TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: At least a portion of the precursor vapor is generated by volatilizing a precursor composition comprised of the at least one primary precursor and the at least one secondary precursor. In the method, a transparent conductive zinc oxide layer is formed on the substrate, where the substrate is a glass substrate. The contacting is carried out at about atmospheric pressure. The substrate is maintained at a temperature of less than 400 degrees C during the contacting. At least one oxygen-containing compound is contacted with the substrate in addition to the at least one primary precursor and the at least one secondary precursor. Preferred Components: The at least one primary precursor comprises at least one zinc-containing compound of formula R1R2Zn or R1R2Zn-(L)n. The N,O polydentate ligand is an enaminoketone or its tautomer. The N,O polydentate ligand has the structure R'1C(=O)C(R'2)HC(=NR'3)R'4 or R'1C(=O)C(R'2)=C(NHR'3)R'4. The at least one metal M is Al or B. The N,O polydentate ligand forms a six-membered ring including metal M or forms a five-membered ring including metal M. The N,O polydentate ligand includes at least one oxygen atom in a ketone group; or at least one nitrogen atom in an imine or enamine group; or at least one oxygen atom in a ketone group and at least one nitrogen atom in an imine group that is capable of forming a tautomer and where the ketone group and the imine group are beta to each other; or at least one oxygen atom in an ether group; or at least one nitrogen atom in an amine group; or at least one oxygen atom in an alkoxy group. The at least one secondary precursor comprises a complex of formula (ia) or (ib). The at least one secondary precursor is obtained by reacting a trialkyl aluminum or trialkyl boron with a ligand containing an oxygen atom, a nitrogen atom, and an active hydrogen attached to either the oxygen atom or the nitrogen atom, where the oxygen atom and the nitrogen atom are separated by two or three carbon atoms.R1 and R2=alkyl or aryl;L=a ligand (preferably polydentate ligand or monodentate ligand);n=1 or 2;R'1 and R'4=aryl, haloaryl, 1-6C alkyl or 1-6C haloalkyl (preferably methyl or halomethyl);R'2=H, 1-6C alkyl or 1-6C haloalkyl (preferably H);R'3=aryl, haloaryl, 1-6C alkyl, or 1-6C haloalkyl (preferably 1-6C alkyl);n'=0 or 1;X=OR1a;Y'=NR2a;M'=Al or B;R, R2b and R1a=methyl or ethyl;R2a=H, methyl or ethyl;X1=O;Y1=NR1aR2b.Provided that n is 1 if L is a polydentate ligand and n is 2 if L is a monodentate ligand. EXAMPLE - No suitable example given.