NOVELTY - Manufacture of substrate with a transparent conductive film involves blowing source gas including tin tetrachloride gas containing tin tetrachloride as main raw material, and water vapor containing water as additive from an injector (10) having main raw material blower outlet (14) which blows tin tetrachloride gas and additive blower outlet (16) which blows the water vapor, toward glass substrate (Z), and forming a tin oxide film on surface of glass substrate by chemical vapor deposition process. The flow rate of tin tetrachloride gas which is blown from injector is 60-150 cm/second.    USE - Manufacture of substrate used for solar cell and touch panel.    ADVANTAGE - The method stably provides substrate with high-quality tin oxide film having high mobility and reduced chlorine concentration is manufactured, with high productivity.    DETAILED DESCRIPTION - Manufacture of substrate with a transparent conductive film involves blowing source gas including tin tetrachloride gas containing tin tetrachloride as main raw material, and water vapor containing water as additive from an injector toward glass substrate, and forming tin oxide film on surface of glass substrate under atmospheric pressure by chemical vapor deposition process. The injector has main raw material blower outlet which blows tin tetrachloride gas and additive blower outlet provided on both sides of the main raw material blower outlet. The additive blower outlet blows the water vapor. When blowing source gas toward the glass substrate, tin tetrachloride gas which is blown from the main raw material blower outlet, and the water vapor which is blown from the additive blower outlet are intersected, before reaching the glass substrate. The flow rate of tin tetrachloride gas which is blown from the injector is 60-150 cm/second. The supply amount of tin tetrachloride contained in tin tetrachloride gas is 0.3-2.5 vol.% with respect to total supply amount of source gas. INDEPENDENT CLAIMS are included for the following:    (1) injector; and    (2) manufacturing apparatus of substrate.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the manufacture of substrate.    Injector (10)    Slow-cooling furnace (12)    Main raw material blower outlet (14)    Additive blower outlet (16)    Glass substrate (Z)