NOVELTY - The assembly has a tubular housing (210) having an aperture (202) extending through an outer perimeter (211) of housing. A ring (212) including an inner edge (216) is provided in the aperture (214) in an upper portion (230) of the tubular housing. Another ring including inner edge is provided in the aperture in a lower portion (250) of the tubular housing. The inner edges are provided with specific radius of curvature. The tubular housing is made of metal alloy, aluminum and ceramic. The rings are made of ceramic.    USE - Slide Bushing assembly for supporting substrate within processing chamber such as plasma-enhanced chemical vapor deposition (PECVD) chamber, etching chamber, physical vapor deposition (PVD) chamber and plasma processing chamber. Uses include but are not limited to substrate such as flat panel display substrate, solar substrate, semiconductor substrate, organic light-emitting diode substrate (OLED), glass substrates or plates for use in monitor, flat panel display, solar cell, personal digital assistant (PDA) and cell phone.    ADVANTAGE - The slide bushing assembly can be provided with rings with rounded inner edge, so that the surface area of contact between the support pin and ring can be reduced. The rings can be made of material with low coefficient of thermal expansion such as ceramic, so that the slide bushing assembly can be used above 250?0 C. The designing of the slide bushing assembly can be simplified, so that the reliability of the device in high-temperature processing environments can be improved. The number of moving units within the bushing assembly can be reduced, so that the unwanted particles generated during friction can be reduced, hence the incidence of substrate contamination can be reduced. The distance between the rings can be increased, so that the control of the support pin can be enhanced and the torque applied to the rings due to lateral forces on the support pin can be reduced. The rings can be provided at the ends of the tubular housing, so that the slide bushing assembly can be quickly and inexpensively assembled or refurbished, so that the production costs can be decreased. Hence the high-temperature slide bushing assembly for facilitating support pin movement within the processing chamber can be provided.    DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the support pin extending through the slide bushing assembly.    Tubular housing aperture (202)    Tubular housing (210)    Outer perimeter of tubular housing (211)    Ring (212)    Ring aperture (214)    Inner edge (216)    Upper portion of tubular housing (230)    Lower portion of tubular housing (250)