NOVELTY - Preparing (M1) a surface (304) including many protrusions (310) extending from it and having shadowed regions, for deposition of a thin film (800) on it, comprises locally treating at least one of the protrusion.    USE - The method is useful for preparing a surface for deposition of a thin film on it, where the surface is a surface of a microelectronic device comprising an integrated circuit, charge coupled device, LED (organic LED), light emitting polymer device, organic light emitting device, metal sensor pad, micro-disk laser, electrochromic device, photochromic device, display, organic electronic device, microelectromechanical system, thin film transistor, or solar cell (claimed) and the device is used in consumer products, including flat panel displays, computer monitors, medical monitors, televisions, billboards, lights for interior or exterior illumination and/or signaling, heads up displays, fully transparent displays, flexible displays, laser printers, telephones, cell phones, personal digital assistants, laptop computers, digital cameras, camcorders, viewfinders, micro-displays, vehicles, a large area wall, theater or stadium screen, or a sign.    DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for:    (1) encapsulating (M2) a device including protrusions extending from it, comprising locally treating the protrusions, and depositing a thin film to encapsulate the device after local treatment of the protrusion;    (2) an encapsulated device, comprising a surface comprising protrusions extending from it, and a thin film deposited to encapsulate the device, where the protrusions have undergone local treatment prior to deposition of the thin film;    (3) a microelectronic device, comprising a surface comprising protrusions extending from it, and the thin film deposited to encapsulate the microelectronic device; and    (4) a system for preparing a surface for deposition of a thin film on it, where the surface includes protrusions extending from it which have shadowed regions, comprising at least one detecting device to locate protrusion satisfying a threshold value for at least one measurable aspect of the protrusions, and at least one device to locally treat at least one of the protrusion for which the measurable aspect exceeds the threshold value.    DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of the method of depositing the thin film on the microelectronic device.    Surface (304)    Protrusion (310)    Barrier layer (320)    Precursor (500)    Thin film (800)