NOVELTY - The device manufacturing method involves heating a first substrate (201) having stack of first and second layers in an atmosphere so that first material diffuses or mixes into first substrate and reacts with insulating material to form electrical portion (208) within first substrate below each of the stacks. The second layer material catalyses the formation of nanostructures. The electrical portion is electrically conductive and/or semi-conductive and contains mixture of first material and insulating material and/or reaction adducts thereof. Each electrical portion allow for individual electrical control of respective one of the set of nanostructures (207).    USE - Manufacturing method for electrical device having individually electrically addressable sets of nanostructures (claimed) e.g. carbon nanotubes, nanowires and nanorods. Uses include but are not limited to sensors, electrostatic actuators, solar cells, heat sinks, nano antennas, electric emitter due to field emission, super capacitors, electron emitting devices, high frequency actuators, diffractive optics, and pinch-wave tweezers.    ADVANTAGE - Ensures easy configuration of the electrical portions to fit with the desired application through selection of first material and insulating material, thickness of first substrate and thickness of first layer, diffusion/reaction temperature, and time of heating. Enables electrical connection of the electrical portion of first substrate to power source or sensing device since connecting structure is connectable to power source or sensing device.    DETAILED DESCRIPTION - The first material includes a metal and/or metal oxide/nitride. The insulating material is at least one of silicon dioxide or silicon nitride.    An INDEPENDENT CLAIM is included for a device having individually addressable sets of nanostructures.    DESCRIPTION OF DRAWING(S) - The drawing shows an enlarged cross sectional view of a device during one stage of the manufacturing process.    First substrate (201)    First face (202)    Second face (203)    Set of nanostructures (207)    Electrical portion (208)