TECHNOLOGY FOCUS - INSTRUMENTATION AND TESTING - Preferred Apparatus: In the apparatus (A1), the substrate processing apparatus further comprises a solvent supply unit that supplies a solvent, lower in surface tension than water and capable of dissolving the hydrophobizing agent, to the substrate; where the hydrophobizing agent supply unit involves a unit that supplies a liquid of the hydrophobizing agent to the substrate; and the controller performs the hydrophobizing step that involves step of controlling the hydrophobizing agent supply unit to supply the liquid of the hydrophobizing agent to the substrate, and a pre-drying rinsing step of controlling the solvent supply unit to supply the solvent to the substrate after performing the hydrophobizing step and before performing the drying step; or the hydrophobizing agent supply unit comprises a unit that supplies a vapor of the hydrophobizing agent to the substrate, and the controller performs the hydrophobizing step that involves a vapor supply step of controlling the hydrophobizing agent supply unit to supply the vapor of the hydrophobizing agent to the substrate, and the drying step that involves a vaporizing step of controlling the drying unit to vaporize the hydrophobizing agent adhering to the substrate. The substrate processing apparatus according (A2) further comprises a water-soluble solvent supply unit that supplies a water-soluble solvent, higher in solubility in water than the first solvent, to the substrate, where the controller further performs a water-soluble solvent supply step of controlling the water-soluble solvent supply unit to supply the water-soluble solvent to the substrate to replace a liquid held by the substrate by the water-soluble solvent after performing the rinsing liquid supply step and before performing the first solvent supply step; a physical force applying unit that applies a physical force to the first solvent to be supplied from the first solvent supply unit to the substrate, where the controller performs the first solvent supply step that involves a physical replacement step of replacing the liquid held by the substrate by the first solvent by supplying the first solvent with the physical force applied to it by the physical force applying unit, to the substrate, and performs the first solvent supply step that further involves a replacement step of controlling the first solvent supply unit to supply the first solvent to the substrate to replace a liquid held by the substrate by the first solvent before the physical replacement step is performed, and the physical force applying unit involves vibration applying unit that applies vibration to the first solvent to be supplied from the first solvent supply unit to the substrate and/or liquid droplet forming unit that applies kinetic energy to the first solvent to be supplied from the first solvent supply unit to the substrate to form liquid droplets of the first solvent; and a drying unit that removes a liquid from the substrate to dry the substrate, and a non-contact state maintaining unit that maintains a state in which the substrate is not in contact with water, where the controller further performs a drying step of controlling the drying unit to remove the liquid from the substrate to dry the substrate after performing the hydrophobizing agent supply step, and a non-contact state maintaining step of controlling the non-contact state maintaining unit to maintain the state in which the substrate is not in contact with water from the end of the hydrophobizing agent supply step to the end of the drying step. The non-contact state maintaining unit comprises a drying agent supply unit that supplies a drying agent that does not contain water and is lower in boiling point than water to the substrate, and the controller performs the non-contact state maintaining step that involves a drying agent supply step of controlling the drying agent supply unit to supply the drying agent to the substrate to replace a liquid held by the substrate by the drying agent after performing the hydrophobizing agent supply step and before performing the drying step. The hydrophobizing agent supply unit comprises a hydrophobizing agent tank that stores a stock solution of the hydrophobizing agent to be supplied to the substrate, and a second solvent tank that stores a second solvent to be supplied to a flow path of the hydrophobizing agent leading from the hydrophobizing agent tank to the substrate, and the hydrophobizing agent supply unit is arranged to mix the stock solution of the hydrophobizing agent and the second solvent in the flow path to supply the mixed second solvent and stock solution of the hydrophobizing agent to the substrate.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Method: In the method (A), the substrate involves a metal film. In the method (A), the hydrophobizing step involves supplying a liquid of the hydrophobizing agent to the substrate, and the method further involves a pre-drying rinsing step of supplying a solvent, lower in surface tension than water and capable of dissolving the hydrophobizing agent to the substrate after performing the hydrophobizing step and before performing the drying step; or the hydrophobizing step involves a vapor supply step of supplying a vapor of the hydrophobizing agent to the substrate, and the drying step involves a vaporizing step of vaporizing the hydrophobizing agent adhering to the substrate. In the method (B), the hydrophobizing agent supply step involves step of mixing the second solvent and a stock solution of the hydrophobizing agent in a flow path of the hydrophobizing agent leading from a hydrophobizing agent tank, storing the stock solution of the hydrophobizing agent to be supplied to the substrate, and supplying the mixed second solvent and stock solution of the hydrophobizing agent to the substrate. The method (B) further involves water-soluble solvent supply step of supplying a water-soluble solvent, higher in solubility in water than the first solvent, to the substrate to replace a liquid held by the substrate by the water-soluble solvent after performing the rinsing liquid supply step and before performing the first solvent supply step; physical replacement step of supplying the substrate with the first solvent with a physical force to replace a liquid held by the substrate by the first solvent, and the first solvent supply step further involves a replacement step of supplying the first solvent to the substrate to replace a liquid held by the substrate by the first solvent before the physical replacement step is performed, where the physical replacement step involves supplying the first solvent with vibration to the substrate and/or making liquid droplets of the first solvent provided with kinetic energy collide with the substrate; and drying step of removing a liquid from the substrate to dry the substrate after performing the hydrophobizing agent supply step, and non-contact state maintaining step of maintaining a state in which the substrate is not in contact with water from the end of the hydrophobizing agent supply step to the end of the drying step, where the non-contact state maintaining step involves a drying agent supply step of supplying a drying agent that does not contain water and is lower in boiling point than water to the substrate to replace a liquid held by the substrate by the drying agent after performing the hydrophobizing agent supply step and before performing the drying step. The first solvent and the second solvent are the same type of solvent. In the method (B), a recess portion having a bottomed cylindrical shape is formed on the substrate. The substrate processing method (C) is a method for processing a substrate on which a pattern of a laminated film having a lower layer film and an upper layer film is formed, the first hydrophobizing agent is a hydrophobizing agent that hydrophobizes the lower layer film, and the second hydrophobizing agent is a hydrophobizing agent that hydrophobizes the upper layer film. The method (C) further involves water rinsing step of supplying a rinsing liquid that contains water to the substrate before the first hydrophobizing step is performed, and first solvent rinsing step of supplying a first solvent capable of dissolving the rinsing liquid and the first hydrophobizing agent to the substrate after performing the water rinsing step and before performing the first hydrophobizing step; second solvent rinsing step of supplying a second solvent capable of dissolving the first hydrophobizing agent and the second hydrophobizing agent to the substrate after performing the first hydrophobizing step and before performing the second hydrophobizing step; and step of maintaining the surface of the substrate in a state of not contacting water from the end of the first hydrophobizing step or the second hydrophobizing step to the end of the drying step. The first hydrophobizing step involves a first vapor supply step of supplying a vapor of the first hydrophobizing agent to the substrate, and the second hydrophobizing step involves a second vapor supply step of supplying a vapor of the second hydrophobizing agent to the substrate, and the drying step involves a vaporizing step of vaporizing the second hydrophobizing agent adhering to the substrate. EXAMPLE - No suitable example given.