NOVELTY - An inverting structure corresponding to fine structure (14) is formed on the surface of a mold containing fluoropolymer. A solution containing hardenable substance is supplied to surface of mold, and a coating layer is formed. Solvent is removed, and hardening reaction is carried out to produce hardening precursor. A base material (12) is bonded to surface of layer of precursor, and layer is separated to obtain molded hardening precursor. The precursor is hardened, and microstructure (10) containing hardened substance (16) is manufactured.    USE - Manufacture of microstructure. Uses include but are not limited to functional glass, optical element e.g. wavelength filter, wavelength plate, diffraction grating, microlens and photonic crystal, display panel, solar cell panel and light emission panel.    ADVANTAGE - The microstructure having excellent dimensional accuracy is manufactured with improved productivity.    DETAILED DESCRIPTION - An inverting structure corresponding to fine structure is formed on the surface of a mold containing fluoropolymer. A solution containing hardenable substance is supplied to surface of mold, and a coating layer is formed. Solvent is removed at temperature less than softening temperature of fluoropolymer, and hardening reaction is carried out to produce hardening precursor. A base material is bonded to surface of layer of precursor, and layer is separated to obtain molded hardening precursor. The precursor is hardened, and microstructure containing hardened substance is manufactured. The solution containing hardenable substance contains tetrafunctional silane of formula: Si(X1)4, trifunctional silane of formula: RSi(X2)3, fluorine-containing surfactant, organic solvent and water. The molar ratio of trifunctional silane and tetrafunctional silane is 0.03-1.    X1,X2=1-6C alkoxy;and    R=1-10C optionally substituted monovalent organic group.    DESCRIPTION OF DRAWING(S) - The drawing shows the sectional view of microstructure.    Microstructure (10)    Base material (12)    Fine structure (14)    Hardened substance (16)    Water repellent thin film (18)