NOVELTY - The multijunction thin film solar cell (70) has a top cell (61) and a bottom cell (43). The top cell has, in the intended direction of the impinging light, a sequence of an amorphous hydrogenated silicon n-layer (64), a first microcrystalline hydrogenated silicon n-layer (65), an intermediate reflector layer (66), and a second microcrystalline hydrogenated silicon n-layer (67). The intermediate reflector layer comprises layer sequences, each consisting of a microcrystalline silicon oxide layer and a microcrystalline silicon n-layer in the intended direction of impinging light.    USE - Multijunction thin film solar cell.    ADVANTAGE - The provision of a single intermediate reflector layer ensures that the solar cell is highly efficient and easy to produce. The multijunction thin-film solar cell comprises a front contact made from zinc oxide deposited by low pressure chemical vapor deposition as a transparent conductive oxide layer electrode, allowing a generally thinner intermediate reflector layer since low pressure chemical vapor deposition (LPCVD)-deposited zinc oxide is relatively rough and thus has good light-scattering properties. The intrinsic semiconductor compound layer situated closest to the impinging light is amorphous, permitting fast top-cell deposition. The formation of a multilayered intermediate reflector and very thin and strongly crystalline n-layers improves the electrical properties of the cell stack.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following:    (1) a method of manufacturing a n-layer stack; and    (2) a method of manufacturing a multijunction thin film solar cell.    DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of the tandem junction thin film solar cell.    Bottom cell (43)    Top cell (61)    Amorphous hydrogenated silicon n-layer (64)    First microcrystalline hydrogenated silicon n-layer (65)    Intermediate reflector layer (66)    Second microcrystalline hydrogenated silicon n-layer (67)    Multijunction thin film solar cell (70)