NOVELTY - The device (300) has an emitter region (102) formed on a surface (106) of a substrate (110). The emitter region comprises a conductivity type opposite to a conductivity type of the substrate. A passivation layer stack (140) comprises a dielectric layer (115) formed on another surface (105) of the substrate or the emitter region. Another dielectric layer (117) is formed over the former dielectric layer. An interlayer (119) is placed between the former dielectric layer and the latter dielectric layer. The passivation layer stack is placed on the latter surface of the substrate.    USE - Solar cell device i.e. photovoltaic device, for converting sunlight directly into direct current electrical power.    ADVANTAGE - The passivation layer on a back surface of a solar cell provides a desired film property that reduces recombination of the electrons or holes in the solar cells, and redirects electrons and charges back into the solar cells to generate photocurrent, and the layer can serve as a backside reflector to minimize light absorption while assisting in reflecting light back to the solar cell devices, thus enhancing efficiency of the solar cell. The device provides desirable electrical, physical and/or passivating properties by selecting an interlayer material, so that the amount of aluminum oxide required to form the solar cell device can be reduced, and the difficulties associated with laser ablation of the passivation layer stack are minimized, thus improving the ability to form reliable electrical contacts, and reducing production cost of the device.    DETAILED DESCRIPTION - The former surface is a back or rear surface of the substrate, and the latter surface is a front or top surface of the substrate. INDEPENDENT CLAIMS are also included for the following:    (1) a method for manufacturing a solar cell device    (2) a solar cell processing system.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic cross-sectional view of a solar cell device formed according to a solar cell device manufacturing method and utilizing a solar cell processing system.    Emitter region (102)    Surfaces (105, 106)    Substrate (110)    Dielectric layers (115, 117)    Interlayer (119)    Passivation layer stack (140)    Solar cell device (300)