TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Components: The solid material is a semiconductor or an insulator chosen from silicon, germanium, silicon-germanium, silicon carbide, gallium arsenide, gallium aluminum-arsenide, indium phosphorus, indium antimonide, gallium nitride and aluminum nitride.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Condition: The solid material is heated at 28 degrees C or more, preferably 60 degrees C or more. Exposure is carried out from side of material containing organic compound. Preferred Compound: The organic compound having nitrogen-fluorine bond is conjugate base of Broensted acid of formula (I) or (II).R1+R2,R2+R3,R3+R4 or R4+R5=-CR6=CR7-CR8=CR9-;andR1-R9=H, halo, nitro, hydroxy, cyano, carbamoyl, 1-15C alkyl optionally substituted by halo, hydroxy, 1-5C alkoxy, 6-10C aryloxy, 1-5C acyl, 1-5C acyloxy or 6-10C aryl, 1-15C alkenyl optionally substituted by halo or 6-10C aryl, 1-15C alkynyl optionally substituted by halo or 6-10C aryl, 6-15C aryl optionally substituted by halo or 1-5C alkyl, 1-15C acyl optionally substituted by halo, 2-15C alkoxycarbonyl optionally substituted by halo or 6-10C aryl, 7-15C aryloxy carbonyl optionally substituted by halo or 1-5C alkyl, 1-15C alkylsulfonyl optionally substituted by halo or 6-10C aryl, 6-15C arylsulfonyl optionally substituted by halo or 1-5C alkyl, 1-15C alkyl sulfinyl optionally substituted by halo and 6-10C aryl, 6-15C aryl sulfinyl optionally substituted by halo and 1-5C alkyl, 1-15C alkoxy optionally substituted by halo and 6-10C aryl, 6-15C aryloxy optionally substituted by halo and 1-5C alkyl, 1-15C acyloxy optionally substituted by halo, 1-15C acylthio group optionally substituted by halo, 1-15C alkane sulfonyloxy optionally substituted by halo and 6-10C aryl, 6-15C arylsulfonyloxy group optionally substituted by halo and 1-5C alkyl, carbamoyl optionally substituted by 1-5C alkyl and 6-10C aryl, amino optionally substituted by 1-5C acyl and halo, 6-15C N-alkyl pyridinium base optionally substituted by halo, 6-10C aryl and 1-5C alkyl, 11-15C N-aryl pyridinium base optionally substituted by halo, 6-10C aryl and 1-5C alkyl.