NOVELTY - Plasma vapor deposition method for making multi-junction silicon thin film solar cell modules and panels, comprises: providing a rotatable substrate support and a high frequency induction coupled plasma torch containing a coil; mounting (602) a flexible sheet-like substrate on an outer surface of the rotatable substrate support; introducing a plasma gas into the high frequency induction coupled plasma torch to form a plasma within the coil; injecting at least one source chemical into the plasma torch; and depositing at least one thin film layer on the outer surface of substrate.    USE - The method is useful for making multi-junction silicon thin film solar cell modules and panels (claimed).    ADVANTAGE - The method: provides high deposition rate; increases the conversion efficiency of solar energy; reduces the manufacturing costs of solar cells; utilizing system, which does not require different kinds of equipment for depositing different absorbing layers, thus there is no need to move or relocate the deposition target to different equipment or deposition stages; and utilizing system, which saves overall manufacturing time, minimizes manufacturing mistakes and decreases manufacturing bottleneck issues caused by different processing times and different processing equipment.    DETAILED DESCRIPTION - Plasma vapor deposition method for making multi-junction silicon thin film solar cell modules and panels, comprises providing a rotatable substrate support and a high frequency induction coupled plasma torch comprising a coil, where the induction coupled plasma torch is selected positionable along the surface area of rotatable substrate support; mounting (602) a flexible sheet-like substrate on an outer surface of the rotatable substrate support which substantially takes the shape of the rotatable substrate support; introducing a plasma gas into the high frequency induction coupled plasma torch to form a plasma within the coil; injecting at least one source chemical into the high frequency induction coupled plasma torch; and depositing at least one thin film layer on the outer surface of the sheet-like flexible substrate.    DESCRIPTION OF DRAWING(S) - The figure illustrates a flow diagram of process for making solar cells.    Mount flexible substrate on substrate support (602)    Prepare substrate (604)    Deposit layer of back reflection material on substrate (606)    Load substrate on deposition apparatus (608)    Control temperature of the substrate (610)