TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Process: The process further comprises: (e) producing silicon or a silicon device by decomposing the silane in the co-purified silane mixture and transforming the co-purified silane mixture into a reacted gas mixture comprising hydrogen; (f) returning the reacted gas mixture comprising hydrogen from step (e) to step (a) as a hydrogen source; and (g) recovering and recycling the catalyst and return to the gasification step. The quenching of the gas mixture is conducted right after the reactor to avoid the decomposition of silane by rapid heat exchanging with cooling media of pre-produced silane mixture itself or by a rapid pressure drop of the produced gas mixture. The separating is conducted by distillation, absorption or filtration. The polysilicon production process is a centralized flow bed granular polysilicon or vapor to liquid or Siemens reactor system. In the process: the catalysts of the gasification is recovered and recycled to the raw material; the hydrogen gas and inert gas are recovered and recycled after the end application to feed into the gasification process; and the catalyst can be loaded onto silicon and silicon-containing compounds including silicon alloys powder particles surface, into the melts or solutions. Preferred Components: The catalyst comprises at least one of a metal, metal alloy (both preferred), metal oxide, metal salt, metal hydride or metal-containing compound, where the metal is noble metal elements, alkaline metals, alkaline and alkaline earth metal elements, transition metal elements, rare earth metal elements, or low melting point metal elements. The silicon-material includes at least one of elemental silicon, silicon alloy and silicon-containing compounds, where the silicon alloy comprises at least one noble metal elements, alkaline and alkaline earth metal elements, and transition metal elements, rare earth metal elements and low melting point metal elements. The silicon-material includes elemental silicon, silicon alloy and silicon-containing compounds in the forms of ingot, slab, bulk, rod, granule, powder, melts, suspension in liquid, and gas phase vapor. The hydrogen source is at least one of: hydrogen gas or deuterium gas, or hydrogen deuteride); hydrogen ions in acids, metal hydride or dissociate acids; hydrogen ion generated by electrochemical cell; and atomic hydrogen generated by inert gas such as argon), plasma which is direct-current plasma, microwave, radio frequency, hot wire and/or glowing discharge. In the process, the temperature is -(30)-3000 degrees C, the pressure is 0.001-1000 Mpa, input gas hydrogen in inert gas is 1-99.99999%, output gas:silane in hydrogen is 0.5-99%, and residence time of gases is 0.001 to 1000 seconds.    TECHNOLOGY FOCUS - INSTRUMENTATION AND TESTING - Preferred Components: The reaction chamber/reactor type is packed bed, spouted bed, fluidized bed, moving bed of the silicon powder, or stirred bed or ticking bed for the melt. EXAMPLE - 2 wt.% of Copper, and 1 wt.% of nickel catalyst (using chlorides) was loaded onto met-silicon powder 100-30 mesh through solution impregnation or coating. After drying, silicon powder was heated in a fluidized bed reactor, a spouted bed and a packed bed reactors respectively in flow of chemical pure hydrogen at 900-1300 degrees C respectively. Then orange color flame was observed by the burning of the tail gas from the reactor indicating the formation of silane, and the weight of silicon powder was noticeably reduced after 10 hours of reaction. The tail gas from the reactor was also quenched by passing the tail gas to a heat exchanger with a circulating coolant, then same amount of metallurgical silicon without catalyst was heated under the same conditions, and no mass loss of silicon was detected.