NOVELTY - A layer stack consists of a transparent substrate (102) and a textured transparent conductive oxide layer (414). The conductive oxide layer consists of zinc-oxide-containing layers (I) sputtered by direct-current sputtering, multi-arc ion magnetron sputtering, and/or pulsed sputtering, and zinc-oxide-containing layer (II) sputtered by direct-current sputtering, multi-arc ion magnetron sputtering, and/or pulsed sputtering and deposited on direct-current-sputtered zinc-oxide-containing layer and having at least one layer property different from layer (I).    USE - Layer stack is used for thin-film solar cells e.g. multi-junction solar cell.    ADVANTAGE - The layer stack has a textured transparent conductive oxide layer which improves light absorption by enhancing light trapping. The layer stack enables mass-production of solar cells with excellent reliability. The path length within the desired layer in which photons should be absorbed for light conversion is increased, and efficiency of layer stack is improved.    DETAILED DESCRIPTION - A layer stack consists of a transparent substrate, and a transparent conductive oxide layer deposited over the substrate. The transparent conductive oxide layer consists of sputtered zinc-oxide-containing layers (I) sputtered by direct-current sputtering, multi-arc ion magnetron sputtering, and/or pulsed sputtering, and sputtered zinc-oxide-containing layer (II) sputtered by direct-current sputtering, multi-arc ion magnetron sputtering, and/or pulsed sputtering and deposited on direct-current-sputtered zinc-oxide-containing layer and having at least one layer property different from layer (I). The transparent conductive oxide layer is a textured layer. An INDEPENDENT CLAIM is included for manufacture of transparent conductive oxide layer of thin-film solar cell over a transparent substrate.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the layer deposited on substrate.    Substrate (102)    Layer (404a)    Textured transparent conductive oxide layer (414)