NOVELTY - The manufacturing method involves peeling off a protective film from a substrate. The substrate and protective film is transported in a longitudinal direction along different transporting paths. The surface to be treated is treated while transporting substrate to form functional film. The treated substrate and protective film is re-adhered to cover surface to be treated with protective film to form a re-adhered laminated material roll (18).    USE - Manufacturing method of functional film such as gas barrier film for protecting surface of substrate. Can also be used in portions requiring moisture resistance in optical device, display such as LCD and organic electroluminescent display, semiconductor manufacturing apparatus, thin-film solar cell, and packaging material which is used to package food, clothing, and electronic components.    ADVANTAGE - The exposure of the substrate surface or the formed functional layer can be reduced to the required minimum, such as during film formation, etc., and the surfaces requiring protection are reliably protected, so that damage caused by contact with other components is greatly inhibited and a reduction in characteristics arising from damage, etc. is prevented, and a high-quality product can be stably produced. The substrate surface and the surface after treatment can be suitably protected, and additionally, even in production of functional films obtained by forming several layers of functional layers, the protection can be achieved by a single protective film, and increases in production costs arising from protective films can be greatly suppressed. By using a protective film in which the adhesive layer is provided by co-casting when the plastic film itself is melt-deposited, more optimal adhesive strength can be attained. The amount of adhesive material remaining on the front surface of the substrate when the protective film is peeled off from the laminated material can be reduced, so that production of a high-quality functional film is enabled. By using a protective film in which the adhesive layer is formed by co-casting, out gassing from the adhesive material can be reduced, so that adverse effects when handled in a vacuum system are minimized. The adverse effects on film formation due to excess gas, such as generation of defects such as cracks and voids in the functional layer are also inhibited. The manufacturing process can be used in formation of a functional layer wherein cleanliness and smoothness of the film formation surface or prevention of damage to the formed functional layer are required in order to obtain a high-quality product. Since the protective film is also transported under reduced pressure, the foreign matter such as dust can be prevented from attaching to the protective film when it is transported in the state where it has been peeled from the substrate. The protective film is heated before being adhered to the substrate, so that the temperature difference between it and the substrate is reduced. Thus the wrinkling of the protective film when the substrate and the protective film are re-adhered can be prevented, and proper adhesion can be performed. The laminated material is cut into sheets at the final product stage so as to prevent curling and peeling of the protective film. Hence problems in product handling can be prevented.    DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of the film formation apparatus.    Film formation apparatus (10)    Vacuum chamber (12)    Film formation chamber (14)    Unwinding/winding chamber (16)    Laminated material roll (18)