NOVELTY - Producing a thin-film solar module, comprises: depositing several sublayers consisting of at least one microcrystalline sublayer containing a semiconductor layer (3) on a transparent front electrode layer (2) in a first coating system (15) by chemical vapor deposition; removing the module from the deposition system; and coating the module with the additional layers in an additional coating system (18) in vacuum, where the deposit of atmospheric components is removed from the last deposited sublayer of the semiconductor layer in the additional coating system before depositing the layers.    USE - The method is useful for producing a thin-film solar module.    ADVANTAGE - The method provides stable high performance to the solar module.    DETAILED DESCRIPTION - Producing a thin-film solar module, comprises: depositing several sublayers consisting of at least one microcrystalline sublayer containing a semiconductor layer (3) on a transparent front electrode layer (2) in a first coating system (15) by chemical vapor deposition; removing the module from the chemical vapor deposition system; and then coating the module with the additional layers in an additional coating system (18) in vacuum, where the deposit consisting of atmospheric components, resulted from at least a vacuum-break between the first coating system and the additional coating system, is removed from the last deposited sublayer of the semiconductor layer in the additional coating system before depositing the additional layers of the semiconductor layer.    DESCRIPTION OF DRAWING(S) - The figures 1, 2, 3 and 4 show a schematic representation of a section through a photovoltaic thin film module, a section through the sublayers of the semiconductor layer after their deposition, a section through the semiconductor layer after their deposition on the front electrode layer, and a system for carrying out the method, respectively.    Transparent front electrode layer (2)    Semiconductor layer (3)    Cell (7)    First coating system (15)    Additional coating system (18)