TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Component: The metal is copper, zinc, nickel, silver, manganese, palladium and/or platinum.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Process: Alternately, the etching method of solid material is carried out by contacting material containing organic compound having at least one hydrogen-fluoride coupling with surface of solid material, and contacting layer containing metal with the organic compound. The etching method of solid material further involves heating the solid material, exposing the material side containing organic compound having hydrogen-fluoride coupling. Preferred Compound: The organic compound having at least one nitrogen-fluoride coupling, is of formula (I).adjacent R1+R2,R2+R3,R3+R4,R5+R7=-CR6=CR7-CR8=C9-;R1-R9=H, halo, nitro, hydroxy, cyano, carbamoyl, 1-15C alkyl (optionally substituted by halo, hydroxy, 1-5C alkoxy, 6-10C aryloxy, 1-5C acyl, 1-5C acyloxy and 6-10C aryl), 1-15C alkenyl (optionally substituted by halo and 6-10C aryl), 1-15C alkynyl (optionally substituted by halo and 6-10C aryl), 6-15C aryl, (optionally substituted by halo and 1-5C alkyl), 1-15C acyl (optionally substituted by halo), 2-15C alkoxy carbonyl (optionally substituted by halo and 6-10C aryl), 7-15C aryloxy carbonyl (optionally substituted by halo and 1-5C alkyl), 1-15C alkyl sulfonyl (optionally substituted by halo 6-10C aryl), 6-15C aryl sulfonyl (optionally substituted by halo 1-5C alkyl), 1-15C alkyl sulfinyl (optionally substituted by halo and 6-10C aryl), 6-15C aryl sulfinyl (optionally substituted by and 1-5C alkyl), 1-15C alkoxy (optionally substituted by halo and 6-10C aryl), 6-15C aryloxy (optionally substituted by halo and 1-5C alkyl), 1-15C acyloxy (optionally substituted by halo), 1-15C acylthio (optionally substituted by halo), 1-15C alkanesulfonyloxy (optionally substituted by halo and 6-10C aryl), 6-15C arylsulfonyloxy (optionally substituted by halo and 1-5C alkyl), carbamoyl (optionally substituted by 1-5C alkyl and 6-10C aryl), amino (optionally substituted by 1-5C acyl and halo), 6-15C N-alkyl pyridinium base (optionally substituted by halo, 6-10C aryl and 1-5C alkyl), or 11-15C N-aryl pyridinium base (optionally substituted by halo, 6-10C aryl and 1-5C alkyl);andX-=conjugate base of Broensted acid.R1-R9 form organic polymer chain or ring structure optionally through heteroatom.