TECHNOLOGY FOCUS - INORGANIC CHEMISTRY - Preferred Components: The inert gas is xenon, argon, neon, and/or krypton.    TECHNOLOGY FOCUS - INSTRUMENTATION AND TESTING - Preferred Components: The sub-atmospheric delivery and storage device comprises a cylinder (101) formed from aluminum and a valve body, where the valve body is characterized by the absence of a pressure relief device. The sub-atmospheric delivery and storage device comprises a combination of at least one valve element (102) and/or restrictive flow elements comprising pressure regulators, check valves, excess flow valves or restrictive flow orifices. The delivery and storage device comprises at least one pressure regulator disposed in series within the interior of the cylinder. The restrictive flow element comprises capillaries (108). The delivery and storage device comprises a cylinder having an interior defined by passivating wall surfaces. The delivery and storage device is characterized by an absence of adsorption media or ionic mixtures contained in it. The single source supply is a sub-atmospheric delivery and storage device for maintaining the dopant mixture in a pressurized state within an interior volume of the device, where the delivery device is actuated to allow a controlled flow of the dopant mixture from the interior volume of the device in response to a sub-atmospheric condition achieved along the discharge flow path and extending into an ion source chamber. In the gas composition: a first supply vessel comprises carbon monoxide and a second supply vessel comprises xenon and hydrogen, where the first and second vessels are provided as part of a gas kit; and each of the first and the second supply vessels is a sub-atmospheric delivery and storage device for maintaining the carbon monoxide and the xenon and hydrogen in a pressurized state within an interior volume of the device, and each of the first and the second supply vessels is actuated to allow a controlled flow of the carbon monoxide and the xenon and hydrogen from the interior volume of the corresponding first and second supply vessels in response to a sub-atmospheric condition achieved along the discharge flow path and extending into an ion source chamber.    TECHNOLOGY FOCUS - ORGANIC CHEMISTRY - Preferred Components: The carbon-containing source is hexafluoroethane, tetrafluoromethane, octafluorocyclobutane, tetrafluoroethylene, methane, and/or acetylene. The carbon-containing source is carbon monoxide, and the diluent gas mixture comprises essentially of xenon and hydrogen. The carbon sources comprise carbon monoxide and the diluent gas composition comprises xenon and hydrogen, where the xenon and hydrogen are in a volume ratio of 0.02-0.2 and the volume ratio of (xenon and hydrogen): carbon monoxide is 0.1-0.3. Preferred Method: The method (M1) further comprises: pre-mixing the carbon monoxide, xenon and hydrogen; and co-flowing or sequentially flowing a stream of the carbon monoxide with a stream of the xenon and hydrogen. The step of pre-mixing comprises: filling a sub-atmospheric delivery and storage device with carbon monoxide; filling the device with xenon and hydrogen; producing a pressurized mixture; and retaining a vacuum-actuated valve in a sealed configuration to maintain the mixture within the device at a predetermined storage pressure. The gas composition is premixed as a dopant mixture within a single source supply. The xenon: hydrogen is present in a volume ratio of 0.02-0.06. The (xenon and hydrogen): carbon monoxide is present in a volume ratio of 0.15-0.2.