NOVELTY - A silicon device structure comprises P-doped n+ type amorphous silicon film (6) formed on a silicon semiconductor film (8), and a wiring formed on the P doped n+ type amorphous silicon film, where the wiring is formed of a silicon oxide film (5) which is formed on surface of the P doped n+ type amorphous silicon film and is also formed of a copper alloy film (4), which is obtained by forming copper alloy containing Mn (1-5 atom.%) and P (0.05-1 atom.%) by sputtering.    USE - As silicon device structure used for thin film transistor structure for liquid crystal panel (claimed) or silicon solar cell structure.    ADVANTAGE - The silicon device structure provides improved saturation mobility performance of silicon device, and a sputtering target material used for forming the silicon device structure, by improving an alloy composition even in a case of a wiring film using a silicon oxide film and copper manganese alloy. The reduction of a manufacturing cost is achieved by using copper wiring with a smaller resistance than the resistance of a traditional aluminum wiring, and by using an oxide film obtained by irradiating the surface of the silicon semiconductor with oxygen plasma and omitting an expensive diffusion barrier layer made of molybdenum, and titanium. Further, reduction of a design cost required for a larger-sized liquid crystal panel and a higher image quality can also be achieved.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for sputtering target material, which is used for forming the silicon device structure, where copper alloy, the sputtering target material, is formed by being melted and alloyed by a casting method, containing Mn of 1-5 atom.% and P of 0.05-1 atom.%.    DESCRIPTION OF DRAWING(S) - The figure shows a schematic sectional view of silicon device structure.    Source electrode (1)    Drain electrode (2)    Pure copper film (3)    Copper alloy film (4)    Silicon oxide film (5)    P-doped n+ type amorphous silicon film (6)    Gate insulating film (9)    Gate electrode film (10)