NOVELTY - The solid material gas supply apparatus comprises a carrier gas supply section (1), a carrier gas dispersion unit (2), a dispersion chamber (3) that houses the dispersion unit and disperses the supplied carrier gas, a filling layer (4) in which a solid material is filled, a supply-out chamber that merges the solid material gas supplied from the filling layer, a supply-out section (6) of the solid material gas, a first mesh section that partitions the dispersion chamber and the filling layer, and a second mesh section that partitions the filling layer and the supply-out chamber.    USE - The solid material gas supply apparatus is useful for treating solid materials that are sublimated and supplied at a specified rate using a carrier gas, where the solid materials include solid organic compounds and solid organic metal compounds that are useful in semiconductors and solar cells, the solid organic compounds comprise phthalic acid, naphthalene and anthracene and the solid organic metal compounds comprise trimethylindium and bis-cyclopentadienyl magnesium and tetraethyl zinc.    ADVANTAGE - The solid material gas supply apparatus is capable of simply treating the solid materials thus stabilizing the material concentration of the solid material gas by adjusting the carrier gas flow rate at the primary dispersion unit based on the monitored remaining amount or the state of unevenness in the filling layer.    DETAILED DESCRIPTION - The solid material gas supply apparatus comprises a carrier gas supply section (1), a carrier gas dispersion unit (2), a dispersion chamber (3) that houses the dispersion unit and disperses the supplied carrier gas, a filling layer (4) in which a solid material is filled, a supply-out chamber that merges the solid material gas supplied from the filling layer, a supply-out section (6) of the solid material gas, a first mesh section that partitions the dispersion chamber and the filling layer, and a second mesh section that partitions the filling layer and the supply-out chamber. The first mesh section or the second mesh section is installed in the upper section of the filling layer, and is movable vertically downwards by its own weight. The dispersion unit is connected to the supply section, and is equipped with divergent flow paths that diverge the carrier gas and with spray nozzles installed in each of the divergent flow paths. The dispersion unit has spray nozzles in each of the dispersion chamber and the filling layer. A monitoring window or photo-sensors are installed on a side wall of the filling layer so that the filled amount of the solid material is monitored visually by sight or through output from the photo-sensors. The solid material sublimated and supplied at a specified rate by a carrier gas is filled inside the filling layer and passes through primary dispersion by diverging flow paths. The carrier gas that is passed through secondary dispersion by the first mesh section located on the supply side to the filling layer is supplied to the filling layer. The filled amount of the solid material is monitored at locations in the filling layer, and a flow rate of the carrier gas in the divergent flow paths is adjusted.    DESCRIPTION OF DRAWING(S) - The diagram shows a schematic view of a solid material gas supply apparatus.    Carrier gas supply section (1)    Carrier gas dispersion unit (2)    Dispersion chamber (3)    Filling layer (4)    Supply-out section. (6)