TECHNOLOGY FOCUS - CERAMICS AND GLASS - Preferred Composition: The substrate comprises glass, metal, ceramic or plastic.    TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Composition: The gas of the plasma treatment comprises gas containing mixed gas of oxygen and sulfur hexafluoride, mixed gas of carbon tetrafluoride and oxygen and/or argon, or gas containing oxygen, water, air, mixed gas of oxygen and ozone, and/or mixed gas of oxygen and hydrogen peroxide. The anti-reflection coating comprises zinc oxide, silicon, silica, titanium oxide, silicon nitride, tantalum oxide, zirconium oxide, aluminum oxide, indium oxide, tin oxide, gallium oxide, tin-doped indium oxide, fluorinated tin-doped indium oxide, fluorine-doped indium oxide, aluminum-doped zinc oxide, gallium-doped zinc oxide, zinc sulfide, zinc selenide and/or magnesium fluoride or porous silicon oxide, porous titanium oxide, porous aluminum oxide and/or porous zirconium oxide Preferred Process: The plasma treatment involves using gas which is capable of forming hydroxyl on surface of the substrate. The gas flow rate in the plasma treatment is 20-60 sccm. The plasma treatment is performed using oxygen and/or argon with a radio frequency power of 100-500 W, under a gas flow rate of 20-60 sccm and under a gas pressure of 20-200mTorr or atmospheric pressure for one minute. The hydrophobic component is fabricated by incident light having wavelength of 300-1000 nm.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Composition: The low surface energy coating comprises methoxysilane, alkylsilane, fluorine-containing silane, and grafted siloxane chain compound. Preferred Properties: The thickness of the low surface energy coating is l0-500 nm. Preferred Process: The low surface energy coating comprises hexadecyltrimethoxysilane, and is formed by providing hexadecyltrimethoxysilane, adding ethanol in the hexadecyltrimethoxysilane to form a solution, acidizing the solution, stirring the solution after acidizing and coating a surface of the substrate with the solution by soaking, spinning or spraying.