NOVELTY - A water-free composition is applied to a substrate. This is dried as necessary and then converted into a metal oxide-containing layer. In the applied composition there is at least one solvent and a metal oxo alkoxide of the generic formula: MxOy(OR)z(O(R'O)CH)aXb(R''OH)d in which x=3-25, y=1-10, z=3-50, a=0-25, b=0-20, c=0-1, d=0-25, M=In, Ga, Sn and/or Zn, R, R' and R'' are organic radicals. X=F, Cl, Br or I. Variant formulae are provided to specify the metal oxo alkoxide.    USE - To produce layers containing metal oxide, especially to make semiconductor components. The layers are used to manufacture electronic components, especially transistors, diodes, sensors and solar cells (claimed).    ADVANTAGE - The method is used to produce layers containing oxides of: In, Ga, Sn and/or Zn, among which indium (III) oxide, In2O3, is a promising semiconductor because of the large band gap between 3.6 and 3.75 eV. The method produces metal oxide-containing layers from non-aqueous solutions. It avoids use of high vacuum. Energy is required for conversion of the precursors or educts. This is readily introduced and evenly distributed using the methods described. Disadvantages of sol-gel techniques are avoided. Metal oxide layers are produced with uniform and reproducible stoichiometry, greater homogeneity and excellent electrical performance.    DETAILED DESCRIPTION - The metal oxo alkoxide is the sole metal oxide precursor used in the process. It is present in proportions of 0.1-15 wt% referred to the total mass of the water-free composition. The solvent is aprotic or weakly protic. It is selected from: methanol, ethanol, isopropanol, tetrahydro furfuryl alcohol, tertiary butanol and toluene. The viscosity of the composition is 1 mPa.s to 10 Pa.s. The substrate is glass, silicon, silicon oxide, a metal- or transition metal oxide, a metal or a polymer. The water-free composition is applied to the substrate using printing, spraying, rotary coating, immersion, meniscus coating, silt coating, slot-die coating, or curtain coating. Before, during or after conversion, the layer is irradiated with UV-, IR or visible radiation. An INDEPENDENT CLAIM is included for the metal oxide layer produced.