NOVELTY - The method involves depositing a catalytic metal layer e.g. platinum layer (130), a dielectric layer and an aluminum layer onto a silicon wafer (140). The aluminum layer is patterned to form a patterned aluminum layer that is etched to form an etched aluminum layer, where the dielectric layer acts as etch stop for the etched aluminum layer. The dielectric layer is etched, where the catalytic metal layer acts as etch stop and an aluminum electrode acts as a mask for preserving the dielectric layer under the etched aluminum layer and forming a thin aluminum anode galvanic cell on the wafer.    USE - Method for fabricating a high-energy thin MEMS aluminum anode galvanic cell such as fuel cell and semi-fuel cell, on a silicon wafer.    ADVANTAGE - The method enables forming a recess with three sidewalls in the silicon wafer and positioning the catalytic metal layer on bottom of the recess and the aluminum foil layer in overlying relation to contact the three sidewalls of the recess, so that a galvanic cell can be formed in an effective manner. The method enables fabricating the thin aluminum anode galvanic cell using highly reproducible process so as to enable high volume manufacturing of the galvanic cell. The method enables preventing delamination of the cell when aluminum etches away based on cell activation. The method enables placing an aluminum wafer on top of the galvanic cell for making sure that the wafers are aligned, so that a portion of metals can be easily accessed to serve as electrical contacts. The method ensures that electrodes distance is very small, so that over polarizations due to ion transport can be minimized. The method enables eliminating the possibility of formation of small cracks in a polymers surface since the polymer can be softened at 205 degree Celsius temperature. The method enables achieving larger voltages if high currents are available after delivering a certain amount of energy for size and per unit weight of the cell and utilizing environmentally inert materials in manufacturing process of the cell.    DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a high-energy thin MEMS aluminum anode galvanic cell.    DESCRIPTION OF DRAWING(S) - The drawing shows an exploded perspective view of a high-energy thin MEMS aluminum anode galvanic cell with electrolyte-cavities manufactured through surface micromachining.    Platinum layer (130)    Titanium nitride (135)    Silicon wafer (140)    Benzo-cyclobutene layer (160)    Holes (165)