NOVELTY - A transparent gas barrier film has transparent gas barrier layer having gas-barrier property formed on a resin substrate. The transparent gas barrier layer is laminated component containing a suboxide inorganic layer and carbon containing inorganic layer. The suboxide inorganic layer and carbon containing inorganic layer are laminated on the resin substrate. The carbon containing inorganic layer is formed by sputtering method using target containing carbonized material chosen from metal carbide and carbonization semimetal, carbon, and nitrogen.    USE - Transparent gas barrier film is used for organic electroluminescent element, solar cell and thin film battery (all claimed). Uses include but are not limited to electronic paper, liquid crystal display element, field emission display apparatus, electronic double capacitor and sealing material.    ADVANTAGE - The transparent gas barrier film is efficiently manufactured with excellent gas barrier property, transparency, water vapor transmission rate and sealing property.    DETAILED DESCRIPTION - A transparent gas barrier film has transparent gas barrier layer having gas-barrier property formed on a resin substrate. The transparent gas barrier layer is laminated component containing a suboxide inorganic layer and carbon containing inorganic layer. The suboxide inorganic layer and carbon containing inorganic layer are laminated on the resin substrate. The carbon containing inorganic layer is formed by sputtering method using target containing carbonized material chosen from metal carbide and carbonization semimetal, and layer containing metal and semimetal, carbon, and nitrogen. INDEPENDENT CLAIMS are included for the following:    (1) manufacture of transparent gas barrier film;    (2) organic electroluminescent element;    (3) solar cell; and    (4) thin film battery.    DESCRIPTION OF DRAWING(S) - The drawing shows the schematic view of manufacture of transparent gas barrier film.    Manufacturing apparatus (10)    Vacuum chamber (11)    Transparent resin film (12)    Can roll (15)    Cathode (16)