NOVELTY - The apparatus (3a) has a set of stages arranged in a main chamber (31a) along height direction. A set of covers (102a) provided to the stages covers target objects (G) mounted on the stages. The stages and the covers surround the target objects mounted on the stages to form small processing spaces with capacity smaller than capacity of the main chamber. A driving unit vertically moves the covers or stages. A target object elevation unit vertically moves the target objects between target object mounting surfaces of the stages and spaces above the mounting surfaces.    USE - Batch type processing apparatus for use in a processing system simultaneously processing target objects i.e. large-sized glass substrates, using gate/thin-film formation or heat/plasma treatment for a solar cell module during fabrication of a flat panel display e.g. LCD and organic electroluminescent (EL) display.    ADVANTAGE - The apparatus provides a gas injection hole and a gas exhaust port at side surfaces of a recess, so that processing gas supplied from a gas supply line flows from the gas injection hole to the gas exhaust port without changing direction in the small processing spaces and the processing gas easily forms a laminar flow in the small processing spaces, thus increasing controllability of film thickness or film quality of a thin film to improve in-plane uniformity of the film thickness and the film quality in the target objects. The apparatus effectively utilizes the processing gas and applies atomic layer deposition (ALD) operation to the target objects to be processed. The covers are provided with cover temperature control mechanisms such that temperature of the covers can be controlled to level at which deposits are not deposited.    DESCRIPTION OF DRAWING(S) - The drawing shows a horizontal cross-sectional view of a processing system including a batch type processing apparatus.    Target objects (G)    Batch type processing apparatus (3a)    Main chambers (31a, 31b)    User interface (82)    Covers (102a)    Gas box (110)