NOVELTY - Manufacture of transparent conductive film involves using zinc oxides by low-voltage thermal chemical vapor deposition method using a mixed gas containing organometallic vapor, an oxidizing agent vapor and/or boron-containing gas. A primary transparent conductive film is formed with film thickness of 80% or more of total film thickness of the transparent conductive film, and a secondary transparent conductive film is formed on the primary transparent conductive film.    USE - Manufacture of transparent conductive film used for manufacturing photoelectric conversion apparatuses (all claimed) used for solar cell and photo sensor.    ADVANTAGE - The method enables manufacture of transparent conductive film with suppressed corrugation of zinc oxide, and provides photoelectric conversion apparatus having improved circuit current density and conversion efficiency.    DETAILED DESCRIPTION - Manufacture of transparent conductive film involves using zinc oxides by low-voltage thermal chemical vapor deposition method using a mixed gas containing organometallic vapor, an oxidizing agent vapor and/or boron-containing gas. A primary transparent conductive film is formed with film thickness of 80% or more of total film thickness of the transparent conductive film, and a secondary transparent conductive film is formed on the primary transparent conductive film. When forming the primary transparent conductive film, value of ratio (FB/FZ) of boron-containing gas flow rate (FB) and amount of organometallic vapour flows (FZ) is reduced to less than half of ratio (FB/FZ) at the time of completion of formation of the primary transparent conductive film, and above ratio (FB/FZ) at the time of formation initial stage of primary transparent conductive film. The ratio (FB/FZ) at the time of secondary transparent conductive film formation is increased from ratio (FB/FZ) at the time of completion of primary transparent conductive film formation. INDEPENDENT CLAIMS are included for the following:    (1) manufacture of photoelectric conversion apparatus;    (2) transparent conductive film; and    (3) photoelectric conversion apparatus.