NOVELTY - A glue layer (2) and a gas barrier layer (3) containing silicon oxide are sequentially formed on plastic film (1) by plasma chemical vapor deposition, and gas barrier film is manufactured. The glue layer is formed by driving the base material on metal roll electrode, arranging counter electrode, supplying gas (G1,G2) between electrodes, and generating high density plasma by adjusting pressure to 0.5-20 Pa and applying frequency of 10 kHz to 30 MHz. The gas barrier layer is formed by dry coating method, and gas barrier film is manufactured.    USE - Manufacture of gas barrier film used for packaging of foodstuffs and pharmaceuticals, and back sheet of solar cell.    ADVANTAGE - The gas barrier film having excellent adhesiveness is manufactured with improved productivity and without generating contamination.    DETAILED DESCRIPTION - A glue layer and a gas barrier layer containing silicon oxide are sequentially formed on one or both surfaces of a plastic film used as base material by plasma chemical vapor deposition, and gas barrier film is manufactured. The glue layer is formed by driving the base material on metal roll electrode, which is a high frequency application electrode, arranging circular arc shaped ground electrode having one or more pairs of north and south pole magnets at surface as counter electrode, supplying gas (G1,G2) between electrodes, and generating high density plasma by adjusting pressure to 0.5-20 Pa and applying frequency of 10 kHz to 30 MHz. The gas barrier layer is formed by dry coating method, and gas barrier film is manufactured. The gas (G1) is chosen from tetraethyl siloxane, hexamethyl disiloxane, tetramethyl cyclotetrasiloxane, hexamethyldisilazane, triethyl silane, trimethylsilane, a monosilane, disilane, an octamethylcyclo tetrasiloxane, tris dimethyl aminosilane, tetrachlorosilane tetraethoxysilane and bistertiary-butylaminosilane. The gas (G2) is chosen from oxygen, ozone, water, hydrogen peroxide, ammonia, nitrogen, nitrous oxide, carbon dioxide, carbon monoxide, hydrogen, argon and helium. INDEPENDENT CLAIMS are included for the following:    (1) gas barrier film; and    (2) manufacturing apparatus of gas barrier film.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of gas barrier film.    Plastic film (1)    Glue layer (2)    Gas barrier layer (3)    Protective layer (4)