NOVELTY - The apparatus (50) has an evaporation source switch-control unit (25) opens a shut valve (122) when an integration value of a flow volume of a vaporized material of an evaporation source (131) computed by a calculation unit (201) in the blocking state of shut valve (122) and open state of a shut valve (121) exceeds a respective predetermined upper limit, and blocks the shut valve (121) when the flow volume of vaporized material of evaporation source (131) computed in calculation unit (201) is less than a respective predetermined lower limit.    USE - Apparatus for depositing vapor of material on substrate for forming film such as organic thin film such as organic electroluminescent element of organic devices such as display device, illumination device, solar cell, and semiconductor device.    ADVANTAGE - The evaporation source switch-control unit opens the second shut valve when the integration value of flow volume of vaporized material of first evaporation source computed by first calculation unit in the blocking state of second shut valve and open state of first shut valve exceeds a first predetermined upper limit, and blocks the first shut valve when the flow volume of vaporized material of first evaporation source computed in first calculation unit is less than a first predetermined lower limit. Thus, composition of material during deposition of vapors of material on substrate is controlled effectively for accurately forming film by high operation rate of apparatus. Hence, high yield of film is obtained efficiently at reduced cost while reducing the material loss of material.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for depositing vapor of material on substrate for forming film.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the apparatus for depositing vapor of material on substrate.    Evaporation source switch-control unit (25)    Apparatus for depositing vapor of material on substrate (50)    Shut valves (121,122)    Evaporation sources (131,132)    Calculation units (201-203)