NOVELTY - A barrier film (10) consists of substrate (12), base (co)polymer layer (14), oxide layer (16), and protective (co)polymer layer (18). The base (co)polymer layer is provided on the major surface of the substrate, and the oxide layer is formed on the base (co)polymer layer. The protective (co)polymer layer comprises a (co)polymer, which is formed as a reaction product of primary (meth)acryloyl compound and (meth)acryl-silane compound. The (meth)acryl-silane compound is obtained by carrying out Michael reaction of secondary (meth)acryloyl compound and aminosilane.    USE - Barrier film is used for articles e.g. display device, solid-state lighting device, and photovoltaic device (all claimed) e.g. organic photovoltaic solar cell and organic light-emitting diode.    ADVANTAGE - The barrier film has excellent mechanical strength, thermal resistance, chemical resistance, abrasion resistance, moisture-proof property, oxidation resistance, transparency, flexibility, and elasticity. The occurrence of delamination or curl due to the thermal stress and shrinkage of multilayered structure are suppressed.    DETAILED DESCRIPTION - A barrier film consists of substrate, base (co)polymer layer, oxide layer, and protective (co)polymer layer. The base (co)polymer layer is provided on the major surface of the substrate. The oxide layer is formed on the base (co)polymer layer and the protective (co)polymer layer is formed on the oxide layer. The protective (co)polymer layer comprises a (co)polymer, which is formed as a reaction product of primary (meth)acryloyl compound and (meth)acryl-silane compound. The (meth)acryl-silane compound is obtained by carrying out Michael reaction of secondary (meth)acryloyl compound and aminosilane. INDEPENDENT CLAIMS are included for the following:    (1) article, which consists of the barrier film; and    (2) manufacture of barrier film, which involves applying the base (co)polymer layer on the major surface of the substrate, providing the oxide layer on the base (co)polymer layer, and depositing the protective (co)polymer layer on the oxide layer.    DESCRIPTION OF DRAWING(S) - The drawing shows the cross-sectional view of the barrier film having a vapor-deposited adhesion-promoting coating.    Barrier film (10)    Substrate (12)    Base copolymer layer (14)    Oxide layer (16)    Protective copolymer layer (18)