NOVELTY - The light emitting device has a first conductive semiconductor layer on a substrate and a control layer (7) between the substrate and the first conductive semiconductor layer. The control layer has a first nitride semiconductor layer (15) including aluminum (Al), nano-structures (17) on the first nitride semiconductor layer and a second nitride semiconductor layer (19) disposed on the first nitride semiconductor layer and including gallium (Ga). The nano-structures include silicon nitride (SiN), and are formed in a pit (13) or a pin hole of the first nitride semiconductor layer.    USE - Light emitting device for use in e.g., electronic device e.g., solar cell, photodetector, power device, MOSFET, light emitting device package e.g., a chip on board (COB) type light emitting device package, a lighting system e.g., a lamp, a signal lamp, a headlight of a vehicle, an electric sign board, or an indicator lamp.    ADVANTAGE - Provides a semiconductor substrate capable of improving a yield rate by controlling stress to prevent cracks. Minimizes or completely removes defects, such as a dislocation, a pit, cracks, and non-uniform stress, which may be formed in the semiconductor substrate. The first nitride semiconductor layer, the nano-structures, and the second nitride semiconductor layer are formed at a cycle taken for predetermined times, enhancing the compressive stress to easily control stress so that the enhanced compressive stress makes stress-equilibrium together with tensile stress when the semiconductor substrate is cooled. A fourth nitride semiconductor layer is grown on the second nitride semiconductor layer while being maintained with superior quality, so that the surface roughness on the top surface of the second nitride semiconductor layer can be minimized.    DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a control layer.    Control layer (7)    Dislocation (11)    Pit (13)    First nitride semiconductor layer (15)    Nano-structures (17)    Second nitride semiconductor layer (19)