NOVELTY - The method involves correcting flow rate set value of source gas, while stopping process of preparing hydrogen-selenide mixed gas. Mass-flow controller (6) is provided in source gas supply flow path in order to control flow volume of selenization hydrogen gas. The calibration gas of same flow volume is flown to mass-flow meter (16). The difference of each flow volume value of calibration gas measured by flow-control unit and mass-flow meter is acquired. The flow volume value of selenization hydrogen gas is acquired according to difference of each flow volume value.    USE - Method for supplying hydrogen-selenide mixed gas to solar cell manufacturing apparatus and semiconductor manufacturing apparatus.    ADVANTAGE - The precipitation of selenium crystal by autolysis of hydrogen selenide can be reduced. The flow measurement difference and flow-control difference of source gas supply flow path can be reduced, such that the drift phenomenon of supply apparatus can be suppressed effectively. The size of buffer tank is reduced and hydrogen-selenide mixed gas of selenization hydrogen concentration is stably supplied to solar cell manufacturing apparatus.    DETAILED DESCRIPTION - The flow-control unit and flow measurement unit flows the calibration gas continuously in random order. The selenization hydrogen gas is not poured for flow measurement unit. The inert gas which is used as calibration gas is supplied from base gas supply flow path and selenization hydrogen gas supplied from source gas supply flow path are mixed.An INDEPENDENT CLAIM is included for supply apparatus of hydrogen-selenide mixed gas, has calibration gas supply flow path that supplies calibration gas to primary side of flow-control unit of source gas supply flow path at time of manufacture stop of hydrogen-selenide mixed gas. The primary side of on-off valve of calibration gas supply flow path is provided with mass-flow meter. A bypass flow path connects the primary side of flow-control unit of base gas supply flow path and said source gas supply flow path. The inert gas is supplied to source gas supply flow path from base gas supply flow path, when automatic valve (14) is used as open state. A branched flow path is provided in secondary side of flow-control unit of source gas supply flow path.    DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the supply apparatus of hydrogen-selenide mixed gas. (Drawing includes non-English language text)    Opening-closing valve (4)    Mass-flow controller (6)    Automatic valve (14)    Mass-flow meter (16)    Supply apparatus (101)