NOVELTY - A film is obtained by heating (H1) vapor deposition material to temperature (T2) which is lower than vapor deposition temperature (T3) of the organic material and higher than the boiling point or sublimation point (T1) of the compound (A), then again heating (H2) to increases the temperature more than vapor deposition temperature (T3) of the organic material, and lower than the decomposition temperature of the organic material, and forming vapor deposition film. The vapor deposition material contains compound (A) and organic material.    USE - Film is used for photoelectric conversion element (claimed), image pick-up element, optical sensor and solar cell.    ADVANTAGE - The film is manufactured with high purity. The photoelectric conversion element formed using the film has excellent stability, and durability.    DETAILED DESCRIPTION - A film is obtained by heating (H1) vapor deposition material to temperature (T2) which is lower than vapor deposition temperature (T3) of the organic material and higher than the boiling point or sublimation point (T1) of the compound (A), then again heating (H2) to increases the temperature more than vapor deposition temperature (T3) of the organic material, and lower than the decomposition temperature of the organic material, and forming vapor deposition film. The vapor deposition material contains compound (A) and organic material which does not perform purification by sublimation purification. The compound (A) in the vapor deposition material has boiling point lower than vapor deposition temperature (T3) or sublimation point (T1) of the organic material. The boiling point or sublimation point (T1) of the compound (A) is boiling point or sublimation point of the compound (A) in 1x 10-1 Pa. The vapor deposition temperature (T3) of the organic material is a temperature in which vapor-deposition rate of the organic material reaches 0.5 Angstrom /second. The decomposition temperature of organic material is temperature when 1 weight% or more weight reduction occurs, during the organic material is heated for 60 minutes at constant temperature, measured by differential thermal thermogravimetric measurement. INDEPENDENT CLAIMS are included for the following:    (1) photoelectric conversion element, which has a transparent conductive film, a photoelectric conversion film, and an electroconductive film; and    (2) manufacture of film.