NOVELTY - Aluminum-doped zinc oxide (AZO) transparent conductive thin film is prepared by soaking glass sheet in aqua regia containing hydrochloric acid:nitric acid with volume ratio of 3:1, rinsing with deionized water, performing ultrasonic cleaning in acetone and alcohol for 5 minutes, oven-drying, standing, installing glass sheet in magnetron sputtering device sample table, installing AZO target, adjusting target-substrate distance to 160 mm, vacuumizing deposition chamber, and vacuumizing oxygen and hydrogen pipe until deposition chamber has vacuum degree of less than or equal to 8.5x 10-4 Pa.    USE - Preparation of aluminum-doped zinc oxide transparent conductive thin film for solar cells, flat panel display, touch panel, and energy-saving glass.    ADVANTAGE - Preparation of AZO transparent conductive thin film improves uniformity, stability, resistance, visible region transmittance, and infrared region reflectance of thin film and reduces cost.    DETAILED DESCRIPTION - Aluminum-doped zinc oxide (AZO) transparent conductive thin film is prepared by soaking glass sheet in aqua regia containing hydrochloric acid (HCl):nitric acid (HNO3) with volume ratio of 3:1, rinsing with deionized water, performing ultrasonic cleaning in acetone and alcohol for 5 minutes, oven-drying, standing, installing glass sheet in magnetron sputtering device sample table, installing AZO target, adjusting target-substrate distance to 160 mm, vacuumizing deposition chamber, vacuumizing oxygen and hydrogen pipe until deposition chamber has vacuum degree of less than or equal to 8.5x 10-4 Pa, opening argon and hydrogen gas flow meter, adjusting argon flowrate to 40 SCCM, adjusting hydrogen gas flowrate to 0.5-8 SCCM, adjusting working pressure using gate valve to 0.08-0.4 Pa, opening direct current sputtering power supply, adjusting sputtering power to 180 W, pre-sputtering for 10 minutes, opening sample baffle, depositing for 30 minutes, closing sample baffle, closing sputtering power supply, closing gas, and closing vacuum system.    DESCRIPTION OF DRAWING(S) - The drawing shows a graph of the transmittance curve of AZO film. (Drawing includes non-English language text).