NOVELTY - The susceptor comprises a base member including a set of openings, a drive shaft supporting the base member, and a set of heating modules individually heating the loaded substrates through the openings so as to be individually separate the substrates inside the base member, where the heater modules directly support the loaded substrate through the openings. The heater modules comprise a heating block to heat the substrate, and a supporting shaft supporting the heating block inserted inside the drive shaft perpendicularly coupled to a side of the heating block.    USE - The susceptor is useful in a substrate processing apparatus (claimed) in manufacturing process of a solar cell, a semiconductor device, and a flat panel display.    ADVANTAGE - The susceptor controls temperature of multiple substrates, deposits thin film layer on the substrates with uniform thickness, and sprays the process gas for depositing the thin film layer on the substrate using multiple gas sprayed modules that are spatially separated, so that usage efficiency of the process gas can be improved.    DETAILED DESCRIPTION - The susceptor comprises a base member including a set of openings, a drive shaft supporting the base member, and a set of heating modules individually heating the loaded substrates through the openings so as to be individually separate the substrates inside the base member, where the heater modules directly support the loaded substrate through the openings. The heater modules comprise a heating block to heat the substrate, a supporting shaft supporting the heating block inserted inside the drive shaft perpendicularly coupled to a side of the heating block, and a heater element formed inside the heating block to heat the substrate. A heater mounting groove is formed concavely so as to have a constant depth from the substrate heating block constituted by the heater member. The groove has a depth of half of abnormal thickness of the substrate heating block. The heater element comprises hot wire, a tubular heater or lamp heater. The base member comprises a sealing member that is placed between the edge portions of the substrate heating block. Bottom and top covers cover the edge portions of the heating block. A driving unit rotates the base member and successively moves the multiple substrates into the processing chamber. An INDEPENDENT CLAIM is included for a substrate processing apparatus.