NOVELTY - A glass substrate is obtained by using apparatus having melting furnace which melts the raw material and molds the float bath which floats a molten glass on molten metal into glass ribbon (70), and a slow cooling furnace which anneals the glass ribbon. A laminated film is formed on the glass ribbon by chemical vapor deposition method with injector (60) in a slow cooling furnace, at temperature 50 degrees C more than glass transition temperature (Tg) or less, and 2 or more layers of the laminated film are formed at (Tg+50 degrees C) to glass strain temperature (Ts) of laminated film.    USE - Glass substrate is used for optical components, low-emissivity glass, transparent conductive film for solar cells, anti-reflective films and heat ray reflective films.    ADVANTAGE - The glass substrate is manufactured by simple and economical method, and has tin oxide layer having low resistance.    DETAILED DESCRIPTION - A glass substrate is obtained by using an apparatus having melting furnace which melts the raw material of glass and molds the float bath which floats a molten glass on molten metal into glass ribbon, and a slow cooling furnace which anneals the obtained glass ribbon. A laminated film is formed on the glass ribbon by chemical vapor deposition method with injector (60) in a slow cooling furnace, at temperature 50 degrees C more than glass transition temperature (Tg) or less, and 2 or more layers of the laminated film are formed at (Tg+50 degrees C) to glass strain temperature (Ts) of laminated film. The drop temperature (K1) per unit length of the glass ribbon at a temperature in which all layers of the laminated film are formed is 0-10 degrees C/m. The laminated film contains fluorine-doped tin oxide layer having specific resistance of 4.7x 10-4 or less and carrier density of 2.5x 1020 cm-3 or more. An INDEPENDENT CLAIM is included for manufacture of glass substrate, which involves forming laminated film containing tin tetrachloride, hydrogen fluoride and fluorine-doped tin oxide layer on glass ribbon.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the injector used for manufacture of glass substrate.    Conveyance roller (55)    Electric heater (56)    Injector (60)    Exhaust portion (62)    Glass ribbon (70)