NOVELTY - A composition comprises metal alkoxide compound (I), water, and hydrolysis catalyst.    USE - Composition is used for forming passivation film for manufacture of semiconductor substrate for manufacture of solar cell element (all claimed) for solar cell module.    ADVANTAGE - The passivation film obtained using the composition has excellent time-dependent storage stability, compactness, and passivation effect. The semiconductor substrate is manufactured using the composition, by a simple process with suppressed generation of gelatinization and without carrying out mask processing process. The solar cell element manufactured using the semiconductor substrate has excellent energy conversion efficiency.    DETAILED DESCRIPTION - A composition comprises metal alkoxide compound of formula: M(OR1)m (I), water, and hydrolysis catalyst.    M=Nb, Ta, V, Y, or Hf;    R1=1-8C alkyl;and    m=0-5.    INDEPENDENT CLAIMS are included for the following:    (1) semiconductor substrate (1), which has baking-product layer formed using the composition, provided in the whole surface or portion of the semiconductor substrate;    (2) manufacture of semiconductor substrate, which involves using the composition on whole surface or portion on the semiconductor substrate, forming a composition layer, heat-processing the composition layer and forming passivation film (3,5);    (3) solar cell element, which has semiconductor substrate provided with p-type layer and n-type layer, and electrode arranged on at least one layer of p-type layer and n-type layer on the semiconductor substrate; and    (4) manufacture of solar cell element, which involves forming the composition layer on the surface of the one or both surface electrode (7) arranged on at least one layer of p-type layer and n-type layer of the semiconductor substrate, baking the composition layer and forming passivation film.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the manufacture of solar cell element.    Semiconductor substrate (1)    Passivation film (3,5)    Back surface electrode (5)    Surface electrode (7)    Heat-treated substance (8)