NOVELTY - Thin-layer solar module comprises a transparent substrate (1), a transparent front electrode layer (2) made of doped zinc oxide, a semiconductor layer (3), a rear electrode layer (4) made of doped zinc oxide and a reflective layer (5). The transparent front electrode layer made of doped zinc oxide is deposited on the substrate. The rear electrode layer made of doped zinc oxide is deposited on the semiconductor layer. The reflective layer averted on the light incidence side exhibits a rear side.    USE - Used as a thin-layer solar module.    ADVANTAGE - The thin-layer solar module uses highly doped targets at low temperature for its production, thus the thin film solar module with high quality can be produced with less energy and machine cost.    DETAILED DESCRIPTION - Thin-layer solar module comprises is a transparent substrate (1), a transparent front electrode layer (2) made of doped zinc oxide, a semiconductor layer (3), a rear electrode layer (4) made of doped zinc oxide and a reflective layer (5). The transparent front electrode layer made of doped zinc oxide is deposited on the substrate. The rear electrode layer made of doped zinc oxide is deposited on the semiconductor layer. The reflective layer averted on the light incidence side exhibits a rear side. The content of foreign atom in the doped zinc oxide-front electrode layer decreases from the substrate to the semiconductor layer and/or the content of foreign atom in the doped zinc oxide-rear electrode layer decreases from the semiconductor layer to the reflective layer. An INDEPENDENT CLAIM is also included for producing the thin layer solar module, comprising depositing the doped zinc oxide-front electrode layer and/or the doped zinc oxide-rear electrode layer in a deposition system by sputtering.    DESCRIPTION OF DRAWING(S) - The figure shows a schematic representation of the thin layer solar module.    Substrate (1)    Front electrode layer (2)    Semiconductor layer (3)    Rear electrode layer (4)    Reflective layer (5)