NOVELTY - The method (500) comprises forming carbon nanotubes over a surface of a substrate, forming a first layer such as a p-type amorphous silicon layer with a first type of dopants such as a p-type dopant doped over the surface of the substrate, forming (506) a gallium arsenide (GaAs) based layer on the first layer, forming a second layer such as a n-type amorphous silicon layer with a second type of dopants such as a n-type dopant doped on the GaAs based layer, annealing (508) the GaAs based layer formed on the substrate, and filling the carbon nanotubes with the GaAs layer.    USE - The method is useful for forming a solar cell device.    ADVANTAGE - The method is capable of forming the solar cell device in an economical and effective manner with high light absorption and conversion efficiency, increased electrical performance, improved stability and enhanced open circuit voltage, fill factor and normalized short circuit current.    DETAILED DESCRIPTION - The method (500) comprises forming carbon nanotubes over a surface of a substrate, forming a first layer such as a p-type amorphous silicon layer with a first type of dopants such as a p-type dopant doped over the surface of the substrate, forming (506) a gallium arsenide (GaAs) based layer on the first layer, forming a second layer such as a n-type amorphous silicon layer with a second type of dopants such as a n-type dopant doped on the GaAs based layer, annealing (508) the GaAs based layer formed on the substrate, and filling the carbon nanotubes with the GaAs layer. The step of forming the GaAs based layer comprises supplying a GaAs containing precursor disposed in a solvent to a processing chamber and evaporating the GaAs containing precursor solvent in the processing chamber to form the GaAs based layer on the substrate. INDEPENDENT CLAIMS are included for:    (1) a method of forming a structure suitable for use in a solar cell device; and    (2) a structure suitable for use in a solar cell device.    DESCRIPTION OF DRAWING(S) - The diagram shows a flow chart of a method of manufacturing a solar cell device.    Method of manufacturing a solar cell device (500)    Providing a substrate in a processing chamber (502)    Providing a solution based precursor (504)    Forming a GaAs layer with dopants (506)    Annealing the doped GaAs layer. (508)