NOVELTY - The chemical vapor deposition process involves providing a glass substrate e.g. glass ribbon (8) and forming a gaseous precursor mixture comprising a silane compound, oxygen, a water vapor, and a radical scavenger. A precursor mixture is directed towards and along the glass substrate. The mixture is reacted over the glass substrate to form a silica coating. The silica coating is formed at a deposition rate of about 150 nmasteriskm/min or higher. A tin oxide coating is deposited on a surface of the glass substrate and silica coating is deposited over the tin oxide coating.    USE - Chemical vapor deposition process for depositing coating of silica over glass substrate such as glass ribbon to form coated glass article used as superstrate in manufacture of solar cells and manufacture of float glass installation. Can also be used in depositing coating of silica over glass substrate to form coated glass article used in architectural glazings, electronics, and/or have automotive and aerospace applications.    ADVANTAGE - The high quality silica coating is deposited over the glass substrate and the highest silica coating growth rates of the process can be achieved when the silica coating is formed directly on a previously deposited tin oxide coating. The process can be utilized in combination with one or more additional coating layers to achieve a desired coating stack. Since the silica coating of the process is of high quality, the coated glass article of the can provide higher visible light transmission. Thus, utilizing the coated glass article in solar cell manufacturing can result in higher solar cell efficiency and/or greater power output. The coating layers of other materials can be deposited over the silica coating layer so as to provide a coating stack, thus the coated glass articles are provided with high conductivity, low emissivity and/or anti-reflective properties.    DESCRIPTION OF DRAWING(S) - The drawing shows the sectional view of the float glass installation.    Glass ribbon (8)    Coating apparatus (9)    Float glass installation (10)    Adjacent annealing lehr (12)    Bottom section (14)