NOVELTY - The device has a processing chamber (114) for coating the substrates (11), and a lock chamber (113) for transferring the substrates between the lock chamber and the processing chamber. The lock chamber is connected to the processing chamber through a valve (13). A substrate transporting device is extended through the processing chamber and the lock chamber and is separated in the operative region of the valve. The substrates are arranged on the substrate transporting device on substrate supports which are arranged in a row and are connected to one another.    USE - Device for treating substrates in batch process, for manufacturing thin-film solar cell.    ADVANTAGE - The treatment of substrates in a batch process is improved such that mass production with increased productivity is achieved using a compact, functionally simplified device for treating substrates. The vibration of the free lower end of substrate carrier can be prevented. The substrate is safer without fastening the substrate supports to the process chamber or lock chamber walls. The process chamber and transfer chamber are connected and separable from one another by valve, so that the power required for tempering and/or evacuation of the volume of process chamber and/or lock chamber is minimized and the volume is minimized. The access can be improved by the treatment units which are designed around the vertical axis. The very quick uniform heating and cooling of the substrates can be treated with circular conveyors. The assembly of the substrate carrier train with substrate carriers is made easier. The different process pressures and process temperatures can be adjusted without disturbing influence on the other.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for method for treating substrates in batch process.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the device for treating substrates in batch process.    Substrate (11)    Valve (13)    Heating device (14)    Lock chamber (113)    Processing chamber (114)