TECHNOLOGY FOCUS - CHEMICAL ENGINEERING - Preferred Composition: The molar ratio of zinc with respect to the silicon tetrachloride is 0-1.5. The silicon tetrachloride and zinc are reacted by supplying silicon tetrachloride vapor and zinc vapor (10). Preferred Component: The reactor is vertical reactor, which supplies silicon tetrachloride vapor and zinc vapor from upper portion and discharges exhaust gas from the lower portion. Precipitation rods are installed in the reactor. The supply position of silicon tetrachloride vapor into the reactor is closer to the precipitation rod than supply position of zinc vapor. Partition wall of supply space of zinc vapor and the partition wall (131) of supply space (132) of silicon tetrachloride vapor are provided concentrically with the center of the reactor. The inner side is the supply space of the silicon tetrachloride vapor and outer side is the supply unit of silicon tetrachloride vapor. The reactor has zinc vapor supply unit to supply zinc vapor from the side wall (31) side with respect to precipitation rod, and silicon tetrachloride vapor supply unit to supply silicon tetrachloride vapor to the upper portion of the reactor from the center side of reactor with respect to each precipitation rod. The reactor has discharge pipe of exhaust gas in the lower portion of the reactor. The precipitation rod is silicon carbide rod (3). The silicon carbide rod is silicon impregnated silicon carbide rod, in which silicon is impregnated at porous silicon carbide. The mass ratio of silicon carbide and the impregnated silicon is 80:20-95:5. A division component (13) of supply space of silicon tetrachloride vapor is provided with partition wall for dividing the supply space of silicon tetrachloride vapor into the center side of a reactor from the precipitation rod. A division component (14) of supply space of zinc vapor is provided with partition wall for dividing the supply space of zinc vapor into the side wall side from precipitation rod. The partition wall of the supply space of silicon tetrachloride vapor at the side of a precipitation rod and the partition wall of the supply space of zinc vapor at the side of precipitation rod are provided in the center and concentrically form of the reactor.