NOVELTY - Producing carbonaceous hydridosilane involves converting optionally, a boron- or phosphorus-doped hydridosilane with at least one carbon source comprising linear or branched carbosilanes, cyclic carbosilanes, halogenated hydrocarbons, carbenes, carbene analogues, alkylazides, diazomethane, dimethyl sulfate, or alcohols.    USE - The method is useful for producing carbonaceous hydridosilane, preferably carbonaceous hydridosilane oligomer, which is useful for: the production of electronic or optoelectronic device layers, which are useful for photovoltaic applications or in transistors; and for the production of silicon-containing layers, preferably elemental silicon layers (all claimed).    ADVANTAGE - The method is capable of producing carbonaceous hydridosilane without using catalyst or reducing agents and without generating any byproducts in an inexpensive manner.    DETAILED DESCRIPTION - Producing carbonaceous hydridosilane involves converting optionally, a boron- or phosphorus-doped hydridosilane with at least one carbon source comprising linear or branched carbosilanes of formula (SibH2b+2-yRy), cyclic carbosilanes of formula (SicH2c-y1R12c), halogenated hydrocarbons of formula (CnH2n+2-y2Xy2), carbenes of formula (CR2R3), carbene analogues, preferably CO and CN-, alkylazides of formula (N3R12), diazomethane (H2CN2), dimethyl sulfate (C2H6O4S), or alcohols of formula (HOR13).    R = 1-10C alkyl, 6-10C aryl or 7-14C aralkyl;    R1 = 2-10C alkyl, 6-10C aryl or 7-14C aralkyl; either    R2, R3 = -H, -F, -Br, -I, -1-10C (cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10C-aryl, -1-10C-(cyclo)heteroalkyl, -2-10C-(cyclo)heteroalkenyl, -5-10C heteroaryl, -7-14C-aralkyl, or -OR4; or    R2R3 = bidentate bridging group comprising =3-20C (cyclo)alkyl, =3-20C (cyclo)alkenyl, =3-20C (cyclo)heteroalkyl, =3-20C (cyclo)heteroalkenyl or =6-14C (hetero)aralkyl;    R4 = -1-10C-(cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10-aryl, or -NR52;    R5 = -1-10C-(cyclo)alkyl,-2-10C (cyclo)alkenyl, 6-10C-aryl, or -SinR6;    R6 = -H, -1-10C-(cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10C-aryl, or -(CO)-R7;    R7 = -H, -1-10C (cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10C-aryl, or -(CO)-OR8;    R8 = -H, -1-10C (cyclo)alkyl, -2-10C (cyclo)alkenyl, 6-10C-aryl, -CN, -NC, or -SR9;    R9 = -H, -1-10C-(cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10C-aryl, or -S(O)2R10;    R10 = -H, -1-10C (cyclo)alkyl, -2-10C (cyclo)alkenyl, 6-10C-aryl, or -P(R11)2;    R11 = -H, -1-10C-(cyclo)alkyl, -2-10C (cyclo)alkenyl, or -6-10C aryl;    R12 = -1-10C-(cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10C aryl, -1-10C-(cyclo)heteroalkyl, 2-10C (cyclo)heteroalkenyl, -5-10C heteroaryl, or -7-14C aralkyl;    R13 = -1-10C (cyclo)alkyl, -2-10C (cyclo)alkenyl, -6-10C aryl, -1-10C-(cyclo)heteroalkyl, -2-10C (cyclo)heteroalkenyl, -5-10C heteroaryl, or 7-14C aralkyl;    X = F, Cl, Br, or I;    b = greater than or equal to 2;    y = 1 to 2b+2;    c = greater than or equal to 3;    y1 = 1 to 2c+2;    n = 1-5; and    y2 = 1-12.    An INDEPENDENT CLAIM is included for a carbonaceous hydridosilane oligomer prepared by the process.