TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Method: In process (P1), a stream comprising the gaseous zinc-containing compound is introduced into at least one flow pathway and a stream comprising the gaseous oxygen-containing compound is introduced into at least one separate flow pathway. In process (P1), the zinc oxide coating is a pyrolytic coating and the glass substrate is moving when the zinc oxide coating is formed. The process (P1) further involves directing each stream through the at least one flow conditioner to increase the laminarity of each stream. The zinc oxide coating is formed on a glass ribbon in a float glass manufacturing process at essentially atmospheric pressure. In process (P1), a stream comprises at least one gaseous dopant compound. The glass substrate is at a temperature of 1112 degrees F (600 degrees C) to 1346 degrees F (730 degrees C). The process (P1) further involves selectively maintaining predetermined portions of the coating apparatus at a temperature within + or -50 degrees F (10 degrees C) of a predetermined set point temperature. In process (P1), a stream comprising the gaseous zinc-containing compound and gaseous acetonate compound and a stream comprising the gaseous oxygen-containing compound are introduced into separate flow pathways in the coating apparatus, where the oxygen-containing compound is water. The chemical vapor deposition (CVD) process (P2) for depositing a zinc oxide coating involves: providing a moving heated glass substrate supported on a bath of molten metal in a float glass manufacturing process and at essentially atmospheric pressure; providing a coating apparatus at, at least one predetermined location in the float bath chamber, and at a predetermined distance above the moving heated glass substrate; providing a source of a gaseous zinc-containing compound, a gaseous oxygen-containing compound, at least one inert gas, and gaseous acetyl acetonate; introducing a gaseous stream comprising the gaseous zinc-containing compound into a first flow pathway in the coating apparatus; introducing a gaseous stream comprising the gaseous oxygen-containing compound into a second flow pathway in the coating apparatus; introducing a gaseous stream comprising the at least one inert gas into a third flow pathway in the coating apparatus; introducing the gaseous acetyl acetonate into a flow pathway in the coating apparatus; maintaining the streams of gaseous compounds/inert gases separate while each flows through a flow conditioner at a predetermined flow velocity to increase the laminarity of each gaseous stream; and discharging the separate streams of gaseous compounds/inert gases from each flow conditioner, where mixing of the separate streams of gaseous compounds/inert gases occurs to form a pyrolytic zinc oxide coating on a surface of the glass substrate. In process (P2), zinc oxide coating is formed at a deposition rate of at least 50 nm/second on the surface of glass substrate. Preferred Components: The gaseous zinc-containing compound is an alkyl zinc compound. The acetonate compound is acetyl acetonate. The oxygen-containing compound is one selected from carbon dioxide, nitric oxide, nitrogen dioxide, nitrous oxide and/or oxygen. The at least one inert gas is selected from nitrogen, hydrogen, and/or helium. The at least one gaseous dopant compound is a gallium-containing compound or is an aluminum-containing compound. The stream comprising the gaseous gallium-containing compound further comprises gaseous HCl. Preferred Apparatus: The coating apparatus comprises a main body which partially defines at least two flow pathways of the at least two separate flow pathways and at least one exhaust gas passage. EXAMPLE - A control method of zinc oxide (ZnO) deposition without additive compound using a 5 slot coating apparatus was carried out as follows: all gaseous precursor compound supply lines were maintained at above the dew point. With Slot 1 being along the left side of the main body of the coating apparatus and Slot 5 being along the right side of the main body of the coating apparatus. The streams provided in each of the slots were as follows: Slot 1 and Slot 5: into these two slots a stream comprising a mixture of N2+H2O (in the form of steam) was introduced. For simplicity, a single evaporator was used to create the steam and N2 mixture which was equally divided and delivered as such to Slots 1 and 5. The steam and N2 mixture was generated by injecting liquid water into a heated evaporator. N2 carrier gas was added to the evaporator to convey the steam and N2 mixture into Slots 1 and 5. Water (3 ml per minute (ml/minute)) was injected into the evaporator and mixed with N2. The amount of N2 added to the evaporator was such that the total flow of N2+steam was equal to 20 standard liters per minute (slm), with 10 slm going into each of Slots 1 and 5. Slot 2 and Slot 4: a metered stream comprising N2 gas was introduced into each of Slots 2 and 4 at a flow rate of 10 slm. These inert gas streams delayed the mixing of the gaseous precursor compound flowing through Slot 3 and those flowing through Slots 1 and 5 when the gaseous precursor compounds/inert gases were discharged from the coating apparatus. Into Slot 3, a stream comprising a mixture of dimethyl zinc (DMZ) and N2 was introduced. The DMZ/N2 mixture was generated by using a standard bubbler maintained at a temperature of 20 degrees C. By passing a flow of helium (He) through the bubbler, a gas phase of 0.0087 mol/minute of DMZ was evaporated and mixed with the N2 to generate a stream with a total gas flow into and through Slot 3 of 10 slm. Under the above-described conditions, at a line speed of 0.5 m/minute, the glass substrates were conveyed under the coating apparatus. A zinc oxide coating having a thickness of 230 nm was deposited at a deposition rate of 10 nm/seconds. This zinc oxide film exhibited high haze and poor bonding to the glass substrate surface. A test method of ZnO deposition with an additive compound using a 5 slot coating apparatus was carried out as follows: all gaseous precursor compound supply lines were maintained at above the dew point. Slot 1 and Slot 5: using the experimental conditions described above in connection with control example, a stream comprising a gaseous mixture of N2 and H2O (in the form of steam) was introduced into and through Slot 1 and Slot 5. About 10 ml/minute of water was injected into the evaporator and the amount of N2 added to the evaporator was such that the total flow rate of N2 and steam was equal to 20 slm, with 10 slm going to each stream in Slot 1 and Slot 5. Slot 2 and Slot 4: a stream of 10 slm of N2 gas was introduced into each of Slots 2 and 4. Slot 3: the composition of the gaseous stream introduced into Slot 3 was modified from that of control example. The stream in Slot 3 comprised gaseous DMZ and an acetonate additive compound, namely acetyl acetonate. Two bubblers were used to generate a mixture of the two chemicals. Gaseous DMZ was generated by evaporation using a standard bubbler maintained at a temperature of 36 degrees C. By passing a flow of He through the bubbler, 0.077 mol/minutes of gaseous DMZ was evaporated. A second standard bubbler which contained the acetyl acetonate was maintained at a temperature of 60 degrees C. N2 gas was passed through the second bubbler to generate a flow of acetyl acetonate. The two gaseous precursor compounds were mixed in a pipe, and additional N2 was added to generate a stream which was introduced into Slot 3 having a total gas flow of 10 slm. Under these conditions, glass sheets were moved under the coating apparatus at a line speed of 1.8 m/minute. A 450 nm thick zinc oxide coating was deposited at a deposition rate of 68 nm/seconds. The coated glass exhibited haze of 4.8% and visible light transmission of 76%.