NOVELTY - The method involves receiving (602) process control parameters for devices from process controller by synchronization controller to perform chamber process. A time to send process control parameters to devices is determined (604). The determined time is adjusted (606) using specific signal process delays associated with devices. The process control parameters are sent (608) to the devices at adjusted times to perform the chamber process. The synchronization controller is provided with output channels that are directly coupled to one of the devices.    USE - Method for processing substrate such as silicon substrate, silicon germanium substrate, epi-substrate, silicon-on-insulator (SOI) substrate, display substrate such as LCD, plasma display, electro luminescence (EL) lamp display, LED substrate, solar cell array, solar panel and semiconductor wafer in process chamber.    ADVANTAGE - The synchronization of the sending of process parameters can be performed efficiently, so as to reduce the control signal transmission delays. The deposition performance can be improved effectively. The repeatability of process results and reliability of hardware components can be improved efficiently. The medium energy and high energy processes can be combined in multi-step process for copper ion reflow or electrochemical deposition, so as to prevent damage to the substrate.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following:    (1) a substrate processing system; and    (2) a method for forming layers on substrate.    DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for synchronizing control of support systems associated with processing of semiconductor substrate.    Step for receiving process control parameters for devices from process controller (602)    Step for determining time to send process control parameters to devices (604)    Step for adjusting determined time using specific signal process delays associated with devices (606)    Step for sending process control parameters to devices at adjusted times (608)    Step for controlling devices using proves control parameters (610)