganic material on a front surface side of the supporting member while transporting the supporting member under a vacuum, and (c) winding the supporting member; (a1) feeding a lengthwise supporting member having a laminate film having solvent resistance and provided on the back surface side of the supporting member, and applying a coating solution containing a solvent on the front surface side of the supporting member, and drying and setting the coating solution to form an organic film (14) while transporting the supporting member, and (b1) forming an inorganic film (16, 18) on the organic film while transporting under a reduced pressure the supporting member on which the organic film is formed; or (A) feeding a lengthwise supporting member having a black laminate film provided on a back surface side of the supporting member and having self-supporting property, and forming an organic film on a front surface side of the supporting member while transporting the supporting member, (B) forming an inorganic film on the organic film while transporting the supporting member under a condition at a reduced pressure, and (C) inspecting a surface of the supporting member in the state of having the black laminate film provided.    DESCRIPTION OF DRAWING(S) - The figure shows a schematic representation of functional film.    Functional film (10)    Supporting member (12)    Organic film (14)    inorganic film (16, 18)    Laminate film. (20)