NOVELTY - The method involves providing a process gas i.e. organometallic gas, to a surface of a substrate i.e. superstrate (201). Concentrated electromagnetic energy is directed from a source of energy to a portion of the surface of the substrate. The process gas is decomposed onto the substrate to form a deposited thin film structure that is made of metal such as indium, cadmium, tin and zinc. The thin film structure is a portion of a conductive layer (203). The organometallic gas is tin tetrachloride, dimethyl cadmium, dimethyl zinc and trimethyl indium.    USE - Method for depositing a thin film structure i.e. metal or metallic compound, on a substrate i.e. superstrate such as high transmission borosilicate glass of a thin film device i.e. cadmium-tellurium photovoltaic cell that is used to produce solar electricity in large ground-mounted systems and rooftop systems on commercial and residential buildings. Can also be used for thin film structure such as photo detector, diode application, and thin film displays to form gridline front contacts on crystalline solar cells such as silicon or Group III-V based concentrators such as gallium-arsenic and gallium-indium phosphide.    ADVANTAGE - The decomposed process gas positioned in dead areas is less transparent, and metallic with greater conductivity so as to improve efficiency of the PV module. The method enables providing thin film devices with decreased resistivity/increased conductivity in interconnection between cells without affecting an active area of PV cells.    DETAILED DESCRIPTION - The source of energy is laser, radio frequency, electron beam, ion beam, and infrared source. The conductive layer is made of transparent conductive oxide. INDEPENDENT CLAIMS are also included for the following:    (1) a thin film device comprising a substrate    (2) an apparatus for forming a selectively deposited thin film structure, comprising a chamber.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a layer system making up cells of a photovoltaic module.    Light (105)    Supersaturate (201)    Conductive layer (203, 211)    Semiconductor layers (207, 209)    Encapsulating glass (213)