NOVELTY - Apparatus (700) for inspecting edge of substrate comprises light source; two-dimensional beam deflector for receiving light beam and creating semi-annular scanning beam; first flared parabolic surface (714) for directing semi-annular scanning beam onto substrate (716); creating specularly reflected light (712) from edge of substrate; second flared parabolic surface (720) for receiving and directing specularly reflected light; detector (726, 728) for receiving directed specularly reflected light and producing signals; and analyzer for analyzing signals and detecting defects of substrate.    USE - For optical inspection of substrates on which integrated circuits are formed; useful in applications such as monolithic semiconducting substrate, flat panel display, solar cell and charge coupled devices.    ADVANTAGE - The apparatus has deflected focus beam to scan around substrate edge, without physically moving an inspection head around curvature of the substrate edge (from top to bottom), thus increasing the throughput of inspection apparatus.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for inspecting an edge of substrate involving producing light beam with light source; receiving light beam with two-dimensional beam deflector; producing semi-annular scanning beam; receiving semi-annular scanning beam with first flared parabolic surface; directing semi-annular scanning beam with first flared parabolic surface onto edge of the substrate; creating specularly reflected light; receiving the specularly reflected light with second flared parabolic surface and directing specularly reflected light to detector, receiving directed specularly reflected light with detector; producing signals with detector; and analyzing signals to detect defects at edge of the substrate.    DESCRIPTION OF DRAWING(S) - The figure shows functional block diagram of substrate edge inspection system.    Apparatus (700)    Reflected beam (712)    First flared parabolic reflector (714)    Substrate (716)    Second flared parabolic reflector (720)    Specular detectors (726, 728)