TECHNOLOGY FOCUS - ELECTRONICS - Preferred Components: The first layer comprises a dielectric material. The second layer comprises a photovoltaic material or silicon. The transparent conductive material directly contacts the second layer. Preferred Method: The method (M1) further involves: forming the first deposition medium from a first gas phase precursor; forming a first plasma from the first gas phase precursor; deactivating the first plasma, where the first deposition medium comprises the deactivated first plasma; forming the second deposition medium from a second gas phase precursor; deactivating the second plasma, where second deposition medium comprises the deactivated second plasma; forming a back reflector, where the back reflector being disposed between the substrate and the first layer; patterning the back reflector; patterning the second layer; forming a transparent conductive material over the second layer; patterning the transparent conductive layer; forming a protective layer over the patterned transparent conductive layer. The patterning of the back reflector, the patterning of the second layer, and the patterning of the transparent conductive layer forms several photovoltaic devices. The photovoltaic devices are connected in series. The second layer directly contacts the back reflector.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Components: The substrate comprises a metal. The first layer comprises an oxide or nitride. The first deposition medium comprises silicon. The first gas phase precursor comprises silicon, carbon, fluorine, or hydrogen. The first layer is formed from the first deposition medium in the presence of air, oxygen-containing gas or nitrogen-containing gas. The second deposition medium comprises silicon. The silicon is in the form of amorphous silicon, nanocrystalline silicon, or microcrystalline silicon. The second gas phase precursor comprises silicon or germanium; hydrogen or fluorine; Te, Se, S, Cd, Zn, In, or Ga. The back reflector comprises a metal oxide, where the metal oxide include a first metal; and further comprises a second metal. The transparent conductive material is an oxide comprising zinc, indium or tin.    TECHNOLOGY FOCUS - POLYMERS - Preferred Components: The first layer comprises a polymer. The polymer comprises carbon or fluorine.