NOVELTY - Depositing material layer on a substrate surface of a thin layer solar cell substrate (2), comprises (a) arranging the thin layer solar cell substrate on a substrate holder (3) in a reaction chamber (1) of a separating device, where the separating device comprises gas openings (11), (b) introducing a reaction gas into the reaction chamber by gas openings serving as inlet openings, and (c) performing a deposition reaction, where a reactant from the reaction gas participates, and a deposition layer is formed on the substrate surface of the thin layer solar cell substrate as reaction product.    USE - The method is useful for depositing material layer on a substrate surface of a thin layer solar cell substrate.    ADVANTAGE - The method and the device exhibit uniform layer deposition along the entire substrate surface, preferably solar cell layers in the edge regions of the substrate surface. The device is compact and cost-efficient, and exhibits reduced material consumption.    DETAILED DESCRIPTION - Depositing material layer on a substrate surface of a thin layer solar cell substrate (2), comprises (a) arranging the thin layer solar cell substrate on a substrate holder (3) in a reaction chamber (1) of a separating device, where the separating device comprises gas openings (11) for introducing and discharging reaction gases into the reaction chamber, (b) introducing a reaction gas into the reaction chamber by gas openings serving as inlet openings, and (c) performing a deposition reaction, where a reactant from the reaction gas participates, and a deposition layer is formed on the substrate surface of the thin layer solar cell substrate as reaction product. The thin layer solar cell substrate exhibits a maximum extension along the substrate surface, which is greater than 50 cm, and is arranged in the reaction chamber such that at least one of the gas opening along a substrate plane stretched from the substrate surface of the thin layer solar cell substrate exhibits a distance of at least 3 cm, 6 cm or 10 cm, from the thin layer solar cell substrate. An INDEPENDENT CLAIM is also included for a separating device depositing a material layer on the substrate surface of the thin layer solar cell substrate, comprising (i) the reaction chamber, (ii) the substrate holder arranged in the reaction chamber, designed receiving the thin layer solar cell substrate having the substrate surface, where the maximum extension of the thin layer solar cell substrate is greater than 50 cm along the substrate surface, and (iii) gas openings arranged in the reaction chamber.    DESCRIPTION OF DRAWING(S) - The figures 1 and 2 show a schematic representations of the thin layer solar cell substrate in the reaction chamber surrounded by gas openings.    Reaction chamber (1)    Thin layer solar cell substrate (2)    Substrate holder (3)    Chamber wall element (4)    Inlet opening (11)