NOVELTY - A chemical vapor deposition (CVD) process (P1) for depositing zinc oxide coating involves: providing glass substrate at above 1112 degrees F (600 degrees C); providing coating apparatus above substrate, having two separate flow pathways, each providing communication between inlet and outlet opening, and flow conditioner disposed in pathways; providing gaseous precursor compounds including gaseous zinc-containing, oxygen-containing and acetonate compound and inert gas; introducing them as two streams into inlet; directing through separate flow pathways; and discharging streams from outlet.    USE - As chemical vapor deposition (CVD) process for depositing a zinc oxide coating on glass substrate (claimed) to form coated glass articles. The coated glass article can be used in many applications e.g. as a superstrate in the manufacture of solar cells; as a substrate in the manufacture of solar cells; and in solar cell applications. The zinc oxide coating is used as a low emissivity or solar control coating. The coated glass article is also utilized in architectural glazings; in electronics and/or in automotive and aerospace applications.    ADVANTAGE - The method efficiently deposits zinc oxide coating; and provides CVD process of depositing zinc oxide coatings having desired properties on a glass substrate at commercially viable deposition rates. The method requires relatively short chemical reaction time; is commercially viable; and provides thin films that are chemically and mechanically durable compared to the soft coat films prepared by prior art method.    DETAILED DESCRIPTION - A chemical vapor deposition (CVD) process (P1) for depositing a zinc oxide coating involves: providing a glass substrate at a temperature above 1112 degrees F (600 degrees C); providing a coating apparatus above the glass substrate, where the coating apparatus comprises at least two separate flow pathways, where each flow pathway provides communication between an inlet opening and an outlet opening, and at least one flow conditioner disposed in each of the flow pathways; providing gaseous precursor compounds including a gaseous zinc-containing compound, a gaseous oxygen-containing compound, and a gaseous acetonate compound and at least one inert gas; introducing the gaseous precursor compounds and the at least one inert gas as at least two streams into the inlet openings; directing the streams through the at least two separate flow pathways; and discharging the streams from the outlet openings of the coating apparatus, where mixing of the gaseous precursor compounds and at least one inert gas occurs to form a zinc oxide coating on a surface of the glass substrate.