NOVELTY - Plasma source comprises: (a) a vacuum chamber; (b) discharge portions, each comprising a discharge tube, a permanent magnet, and a radiofrequency (RF) antenna, and each discharge tube is channeled with the vacuum chamber; and (c) an RF power distribution circuit, electrically coupled to the discharge portions for distributing RF power to the discharge portions, where the RF power distribution circuit further comprises branches, and where each branch comprises a branch circuit and the branches of the same order comprise the same number of branch circuits.    USE - The plasma source is used in film formation processes such as plasma enhanced chemical vapor deposition (PECVD) for making solar cells, semiconductor devices, and flat-panel displays.    ADVANTAGE - The plasma source has permanent magnets that use an RF power distribution circuit so that an RF power supply is capable of providing each of discharge tubes with the same RF power.    DETAILED DESCRIPTION - Plasma source comprises: (a) a vacuum chamber; (b) discharge portions, each comprising a discharge tube, a permanent magnet, and a radiofrequency (RF) antenna, and each discharge tube is channeled with the vacuum chamber; and (c) an RF power distribution circuit, electrically coupled to the discharge portions for distributing RF power to the discharge portions, where the RF power distribution circuit further comprises branches, where each branch comprises a branch circuit and the branches of the same order comprise the same number of branch circuits, where the branch circuits of the same branch have the same length of transmission paths, and where each branch circuit of a last branch is electrically coupled to an RF antenna of one of the discharge portions so that the discharge portions have the same impedance.    DESCRIPTION OF DRAWING(S) - The drawing shows a top view of the plasma source.    Vacuum chamber (11)    Discharge tube (12)    Permanent magnet (13)    RF antenna (14)    Gas inlet (15)    RF power supply (16)    Connecting wire (18)    First-order branch (171)    Second-order branch (172)    Third-order branch (173)    Branch circuits (1711,1721,1731)