NOVELTY - A glass substrate suede structure zinc oxide (ZnO) film is prepared by using diethyl zinc and water as raw materials, using hydrogen to dilute dopant gas borane (B2H6); and using metal organic chemical gas phase deposition method for growing suede structure ZnO-transparent conductive oxide (TCO) film on glass substrate. The method comprises growing layer of large grain size pyramid-shaped structure ZnO film on glass substrate, where film is 1000-2000 nanometers thick; and growing layer of small grain size spherical structure ZnO film on ZnO film, where film is 200-800 nanometers thick.    USE - Method for preparation of glass substrate suede structure zinc oxide (ZnO) film for pin type microcrystalline silicon film solar battery or non-crystalline silicon/microcrystalline silicon laminated film solar battery (claimed).    ADVANTAGE - The method has simple technique, and is convenient for large-scale production.    DETAILED DESCRIPTION - Glass substrate suede structure zinc oxide (ZnO) film is prepared by using diethyl zinc and water as raw materials, using hydrogen to dilute dopant gas borane (B2H6), where volume percentage concentration of dopant gas B2H6 in the mixing gas is 1%; and using metal organic chemical gas phase deposition method for growing suede structure ZnO-transparent conductive oxide (TCO) film on glass substrate. The method comprises growing layer of large grain size pyramid-shaped structure ZnO film on glass substrate, where film is 1000-2000 nanometers thick; and growing layer of small grain size spherical structure ZnO film on ZnO film, where film is 200-800 nanometers thick. An INDEPENDENT CLAIM is included for application of the ZnO film for pin type microcrystalline silicon film solar battery or non-crystalline silicon/microcrystalline silicon laminated film solar battery. Structure of pin type microcrystalline silicon film solar battery is glass/suede structure ZnO film/pin microcrystalline silicon (Si) film battery/ZnO/aluminum (Al). Structure of non-crystalline silicon/microcrystalline silicon laminated film solar battery is glass/suede structure ZnO film/pin a-Si film battery/pin microcrystalline Si film battery/ZnO/Al.