NOVELTY - Manufacture of solar cell includes forming an N-type layer (140) on P-type layer using a crystalline silicon manufacturing apparatus (300). The formation of N-type layer comprises contacting the P-type layer with a gas comprising monosilane and hydrogen to form a sub N-type layer comprising an amorphous silicon layer; micro-crystallizing the amorphous silicon layer by irradiating light onto the amorphous silicon layer; and repeating the contacting and micro-crystallizing to form the N-type layer.    USE - Manufacture of solar cell.    ADVANTAGE - The method is able to form high-quality micro-crystalline silicon layer by forming amorphous silicon and post crystallizing consecutively and repeatedly using crystalline silicon manufacturing apparatus. It avoids problems of substrate deformation and impurity diffusion by repeatedly forming thin micro-crystalline silicon layers.    DETAILED DESCRIPTION - Manufacture of solar cell comprises forming a first electrode (120) on a substrate (110); forming a P-type layer on the first electrode; forming an N-type layer (140) on the P-type layer using a crystalline silicon manufacturing apparatus (300); and forming a second electrode on the N-type layer to form the solar cell. The formation of the N-type layer comprises contacting the P-type layer with a gas comprising monosilane and hydrogen to form a sub N-type layer comprising an amorphous silicon layer; micro-crystallizing the amorphous silicon layer by irradiating light onto the amorphous silicon layer; and repeating the contacting and micro-crystallizing to form the N-type layer. An INDEPENDENT CLAIM is included for crystalline silicon manufacturing apparatus comprising body (320), gas inlet (310), gas jetting units (340), hot wire (350), and lamp units (360).    DESCRIPTION OF DRAWING(S) - The drawing is a schematic view showing the manufacture of solar cell.    Substrate (110)    First electrode (120)    N-type layer (140)    Crystalline silicon manufacturing apparatus (300)    Gas inlet (310)    Body (320)    Gas jetting units (340)    Hot wire (350)    Lamp units (360)