NOVELTY - Processing system comprises: a reactor block comprising a cell array (306) that includes many site-isolated reactors (308) (SIRs); a sleeve disposed within interior of each of SIRs, where sleeve is configured to float within interior and includes a compliance device configured to dynamically control a vertical position of sleeve in SIRs; and a sealing system configured to provide a seal between a region on substrate and interior of each of SIRs. The sealing system includes primary (300PS), secondary (300SS), and tertiary seals which collectively provides three levels of containment for SIRs.    USE - The processing system is useful: for sealing site-isolated reactors for isolating reactions in reactors that are in close proximity to other reactors; and in miniaturization and parallelization of liquid and gas phase reactors for use in the manufacturing of integrated chips and other substrate based-components comprising semiconductor devices, flat panel displays, optoelectronic devices, data storage devices, magnetoelectronic devices, magneto-optic devices, molecular electronic devices, solar cells, photonic devices, and packaged devices.    ADVANTAGE - The processing system: provides effective seals which can be achieved with lower resulting compression force on the target substrate because the multiple levels of the containment ensure that no mixing of reactants takes place between adjacent reactors; provides reactor-to-reactor isolation without having reactor components in direct physical contact with the substrate, thus reduces or eliminates the possibility of reaction contamination due to physical contact with the reactor, and two level of containment to ensure no leakage of reactants to the atmosphere; minimizes or eliminates the impact of the seal formation (e.g. abrasion and residue) on both the substrate and the reaction occurring within the miniaturized reactor; maximizes the internal reaction area compared to the area of the seal; and has a very low probability for failure as well at a very low fatigue rate so that the same seal can be used many times without replacement.    DESCRIPTION OF DRAWING(S) - The figure shows a schematic illustration of contact sealing system.    Contact sealing system (300)    Primary seal (300PS)    Secondary seal (300SS)    Cell array (306)    Site-isolated reactors (308)