NOVELTY - The module (3') has a carrying device designed as a carrier panel and/or a carrier frame (5) and for horizontally accommodating and transporting a planar substrate (4) or a planar substrate transport object. Carrier elements (6) have horizontally oriented support sections (32, 32') forming a support for the substrate or object and extend from the carrier device into a region beneath the carrier device. The carrier device is coupled with a transporting system for transporting the module into a substrate processing system. The module is partially made of fiber composite material and/or aluminum.    USE - Substrate transport module for use as a substrate carrier in a loading- and unloading system of a substrate processing system (claimed) that is utilized for performing coating process, diffusion process, etching process, combustion process or cleaning process on a substrate to produce solar cells.    ADVANTAGE - The carrier elements with horizontally oriented support sections extend from the carrier device into the region beneath the carrier device, the support sections form the support for the planar substrate or planar substrate transport objects, and the carrier device is coupled with the transporting system for transporting the module into the substrate processing system, thus avoiding ingress of contamination from one section into adjacent section of the continuous substrate processing system, allowing the substrate processing system to be operated in an effective manner, and ensuring cost-effective design of the module.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following:    (1) a loading- and unloading system of a substrate processing system    (2) a method for transporting a planar substrate or substrate transport object in a substrate processing system.    DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of a substrate transport module with clamping substrates.    Substrate transport module (3')    Planar substrate (4)    Carrier frame (5)    Carrier elements (6)    Horizontally oriented support sections (32, 32')