NOVELTY - The generator (100) has a piezoelectric structure (190) with a silicon base (180). A lower electrode (120) is formed on the silicon base. A piezoelectric film (130) is formed on the lower electrode to generate electric energy in response to change of mechanical strain. An upper electrode (160) is formed on the piezoelectric film. A proof mass (200) is coupled to a portion of a bottom surface of the silicon base. A frame (220) having an opened cavity of predetermined size, is coupled to the portion such that the mass is located within a cavity (230) to suspend the piezoelectric structure.    USE - Piezoelectric micro-power generator for converting mechanical energy into electric energy to produce electric power for various applications. Uses include but are not limited to a vehicle, a motor, a rail, an air conditioning system and a machine tool.    ADVANTAGE - The generator is simple in structure, and can be manufactured by using silicon-based semiconductor process, polishing process and bonding process in an easy manner, so that stiction phenomenon between a micro structure and a substrate occurring in releasing process of removing a silicon oxide film as a sacrificial layer during fabrication process can be originally removed, thus enhancing yield rate by reducing damage to a device due to stress generated during the fabrication process. The generator suspends the piezoelectric structure and extracts external electrical wires through a final die separating process in a simultaneous manner, so that the generator and a basic package structure are easily coupled to each other, thus reducing manufacturing costs, and allowing modified coupling of the generator to another package structure.    DETAILED DESCRIPTION - The frame is made of one of polychlorinated biphenyl, ceramic, glass, metal, plastic and silicon. An INDEPENDENT CLAIM is also included for a method for manufacturing a piezoelectric micro-power generator.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a piezoelectric micro-power generator.    Piezoelectric micro-power generator (100)    Lower electrode (120)    Piezoelectric film (130)    Upper electrode (160)    Silicon base (180)    Piezoelectric structure (190)    Proof mass (200)    Frame (220)    Cavity (230)