TECHNOLOGY FOCUS - POLYMERS - Preferred Composition: The polysiloxane (Ib) is polysiloxane (Ib') having dissolution rate of 3000 angstrom/second or more with respect to 2.38 wt.% tetramethylammonium hydroxide aqueous solution, and/or polysiloxane (Ib") having dissolution rate of 200-3000 angstrom/second. The polysiloxane (Ib') is in form of film obtained by hydrolytically-condensating silane compound (I') in presence of basic catalyst and prebaking. The polysiloxane (I) contains polysiloxane (Ia) and polysiloxane (Ib"), and has film thickness of 1.5 microns or less. The polysiloxane (II) is polysiloxane (IIa) in form of film obtained by hydrolytically-condensating silane compound of formula: R3Si(OR4)3 (II') in presence of acidic or basic catalyst and prebaking. The polysiloxane (II) is polysiloxane of having structural unit of formula (V) or (VI). The compounding quantity of polysiloxane (II) is 0.1-5 pts. wt. with respect to 100 pts. wt. polysiloxane (I).R3=group having group of formula: R3a soluble in 2.38% tetramethylammonium aqueous solution, preferably group of formula: -X-M-R3a (IV');R3a=phenolic hydroxy, carboxylic acid or its salt, carboxylic anhydride, sulfonic acid or its salt, thiol, cyano or -CO-R7, where two or more R3a is optionally substituted by M;R7=H, 1-5C alkyl, alkenyl or alkoxy;R4=1-5C alkyl;X=single bond or 1-10C alkylene in which -CH2- is optionally substituted by -CH=CH=, -O-, -CO-, -COO-;M=single bond or 5-10C cycloalkyl, phenyl or naphthalene;R5=methyl or phenyl;n=0-10, and where -CH2- of alkylene in (CH2)n is optionally substituted by -CH=CH-, -O-, -CO- or -COO-;x:y=10:90-90:10;andn=0-10.(i) When M is cycloalkyl, R3a is carboxylic acid or its salt, carboxylic anhydride, sulfonic acid or its salt, thiol or cyano; and (ii) When M is phenyl or naphthalene, R3a is hydroxy, carboxylic acid or its salt, carboxylic anhydride, sulfonic acid or its salt, thiol or cyano. Preferred Property: The polysiloxane (IIa) has dissolution rate of 50-1000 angstrom/second or more with respect to 2.38% tetramethylammonium hydroxide aqueous solution. Preferred Process: The polysiloxane (II) is obtained from silane compound (II') and silane compound of formula: R5Si(OR6)3 (III').R5=methyl or phenyl;andR6=1-5C alkyl.