TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Process: The process further comprises separating (I) by distillation during the reaction or cleavage reaction. Preferred Components: The oligomeric silane or its mixture comprises perhalosilane, hydrohalosilane or hydrosilane and optionally its hydrolysis products and/or mixtures, preferably a disilicon compound, trisilicon compound, tetrasilicon compound, pentasilicon compound, hexasilicon compound and/or up to polysilicion compound. The oligomeric inorganic silane is a linear or branched silane compound of formula (SimHaXb) (II), a cyclic, crosslinked and/or polymeric silane compound of formula (SioHpXq) (III) or a polymeric silane compound of formula (SirHsXt) (IV) and/or optionally its hydrolyzate, preferably hexachlorodisilane, pentachlorodisilane, octachlorotrisilane, decachlorotetrasilane, dodecachloropentasilane, tetradecahexasilane and/or decachlorocyclopentasilane. The hydrogen halide is hydrogen chloride or hydrogen bromide. (I) is tetrachlorosilane, trichlorosilane, monosilane, monochlorosilane and/or dichlorosilane.m = greater than 0;a, b, p, q, s, t = 0 or greater than or equal to 1, where the sum of a and b is 2m+2, the sum of p and q is 20 and the sum of s and t is r;o = greater than 2, preferably 5; andr = greater than 2, preferably 6.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: The nitrogen containing catalyst is an amino functionalized compound with alkyl functionalized of secondary, tertiary and/or quaternary amino groups, preferably an aminoalkoxy silane compound of formula ((CzH2z+1O)3Si(CH2)dN(CgH2g+1)2) (V) (preferred) or its hydrolysis and/or condensation product, or a monomeric or oligomeric aminosilane chemically bonded at a carrier material; a hydrocarbon substituted amine compound of formula (NHxR3+k) (VI) or ((NHl(R1)4-l)+Z-) (VII); or a divinylbenzene crosslinked polystyrene resin having tertiary amine groups. The catalyst is chemically fixed on the carrier, preferably a silicate substrate. The catalyst is diisobutyl aminopropyltrimethoxysilane or its hydrolysis product and/or condensation product.R1 = linear, branched or cycloaliphatic or aryl 1-18C-hydrocarbon;z = 1-4;g = 1-10;d = 1-3;k = 0-2;R = linear, branched or cycloaliphatic or aryl 1-20C-hydrocarbon;l = 0-3; andZ = an anion, preferably halide. EXAMPLE - Hydrous ethanol (600 g) and 3-diisobutylaminopropyltrimethoxysilane (54 g) were mixed with silica catalyst carrier (300 g), heated at 123-128 degrees C and cooled. The beads were washed with anhydrous ethanol (600 g) and after one hour the liquid was sucked off. The beads were predried at 110-119 degrees C for one hour at 305-35 mbar and further dried at 9.5 hours for less than 1 mbar to obtained a catalyst. Sodium chloride (135 g) and concentrated sulfuric acid (270 ml) and 30% sodium methylate solution were submitted with indicator (phenolphthalein) and cooled. Further, hexachlorodisilane (57.7 g) was added and heated to 90 degrees C. The obtained reaction mixture was reacted with hydrochloric acid in the presence of the above catalyst, neutralized in the cooled sodium methylate solution and distilled. The obtained distillate (13.7 g) was comprised of hexachlorodisilane (97.2%).